JPS62190645U - - Google Patents

Info

Publication number
JPS62190645U
JPS62190645U JP7879486U JP7879486U JPS62190645U JP S62190645 U JPS62190645 U JP S62190645U JP 7879486 U JP7879486 U JP 7879486U JP 7879486 U JP7879486 U JP 7879486U JP S62190645 U JPS62190645 U JP S62190645U
Authority
JP
Japan
Prior art keywords
lid body
opening
processing mechanism
case
powder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7879486U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7879486U priority Critical patent/JPS62190645U/ja
Publication of JPS62190645U publication Critical patent/JPS62190645U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Centrifugal Separators (AREA)
  • Separation Of Solids By Using Liquids Or Pneumatic Power (AREA)
JP7879486U 1986-05-27 1986-05-27 Pending JPS62190645U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7879486U JPS62190645U (enrdf_load_stackoverflow) 1986-05-27 1986-05-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7879486U JPS62190645U (enrdf_load_stackoverflow) 1986-05-27 1986-05-27

Publications (1)

Publication Number Publication Date
JPS62190645U true JPS62190645U (enrdf_load_stackoverflow) 1987-12-04

Family

ID=30928060

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7879486U Pending JPS62190645U (enrdf_load_stackoverflow) 1986-05-27 1986-05-27

Country Status (1)

Country Link
JP (1) JPS62190645U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62272441A (ja) * 1986-05-20 1987-11-26 Tokyo Electron Ltd イオン注入装置におけるウエハ保持装置
JPH0768237A (ja) * 1993-09-01 1995-03-14 Minoru Fukaya 建設廃泥の処理方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62272441A (ja) * 1986-05-20 1987-11-26 Tokyo Electron Ltd イオン注入装置におけるウエハ保持装置
JPH0768237A (ja) * 1993-09-01 1995-03-14 Minoru Fukaya 建設廃泥の処理方法

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