JPS62190341U - - Google Patents
Info
- Publication number
- JPS62190341U JPS62190341U JP7695886U JP7695886U JPS62190341U JP S62190341 U JPS62190341 U JP S62190341U JP 7695886 U JP7695886 U JP 7695886U JP 7695886 U JP7695886 U JP 7695886U JP S62190341 U JPS62190341 U JP S62190341U
- Authority
- JP
- Japan
- Prior art keywords
- counter
- electromagnetic counter
- electromagnetic
- measuring
- power source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Description
第１図は、本考案の一実施例を示す構成ブロツ
ク図、第２図は本考案の他の実施例を示す構成ブ
ロツク図である。
１……エツチング処理室、２……上部電極、３
……下部電極、４……高周波電源、５……コント
ローラ、６……電磁カウンタ、７……ウエハ、８
……リレー接点。
FIG. 1 is a block diagram showing one embodiment of the present invention, and FIG. 2 is a block diagram showing another embodiment of the present invention. 1... Etching processing chamber, 2... Upper electrode, 3
... lower electrode, 4 ... high frequency power supply, 5 ... controller, 6 ... electromagnetic counter, 7 ... wafer, 8
...Relay contact.
Claims (1)
いて、ウエハ処理回数を計測する電磁カウンタを
設け、前記電磁カウンタの入力信号にプラズマを
発生させる電源の起動、停止の状態信号を用いた
ことを特徴とする半導体製造装置のパツチカウン
タ。 Semiconductor manufacturing equipment having a plasma generation mechanism, including an electromagnetic counter for measuring the number of times of wafer processing, and using a start/stop state signal of a power source for generating plasma as an input signal of the electromagnetic counter. Device patch counter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7695886U JPS62190341U (en) | 1986-05-23 | 1986-05-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7695886U JPS62190341U (en) | 1986-05-23 | 1986-05-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62190341U true JPS62190341U (en) | 1987-12-03 |
Family
ID=30924515
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7695886U Pending JPS62190341U (en) | 1986-05-23 | 1986-05-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62190341U (en) |
-
1986
- 1986-05-23 JP JP7695886U patent/JPS62190341U/ja active Pending
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