JPS62194741U - - Google Patents
Info
- Publication number
- JPS62194741U JPS62194741U JP8253286U JP8253286U JPS62194741U JP S62194741 U JPS62194741 U JP S62194741U JP 8253286 U JP8253286 U JP 8253286U JP 8253286 U JP8253286 U JP 8253286U JP S62194741 U JPS62194741 U JP S62194741U
- Authority
- JP
- Japan
- Prior art keywords
- sheet
- light
- chips
- processing device
- ultraviolet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000853 adhesive Substances 0.000 claims 3
- 230000001070 adhesive effect Effects 0.000 claims 3
- 238000000034 method Methods 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 235000012431 wafers Nutrition 0.000 claims 2
- 230000000712 assembly Effects 0.000 claims 1
- 238000000429 assembly Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 230000032258 transport Effects 0.000 claims 1
Landscapes
- Adhesives Or Adhesive Processes (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8253286U JPS62194741U (enrdf_load_stackoverflow) | 1986-06-02 | 1986-06-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8253286U JPS62194741U (enrdf_load_stackoverflow) | 1986-06-02 | 1986-06-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62194741U true JPS62194741U (enrdf_load_stackoverflow) | 1987-12-11 |
Family
ID=30935278
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8253286U Pending JPS62194741U (enrdf_load_stackoverflow) | 1986-06-02 | 1986-06-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62194741U (enrdf_load_stackoverflow) |
-
1986
- 1986-06-02 JP JP8253286U patent/JPS62194741U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US7557904B2 (en) | Wafer holding mechanism | |
| JP7009194B2 (ja) | ウエーハ生成装置および搬送トレー | |
| TW200514188A (en) | Mounting device and mounting method | |
| TWI634671B (zh) | 舉離方法 | |
| JPH10116801A (ja) | 基板分割方法及びその基板分割を用いた発光素子製造 方法 | |
| TW202002050A (zh) | 晶圓的加工方法 | |
| TW202032701A (zh) | 卡盤台 | |
| JP7356289B2 (ja) | 紫外線照射装置及び環状凸部除去装置 | |
| JP4655406B2 (ja) | 面発光式吸着テーブル | |
| JPH07283174A (ja) | ダイシング装置 | |
| TW200849353A (en) | Method of processing wafers | |
| JPH031172Y2 (enrdf_load_stackoverflow) | ||
| JPS62194741U (enrdf_load_stackoverflow) | ||
| JP4302284B2 (ja) | 半導体ウェハの移載装置 | |
| JP4102101B2 (ja) | 撮像ユニット | |
| KR102670602B1 (ko) | 웨이퍼의 가공 방법 | |
| TW201937617A (zh) | 板狀物的加工方法 | |
| JPH0314049Y2 (enrdf_load_stackoverflow) | ||
| JPH06204335A (ja) | 紫外線照射装置 | |
| JPH062269Y2 (ja) | 粘着シート処理装置 | |
| JP3222036U (ja) | 紫外線照射装置 | |
| JPS63119242U (enrdf_load_stackoverflow) | ||
| JPH0616528B2 (ja) | 粘着シ−ト処理装置 | |
| JP3169952B2 (ja) | 紫外線照射方法及び装置 | |
| JPH0325407Y2 (enrdf_load_stackoverflow) |