CA2062840C - Method of fabricating glass substrate for disk - Google Patents
Method of fabricating glass substrate for diskInfo
- Publication number
- CA2062840C CA2062840C CA002062840A CA2062840A CA2062840C CA 2062840 C CA2062840 C CA 2062840C CA 002062840 A CA002062840 A CA 002062840A CA 2062840 A CA2062840 A CA 2062840A CA 2062840 C CA2062840 C CA 2062840C
- Authority
- CA
- Canada
- Prior art keywords
- glass substrate
- portion formation
- formation area
- guide track
- fabricating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
- G11B7/261—Preparing a master, e.g. exposing photoresist, electroforming
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
Abstract
A method of fabricating a glass substrate for a disk including guide track portions and sector (or track) address portions of which grooves and pits have different depths, providing the steps of (i) forming a photoresist film over a glass substrate for an optical memory element, (ii) carrying out exposure to define a plurality of guide track portion formation areas and sector (or track) address portion formation areas interposed between the guide track portion formation areas, and carrying out development so as to cause the glass substrate in the address portion formation area to appear and to cause the photoresist film in the guide track portion formation area to remain as a first residual film, (iii) carrying out first etching to sink the glass substrate in the address portion formation area by a predetermined thickness such that a pit is formed and to remove the surface layer of the first residual film such that a second residual film is formed, (iv) carrying out first ashing to remove the second residual film so that the glass substrate in the guide track portion formation area appears, (v) carrying out second etching to form a groove in the guide track portion formation area and to further sink the pit in the address portion formation area so that a deeper pit is formed, and (vi) carrying out second ashing to remove a third residual photoresist film which remains between the deeper pit and the groove.
Description
Z~?~
SPECIFICATION
TITLE OF THE INVENTION
Method of Fabricating Glass Su~strate for Disk BACKGRO~ND OF THE INVENTION
1. Field of the Invention The present invention relates to a method of fabricatin~ a glass substrate for a disk.
SPECIFICATION
TITLE OF THE INVENTION
Method of Fabricating Glass Su~strate for Disk BACKGRO~ND OF THE INVENTION
1. Field of the Invention The present invention relates to a method of fabricatin~ a glass substrate for a disk.
2. Description of the Prior Art Recently, there has been needed an optical memory element as a high density mass memory element. The optical memory element can be classified into a read only memory, a write once memory and a rewritable memory according to its working form. The optical memory element to be used as the write once memory and rewritable memory uses a substrate for a disk. The substrate for a disk preliminarily comprises on a glass substrate guide tracks for guiding optical beams for recording, reading and erasing information to ~redetermined positions on the optical memorY element, and track addresses for identifyin8 track numbers. The track is divided into a plurality of sectors. In the case where information should be managed, sector addresses and the like are often provided in advance. As shown in Fig. B, the depth of a guide track portion lb is not equal to that of a sector (or track~ address portion la, and the address portion la is provided between the guide track portions lb. The reason is as follows. In the case where the optical beams are tracked by an optical differential method, it is preferred that the depth of the guide track portion approximates ~ ~ (8 x n~ and the depth of the address portion approximates ~ / (4 x n) (where A is a wavelength of light to be used and n is a refractive index of a sub~trate). As shown in Figs. 9 to 13, there has been proposed a technique for forming the guide track, the sector (or track) address and the like on a glass substrate by a contact printing method and a dry etching method.
Referring to the technique described above, a photomask i5 used for forming a glass substrate for a disk by the contact printing method and the dry etching method.
The photomask has such a shape that a quantity of light radiated onto the guide track portion and sector (or track) address portion on a photoresist film is varied.
This technique will be summarized with reference to Figs.
9 to 13.
As shown in Fig. 9, a positive type photaresist film 2 is provided on a glass ~ubstrate 1, and prebaking i.
then carried out.
ir ~3 ~ ~
As shown in Fig. 10, a photomask 3 having a thin film 4 for a mask is caused to contact the photoresist f i lm 2 through the thin film 4. In this case, the thin film 4 is not provided in a formation area Al of a sector ~or track) address portion la. Consequently, a quantity of transmitted light is not reduced. The thin film 4 remains at a thickness of ahout 10 to 200 A in a formation area Bl of a guide track portion lb. Consequently, a quantity of transmitted light in the formation area Bl is smaller than in the farmation area Al. Then, ultraviolet rays 5 are radiated to expose ~he photoresist film 2 provided below the photomask 3 (see Fig. 10). Thereafter, the photomasks 3 and 4 are removed.
