JPS62187680U - - Google Patents
Info
- Publication number
- JPS62187680U JPS62187680U JP7464386U JP7464386U JPS62187680U JP S62187680 U JPS62187680 U JP S62187680U JP 7464386 U JP7464386 U JP 7464386U JP 7464386 U JP7464386 U JP 7464386U JP S62187680 U JPS62187680 U JP S62187680U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- processing liquid
- spray device
- main surface
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 10
- 239000007788 liquid Substances 0.000 claims description 6
- 239000007921 spray Substances 0.000 claims description 5
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986074643U JPH0446860Y2 (US06521211-20030218-C00004.png) | 1986-05-20 | 1986-05-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986074643U JPH0446860Y2 (US06521211-20030218-C00004.png) | 1986-05-20 | 1986-05-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62187680U true JPS62187680U (US06521211-20030218-C00004.png) | 1987-11-28 |
| JPH0446860Y2 JPH0446860Y2 (US06521211-20030218-C00004.png) | 1992-11-05 |
Family
ID=30920044
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986074643U Expired JPH0446860Y2 (US06521211-20030218-C00004.png) | 1986-05-20 | 1986-05-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0446860Y2 (US06521211-20030218-C00004.png) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0345631U (US06521211-20030218-C00004.png) * | 1989-09-13 | 1991-04-26 | ||
| JPH05208163A (ja) * | 1991-10-29 | 1993-08-20 | Internatl Business Mach Corp <Ibm> | スピン・コーティング装置および方法 |
| WO2003105201A1 (ja) * | 2002-06-07 | 2003-12-18 | 東京エレクトロン株式会社 | 基板処理装置、基板処理方法及び現像装置 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5564234A (en) * | 1978-11-06 | 1980-05-14 | Mitsubishi Electric Corp | Developing method of resist film |
| JPS5575223A (en) * | 1978-12-04 | 1980-06-06 | Fujitsu Ltd | Manufacturing semiconductor device |
-
1986
- 1986-05-20 JP JP1986074643U patent/JPH0446860Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5564234A (en) * | 1978-11-06 | 1980-05-14 | Mitsubishi Electric Corp | Developing method of resist film |
| JPS5575223A (en) * | 1978-12-04 | 1980-06-06 | Fujitsu Ltd | Manufacturing semiconductor device |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0345631U (US06521211-20030218-C00004.png) * | 1989-09-13 | 1991-04-26 | ||
| JPH05208163A (ja) * | 1991-10-29 | 1993-08-20 | Internatl Business Mach Corp <Ibm> | スピン・コーティング装置および方法 |
| WO2003105201A1 (ja) * | 2002-06-07 | 2003-12-18 | 東京エレクトロン株式会社 | 基板処理装置、基板処理方法及び現像装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0446860Y2 (US06521211-20030218-C00004.png) | 1992-11-05 |
