JPS6219188U - - Google Patents
Info
- Publication number
- JPS6219188U JPS6219188U JP10062785U JP10062785U JPS6219188U JP S6219188 U JPS6219188 U JP S6219188U JP 10062785 U JP10062785 U JP 10062785U JP 10062785 U JP10062785 U JP 10062785U JP S6219188 U JPS6219188 U JP S6219188U
- Authority
- JP
- Japan
- Prior art keywords
- suction
- holding device
- suction part
- flow path
- negative pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000428 dust Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000001179 sorption measurement Methods 0.000 description 1
Landscapes
- Feeding Of Workpieces (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10062785U JPH0650987Y2 (ja) | 1985-07-02 | 1985-07-02 | ウエハ吸着保持装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10062785U JPH0650987Y2 (ja) | 1985-07-02 | 1985-07-02 | ウエハ吸着保持装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6219188U true JPS6219188U (US20020051482A1-20020502-M00012.png) | 1987-02-04 |
JPH0650987Y2 JPH0650987Y2 (ja) | 1994-12-21 |
Family
ID=30970622
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10062785U Expired - Lifetime JPH0650987Y2 (ja) | 1985-07-02 | 1985-07-02 | ウエハ吸着保持装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0650987Y2 (US20020051482A1-20020502-M00012.png) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0578491U (ja) * | 1992-03-30 | 1993-10-26 | 株式会社芝浦製作所 | ワーク搬送装置 |
JP2010146927A (ja) * | 2008-12-22 | 2010-07-01 | Hitachi High-Technologies Corp | 試料搬送機構、及び試料搬送機構を備えた走査電子顕微鏡 |
JP2011040707A (ja) * | 2009-08-13 | 2011-02-24 | Samsung Mobile Display Co Ltd | ストッカー |
WO2015159849A1 (ja) * | 2014-04-14 | 2015-10-22 | 東京エレクトロン株式会社 | 集塵用治具、基板処理装置及びパーティクル捕集方法 |
-
1985
- 1985-07-02 JP JP10062785U patent/JPH0650987Y2/ja not_active Expired - Lifetime
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0578491U (ja) * | 1992-03-30 | 1993-10-26 | 株式会社芝浦製作所 | ワーク搬送装置 |
JP2010146927A (ja) * | 2008-12-22 | 2010-07-01 | Hitachi High-Technologies Corp | 試料搬送機構、及び試料搬送機構を備えた走査電子顕微鏡 |
JP2011040707A (ja) * | 2009-08-13 | 2011-02-24 | Samsung Mobile Display Co Ltd | ストッカー |
US8683643B2 (en) | 2009-08-13 | 2014-04-01 | Samsung Display Co., Ltd. | Stocker |
WO2015159849A1 (ja) * | 2014-04-14 | 2015-10-22 | 東京エレクトロン株式会社 | 集塵用治具、基板処理装置及びパーティクル捕集方法 |
JP2015204378A (ja) * | 2014-04-14 | 2015-11-16 | 東京エレクトロン株式会社 | 集塵用治具、基板処理装置及びパーティクル捕集方法。 |
Also Published As
Publication number | Publication date |
---|---|
JPH0650987Y2 (ja) | 1994-12-21 |