As shown in Fig. 11, the photoresist film 2 thus exposed is developed, and postbaking i5 then carried out.
Exposure is fully carried out by strong light in a formation area A2 of the address portion la on the photoresist film 2. Consequently, the photoresist film 2 is completely developed so that the glass substrate 1 appears. In a formation area B2 of the guide track portion lb on the photoresist film Z, the exposure is carried out by weaker light than in the formation area A2.
Consequently, development is stopped halfway. As a result, the photoresist film 2 remains by a thickness according to a quantity of tran~mitted li~ht in the formation area Bl on the thin film 4, so that the glass substrate 1 does not appear. The reference numeral 22a denotes a residual photoresist film.
As shown in Fig. lZ, the glass substrate 1 is subjected ta dry etching using gas such as CF4 or CHF3.
The photoresist film 2 shown in Fi~. 11 is also etched simultaneously. Consequently, when etching is started~
the etching of the glass substrate 1 is advanced in the formation area A2 so that a deep pit lla is formed on the glass substrate 1. The residual photoresist film 22a is etched in the formation area B2. When the glass substrate 1 appears, the etching of the glass substrate 1 is advanced. Consequently, there is formed a groove llb which is shallower than the pit lla in the formation area A2. The reference numeral 22b denotes a photoresist film which remains when the etching is completed.
As shown in Fig. 1~, the photoresist film 22b remaining on the glass substrate 1 is removed to form on the glass substrate 1 the address portion la as a deep pit 111 and the guide track portion lb as a shallow groove 112. Thus, there is formed a glass subetrate ll for a disk on which the address portion la and guide track portion lb have different depths.
The depth of the groove 112 forming the guide track portion lb is defined by the thickness of the photoresist film 22a remainin~ on the guide track portion lb, and the etching speeds of the photoresist film 2 including the residual photoresis~ film 22a and the glass substrate 1 as shown in Fig. 11. The thickness of the photoresist film 22a is defined by a quantity of transmitted light and developing conditions in the guide track portion lb.
Accordingly, it is difficu].t to uniformly form pits and grooves with good reproducibility.
It is an object of the present invention to provide a method of fabricating a glass substrate for a disk wherein groove-shaped guide track portions and pit-shaped sector (or track~ address portions interposed between the guide track portions can uniformly be formed.
SUMMARY OF THE INVENTION
The present invention provides a method of fabricating a glass substrate for a disk including guide track portions and sector (or track) address portions of which grooves and pits have different depths, comprising the steps of (i) forming a photoresist film over a ~lass substrate for an optical memory element, (ii) carrying out exposure to define a plurality of guide track portion formation areas and sector (or track) address portion formation areas interposed between the guide track portion formation areas, and carrying out development so as to cause the glass substrate in the address portion formation r ~ ~ ~ ~
area to appear and to cause the photoresist film in the guide track portion formation area to remain as a first residual film, (iii) carrying out first etching to sink the glass substrate in the address portion formation area by a predetermined thickness such that a pit is formed and to remove the surface layer of the first residual film such that a second residual film is formed, (iv) carrying out first ashing to remove the second residual film so that the glass substrate in the guide track portion formation area appears, (v) carryin~ out second etching to form a groove in the guide track portion formation area and to further sink the pit in the address portion formation area so that a deeper pit is formed, and (vi) carryin~ QUt second ashin~ to remove a third residual photoresist film which remains between the deeper pit and the groo~e.
