JPS62188049U - - Google Patents
Info
- Publication number
- JPS62188049U JPS62188049U JP7534086U JP7534086U JPS62188049U JP S62188049 U JPS62188049 U JP S62188049U JP 7534086 U JP7534086 U JP 7534086U JP 7534086 U JP7534086 U JP 7534086U JP S62188049 U JPS62188049 U JP S62188049U
- Authority
- JP
- Japan
- Prior art keywords
- cylinder
- filament
- plasma generation
- utility
- generation chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
Description
第１図は、この考案の一実施例の側断面図、第
２図は第１図の一部斜視図、第３図は従来のイオ
ン注入装置のイオン源の側断面図である。
１…真空筐体、６…プラズマ生成室、７…フイ
ラメント、１７…円筒、１８…スリツト、１９…
回転ロツド。なお、各図中、同一符号は同一又は
相当部分を示す。
FIG. 1 is a side sectional view of an embodiment of this invention, FIG. 2 is a partial perspective view of FIG. 1, and FIG. 3 is a side sectional view of an ion source of a conventional ion implantation apparatus. DESCRIPTION OF SYMBOLS 1... Vacuum housing, 6... Plasma generation chamber, 7... Filament, 17... Cylinder, 18... Slit, 19...
Rotating rod. In each figure, the same reference numerals indicate the same or equivalent parts.
Claims (1)
イラメントを内蔵したプラズマ生成室と、このプ
ラズマ生成室内に前記フイラメントの軸線に関し
て可回動に支持された円筒と、この円筒に形成さ
れた少なくとも２対の互いに相違するサイズのス
リツトとを備えてなるイオン注入装置のイオン源
。 (2) 真空筐体の外部で操作され、歯車を介して
円筒を回動する回転ロツドを備えた実用新案登録
請求の範囲第１項記載のイオン注入装置のイオン
源。[Claims for Utility Model Registration] (1) A plasma generation chamber disposed in a vacuum housing and containing a filament that emits thermoelectrons, and a cylinder supported within the plasma generation chamber so as to be rotatable about the axis of the filament. and at least two pairs of slits of different sizes formed in the cylinder. (2) An ion source for an ion implantation device according to claim 1, which is a utility model and includes a rotating rod that is operated outside a vacuum casing and rotates a cylinder via gears.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7534086U JPS62188049U (en) | 1986-05-21 | 1986-05-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7534086U JPS62188049U (en) | 1986-05-21 | 1986-05-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62188049U true JPS62188049U (en) | 1987-11-30 |
Family
ID=30921389
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7534086U Pending JPS62188049U (en) | 1986-05-21 | 1986-05-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62188049U (en) |
-
1986
- 1986-05-21 JP JP7534086U patent/JPS62188049U/ja active Pending