JPS62192864U - - Google Patents

Info

Publication number
JPS62192864U
JPS62192864U JP8157686U JP8157686U JPS62192864U JP S62192864 U JPS62192864 U JP S62192864U JP 8157686 U JP8157686 U JP 8157686U JP 8157686 U JP8157686 U JP 8157686U JP S62192864 U JPS62192864 U JP S62192864U
Authority
JP
Japan
Prior art keywords
chamber
sample
processed
removal
processing chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8157686U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8157686U priority Critical patent/JPS62192864U/ja
Publication of JPS62192864U publication Critical patent/JPS62192864U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Lead Frames For Integrated Circuits (AREA)
JP8157686U 1986-05-28 1986-05-28 Pending JPS62192864U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8157686U JPS62192864U (enExample) 1986-05-28 1986-05-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8157686U JPS62192864U (enExample) 1986-05-28 1986-05-28

Publications (1)

Publication Number Publication Date
JPS62192864U true JPS62192864U (enExample) 1987-12-08

Family

ID=30933444

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8157686U Pending JPS62192864U (enExample) 1986-05-28 1986-05-28

Country Status (1)

Country Link
JP (1) JPS62192864U (enExample)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS449911Y1 (enExample) * 1965-06-30 1969-04-21
JPS58171261A (ja) * 1982-03-31 1983-10-07 Fujitsu Ltd ホ−ニング装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS449911Y1 (enExample) * 1965-06-30 1969-04-21
JPS58171261A (ja) * 1982-03-31 1983-10-07 Fujitsu Ltd ホ−ニング装置

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