BRIEF DESCRIPTION OF THE DRAWINGS
Figure 1 is a view showing a first step according to an embodiment of the present invention;
Figure 2 is a view showing a second step according to the embodiment of the present invention;
Figure 3 is a view showing a third ~tep according to the e~bodiment of the present invention;
Figure 4 is a view showing a fourth step according to the embodiment of the ~resent invention;
Figure 5 is a view showing a fifth step according to the embodiment of the present invention;
Figure 6 is a view showing a sixth step according to the embodiment of the present invention;
Figure 7 is a view showing a seventh step according to the embodiment of the present invention;
Figure 8 is a view showing the structure of a main part of a glass substrate for a disk fabricated;
Figure 9 i5 a view showing a first step according to the prior art;
Figure 10 is a view showing a second step according to the prior art;
Figure 11 is a view showing a third step according to the prior art;
Figure 12 is a view showing a fourth step according to the prior art; and Figure 13 is a view showing a fifth step according to the prior art.
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT
A glass substrate for a disk accordin~ to the present invention is used as a substrate for an optical memory element or as a substrate for a master plate for preparing a stamper to be used for injection molding.
At first, a photoresist film 2 on a glass substrate 1 ~?5~
is exposed (see Fi~. 2). Then, development is carried out so that the surface of the glass substrate 1 appears in an address portion formation area A2 and the photoresist film 2 remains as a first residual film 6 on the surface of the ~lass substrate 1 in a guide track portion formation area B2 as shown in Fig. 3.
It is preferred that exposure is carried out by radiating ultraviolet rays S onto the photoresist film 2 with the use of photomasks 3 and 4, or by a laser cutting method using laser beams. The photomasks 3 and 4 can completely remove the photoresist film 2 in the address portion formation area and can stop the removal of the photoresist film 2 halfway in the guide track portion formation area (see Fig. 2) The photomasks 3 and 4 are preferably comprised of a quartz substrate 3 and a metallic pattern 4 such as tantalum tTa), chromium (Cr) or titanium (Ti) which is formed on the quartz substrate 3.
Referring to the laser cutting method, Ar ion laser bea~s having a large quantity of light for exposing the address portion formation area and Ar ion laser beams having a small quantity of light for exposing the guide track portion formation area are radiated onto a photoresist plane, and scan the photoresist plane while rotatin~ the glass substrate so that each formation area ~ A
is exposed like spirals.
The glass substrate 1 which includes the photoresist film 2 having the first residual film 6 is subjected to first etching. Consequently, the glass substrate 1 in an address portion formation area A3 is sunk by a predetermined thickness. In a guide track portion formation area ~, the first residual film 6 is remnved to cause a second residual film 7 to remain (see Fig. 4).
The first etching is a known method, for example, dry etching carried out at a power of 1500 W and a pressure of 12 mTorr in a plasma at~osphere using gas such as CF4 or CHF3.
Then, the second residual film 7 is removed by first ashing so as to cause the surface of the glass substrate 1 to appear in a ~uide track portion formation area B4 (see Fig. 5)-The first ashing serves to remove an organic materialsuch as a photore~ist film. By the first ashing, the second residual film 7 can be removed without depending on the ununiformity of thickness distr-ibution of the first and second residual films 6 and 7. Consequently, the surface of the glass substrate 1 can completely appear in the guide track portion formation area B4. More specifically, the glass substrate 1 cannot be removed by the first ashing. Accordingly, pits in an address portion ~~?~
formation area A4 can be defined only by the first e~ching without depending on the selection ratio of the glass substrate to the photoresist film (for example, 1 : 1 or 1 : 2), and the thicknesses of the first and second residual films 6 and 7.
The first ashing is a known method, for example, plasma etching carried out at a power of 200 W and a pressure of 10 to 50 mTorr in an oxy~en plasma atmosphere.
Then, second etching is carried out to sink by a predetermined thickness the glass substrate 1 which is caused to appear by the first ashing. Consequently, there is formed a shallow groove as a guide track portion lb in the guide track portion formation area B4. At the same time, the glass substrate 1 is sunk by a predetermined thickness in the address portion formation area A3 so as to form a deep pit as an address portion la (see Fig. 6).
The glass substrate 1 is sunk by the second etching. More specifically, the guide track portion lb can be defined only by the second etching without depending on the selection ratio of the glass substrate to the photoresist film, and the thicknesses of the first and second residual films 6 and 7. At this time, the address portion la forms a pit having a desired depth by the first and second etching.
