JPS6219188U - - Google Patents

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Publication number
JPS6219188U
JPS6219188U JP10062785U JP10062785U JPS6219188U JP S6219188 U JPS6219188 U JP S6219188U JP 10062785 U JP10062785 U JP 10062785U JP 10062785 U JP10062785 U JP 10062785U JP S6219188 U JPS6219188 U JP S6219188U
Authority
JP
Japan
Prior art keywords
suction
holding device
suction part
flow path
negative pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10062785U
Other languages
Japanese (ja)
Other versions
JPH0650987Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10062785U priority Critical patent/JPH0650987Y2/en
Publication of JPS6219188U publication Critical patent/JPS6219188U/ja
Application granted granted Critical
Publication of JPH0650987Y2 publication Critical patent/JPH0650987Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Feeding Of Workpieces (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は従来の吸着保持装置の斜視図、第２図
は第１図に示した装置をＡ―Ａ′からみた吸着保
持装置の断面図、第３図は本考案に係る吸着保持
装置の平面図、第４図は第３図のＢ―Ｂ′からみ
た装置の断面図である。 ３０：吸着保持装置、１８′：突起部、３４：
外縁部、３２：防塵流路、２０′，３８：吸引通
路、４０：吸引開口部。 FIG. 1 is a perspective view of a conventional suction holding device, FIG. 2 is a sectional view of the suction holding device shown in FIG. The plan view, FIG. 4, is a sectional view of the device taken along line BB' in FIG. 30: Adsorption holding device, 18': Projection, 34:
Outer edge, 32: dust-proof channel, 20', 38: suction passage, 40: suction opening.

Claims (1)

【実用新案登録請求の範囲】 (1) 吸着部を負圧にして物体を吸着保持する装
置において、前記吸着部の外周に流路を設け、該
流路を負圧にして吸着の際に発生する塵を吸引す
ることを特徴とする防塵流路を有する吸着保持装
置。 (2) 前記物体は半導体ウエハである実用新案登
録請求の範囲第１項記載の吸着保持装置。[Claims for Utility Model Registration] (1) In a device that holds an object by suction by applying a negative pressure to the suction part, a flow path is provided around the outer periphery of the suction part, and the problem occurs when the suction part is set to a negative pressure and the object is suctioned. A suction/holding device having a dust-proof flow path, which is characterized by suctioning dust. (2) The suction and holding device according to claim 1, wherein the object is a semiconductor wafer.
JP10062785U 1985-07-02 1985-07-02 Wafer suction holding device Expired - Lifetime JPH0650987Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10062785U JPH0650987Y2 (en) 1985-07-02 1985-07-02 Wafer suction holding device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10062785U JPH0650987Y2 (en) 1985-07-02 1985-07-02 Wafer suction holding device

Publications (2)

Publication Number Publication Date
JPS6219188U true JPS6219188U (en) 1987-02-04
JPH0650987Y2 JPH0650987Y2 (en) 1994-12-21

Family

ID=30970622

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10062785U Expired - Lifetime JPH0650987Y2 (en) 1985-07-02 1985-07-02 Wafer suction holding device

Country Status (1)

Country Link
JP (1) JPH0650987Y2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0578491U (en) * 1992-03-30 1993-10-26 株式会社芝浦製作所 Work transfer device
JP2010146927A (en) * 2008-12-22 2010-07-01 Hitachi High-Technologies Corp Sample conveying mechanism and scanning electron microscope having the same
JP2011040707A (en) * 2009-08-13 2011-02-24 Samsung Mobile Display Co Ltd Stocker
WO2015159849A1 (en) * 2014-04-14 2015-10-22 東京エレクトロン株式会社 Dust collection tool, substrate processing device and particle collection method

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0578491U (en) * 1992-03-30 1993-10-26 株式会社芝浦製作所 Work transfer device
JP2010146927A (en) * 2008-12-22 2010-07-01 Hitachi High-Technologies Corp Sample conveying mechanism and scanning electron microscope having the same
JP2011040707A (en) * 2009-08-13 2011-02-24 Samsung Mobile Display Co Ltd Stocker
US8683643B2 (en) 2009-08-13 2014-04-01 Samsung Display Co., Ltd. Stocker
WO2015159849A1 (en) * 2014-04-14 2015-10-22 東京エレクトロン株式会社 Dust collection tool, substrate processing device and particle collection method
JP2015204378A (en) * 2014-04-14 2015-11-16 東京エレクトロン株式会社 Jig for dust collection, substrate processing device and particle collection method

Also Published As

Publication number Publication date
JPH0650987Y2 (en) 1994-12-21

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