JPS62186427U - - Google Patents
Info
- Publication number
- JPS62186427U JPS62186427U JP7676586U JP7676586U JPS62186427U JP S62186427 U JPS62186427 U JP S62186427U JP 7676586 U JP7676586 U JP 7676586U JP 7676586 U JP7676586 U JP 7676586U JP S62186427 U JPS62186427 U JP S62186427U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- brush
- cleaning device
- holds
- rotating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 9
- 238000004140 cleaning Methods 0.000 claims description 3
- 239000000356 contaminant Substances 0.000 claims 1
Landscapes
- Cleaning In General (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7676586U JPS62186427U (fr) | 1986-05-20 | 1986-05-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7676586U JPS62186427U (fr) | 1986-05-20 | 1986-05-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62186427U true JPS62186427U (fr) | 1987-11-27 |
Family
ID=30924154
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7676586U Pending JPS62186427U (fr) | 1986-05-20 | 1986-05-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62186427U (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0352228A (ja) * | 1989-07-20 | 1991-03-06 | Tokyo Electron Ltd | 洗浄装置 |
-
1986
- 1986-05-20 JP JP7676586U patent/JPS62186427U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0352228A (ja) * | 1989-07-20 | 1991-03-06 | Tokyo Electron Ltd | 洗浄装置 |
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