Subsequently, a third residual film 8 (see Fig. 6) ~?~'r~
provided between the address portion formation area A4 and the guide track portion formation area B4 is removed by second ashing. In this case, the depths of the address portion la and guide track portion lb are not affected by the second ashing.
According to the present invention, the depths of the guide track portion and address portion can be defined only by the first and second etching without depending on the selection ratio of the glass substrate to the photoresist film, and the thicknesses of the first and second residual films. Consequently, the guide track portion and address portion can have grooves and pits uniformly formed on the glass substrate with good reproducibility.
A method of fabricating a glass substrate for a disk according to the present invention will be described in detail with reference to the drawings. Figs. 1 to 7 show fabricating steps accarding to the present invention.
As shown in Fig. 1, a positive type photoresist film 2 is provided on a ~lass substrate 1 as a glass substrate for a disk. Then, pre'baking is carried out.
As shown in Fig. 2, a photomask 3 is caused to contact the Photoresist film 2 through a thin film 4 for a mask. Ultraviolet rays 5 are radiated onto the photomask 3 so as to expose the photoresist film 2. In ~?~?~f9 a~
this case, the thin film 4 is not provided in a formation area Al of a sector (or track) address portion la.
Consequently, a quantity of light transmitted to the photoresist film 2 is not reduced. The thin film 4 remains at a thickness of about 10 to 200 A in a formation area Bl of a guide track portion lb. Consequently, the quantity of light transmitted to the photoresist film 2 is reduced.
After the photomasks 3 and 4 are removed, the exposed photoresist film 2 i5 developed as shown in Fig. 3. Then, postbaking is carried out. A formation area A2 of the address portion la on the photoresist film 2 is fully exposed by strong light. Consequen~ly, the photoresist film 2 is completelY developed so that the glass substrate 1 appears. A formation area B2 of the guide track purtion lb on the photoresist film 2 is exposed by weaker light than in the formation area A2 of the address portion la.
Consequently, the development of the photoresist film 2 is stopped halfway. The photoresist film 2 in the formation area B2 of the ~uide track portion lb remains as a first residual film 6. The first residual film 6 is formed at a thickness according to a quantity of transmitted li~ht in the formation area Bl. The above-mentioned steps are the same as those of the prior art.
Subsequently, the glass substrate 1 includin~ the t~
photoresist film 2 is entirely etched as shown in Fig. 4.
Consequently, the glass substrate 1 in a formation area A3 of the address portion la and the first residual film 6 in a formation area R3 of the guide track portion lb are simultaneously etched by a thickness of 200 to 800 A. In this case, the first residual film 6 in the formation area B3 is not completely removed so as to remain as a second residual film 7.
Then, the second residual film 7 in the for~ation area B3 of the guide track portion lb is removed by ashing (first ashing). Consequently, the glass substrate 1 in the formation area B3 of the guide track portion lb appears (see Fig. 5). In this case, the glass su~strate 1 in the formation area A3 which has appeared is not removed. In this state, the glass substrate 1 appears in formation areas A4 and B4. The glass substrate 1 in other areas is covered by the photoresist film 2.
Thereafter, the glass substrate 1 includin~ the photoresist film 2 is entirely etched (second etching).
Consequently, a portion in which the glass substrate 1 appears, i.e., the glass substrate 1 in the formation areas A4 and B4 of the address portion la and guide track portion lb is also etched by a thickness of 300 to 1000 A
(see Fig. 6). In this case, the photoresist film 2 is remo~ed by a thickness of about 300 to 1000 A so as to remain as a third residual film 8.
Finally, only the third residual film 8 is rernoved by ashing (second ashing). ConsequentlyJ there is formed a glass substrate 5 for a disk having address portions la and guide track portions lb of which pits and grooves have different depths. In this case, the ~it of the address portion la has a depth of 1400 A and the groove of the guide track portion lb has a depth of 700 A. These depths are set to ,~ ~ 3n in the guide track portion lb and ~ /
4n in the address portion la (where ~ is a wavelen~th of a laser beam radiated onto the ~lass substrate 5 and n is a refractive index of a substrate).
