JPS62185265A - 光情報記録媒体用基板の製造方法 - Google Patents
光情報記録媒体用基板の製造方法Info
- Publication number
- JPS62185265A JPS62185265A JP2826986A JP2826986A JPS62185265A JP S62185265 A JPS62185265 A JP S62185265A JP 2826986 A JP2826986 A JP 2826986A JP 2826986 A JP2826986 A JP 2826986A JP S62185265 A JPS62185265 A JP S62185265A
- Authority
- JP
- Japan
- Prior art keywords
- original plate
- plate
- information
- hole
- preliminary
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 11
- 239000000758 substrate Substances 0.000 title claims description 32
- 230000003287 optical effect Effects 0.000 title claims description 14
- 238000000034 method Methods 0.000 claims description 18
- 239000010408 film Substances 0.000 description 21
- 239000010410 layer Substances 0.000 description 17
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- 229910052814 silicon oxide Inorganic materials 0.000 description 8
- 229920002120 photoresistant polymer Polymers 0.000 description 6
- 238000005530 etching Methods 0.000 description 5
- 239000011521 glass Substances 0.000 description 5
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 4
- 229910052804 chromium Inorganic materials 0.000 description 4
- 239000011651 chromium Substances 0.000 description 4
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 238000001459 lithography Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- VLTRZXGMWDSKGL-UHFFFAOYSA-N perchloric acid Chemical compound OCl(=O)(=O)=O VLTRZXGMWDSKGL-UHFFFAOYSA-N 0.000 description 2
- 230000007261 regionalization Effects 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- PAWQVTBBRAZDMG-UHFFFAOYSA-N 2-(3-bromo-2-fluorophenyl)acetic acid Chemical compound OC(=O)CC1=CC=CC(Br)=C1F PAWQVTBBRAZDMG-UHFFFAOYSA-N 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000004380 ashing Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 150000001844 chromium Chemical class 0.000 description 1
- 210000000078 claw Anatomy 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 238000000609 electron-beam lithography Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 239000005361 soda-lime glass Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Landscapes
- Manufacturing Optical Record Carriers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2826986A JPS62185265A (ja) | 1986-02-12 | 1986-02-12 | 光情報記録媒体用基板の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2826986A JPS62185265A (ja) | 1986-02-12 | 1986-02-12 | 光情報記録媒体用基板の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62185265A true JPS62185265A (ja) | 1987-08-13 |
| JPH0453016B2 JPH0453016B2 (enrdf_load_stackoverflow) | 1992-08-25 |
Family
ID=12243857
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2826986A Granted JPS62185265A (ja) | 1986-02-12 | 1986-02-12 | 光情報記録媒体用基板の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62185265A (enrdf_load_stackoverflow) |
-
1986
- 1986-02-12 JP JP2826986A patent/JPS62185265A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0453016B2 (enrdf_load_stackoverflow) | 1992-08-25 |
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