According to the present inventionJ a new etchin~
process is incorporated. Conse~uentlyJ the depths of the pit and groove of the address portion and guide track portion are defined only by etching. Thus, there can be fabricated a glass substrate for a disk on which address and guide track portions are uniformly formed with good reproducibility. The address and ~uide track portions include pits and ~roaves which have different depths, respectively.
Referring to the technique described above, a photomask i5 used for forming a glass substrate for a disk by the contact printing method and the dry etching method.
The photomask has such a shape that a quantity of light radiated onto the guide track portion and sector (or track) address portion on a photoresist film is varied.
This technique will be summarized with reference to Figs.
9 to 13.
As shown in Fig. 9, a positive type photaresist film 2 is provided on a glass ~ubstrate 1, and prebaking i.
then carried out.
ir ~3 ~ ~
As shown in Fig. 10, a photomask 3 having a thin film 4 for a mask is caused to contact the photoresist f i lm 2 through the thin film 4. In this case, the thin film 4 is not provided in a formation area Al of a sector ~or track) address portion la. Consequently, a quantity of transmitted light is not reduced. The thin film 4 remains at a thickness of ahout 10 to 200 A in a formation area Bl of a guide track portion lb. Consequently, a quantity of transmitted light in the formation area Bl is smaller than in the farmation area Al. Then, ultraviolet rays 5 are radiated to expose ~he photoresist film 2 provided below the photomask 3 (see Fig. 10). Thereafter, the photomasks 3 and 4 are removed.
As shown in Fig. 11, the photoresist film 2 thus exposed is developed, and postbaking i5 then carried out.
Exposure is fully carried out by strong light in a formation area A2 of the address portion la on the photoresist film 2. Consequently, the photoresist film 2 is completely developed so that the glass substrate 1 appears. In a formation area B2 of the guide track portion lb on the photoresist film Z, the exposure is carried out by weaker light than in the formation area A2.
Consequently, development is stopped halfway. As a result, the photoresist film 2 remains by a thickness according to a quantity of tran~mitted li~ht in the formation area Bl on the thin film 4, so that the glass substrate 1 does not appear. The reference numeral 22a denotes a residual photoresist film.
As shown in Fig. lZ, the glass substrate 1 is subjected ta dry etching using gas such as CF4 or CHF3.
The photoresist film 2 shown in Fi~. 11 is also etched simultaneously. Consequently, when etching is started~
the etching of the glass substrate 1 is advanced in the formation area A2 so that a deep pit lla is formed on the glass substrate 1. The residual photoresist film 22a is etched in the formation area B2. When the glass substrate 1 appears, the etching of the glass substrate 1 is advanced. Consequently, there is formed a groove llb which is shallower than the pit lla in the formation area A2. The reference numeral 22b denotes a photoresist film which remains when the etching is completed.
As shown in Fig. 1~, the photoresist film 22b remaining on the glass substrate 1 is removed to form on the glass substrate 1 the address portion la as a deep pit 111 and the guide track portion lb as a shallow groove 112. Thus, there is formed a glass subetrate ll for a disk on which the address portion la and guide track portion lb have different depths.
The depth of the groove 112 forming the guide track portion lb is defined by the thickness of the photoresist film 22a remainin~ on the guide track portion lb, and the etching speeds of the photoresist film 2 including the residual photoresis~ film 22a and the glass substrate 1 as shown in Fig. 11. The thickness of the photoresist film 22a is defined by a quantity of transmitted light and developing conditions in the guide track portion lb.
Accordingly, it is difficu].t to uniformly form pits and grooves with good reproducibility.
It is an object of the present invention to provide a method of fabricating a glass substrate for a disk wherein groove-shaped guide track portions and pit-shaped sector (or track~ address portions interposed between the guide track portions can uniformly be formed.
SUMMARY OF THE INVENTION
The present invention provides a method of fabricating a glass substrate for a disk including guide track portions and sector (or track) address portions of which grooves and pits have different depths, comprising the steps of (i) forming a photoresist film over a ~lass substrate for an optical memory element, (ii) carrying out exposure to define a plurality of guide track portion formation areas and sector (or track) address portion formation areas interposed between the guide track portion formation areas, and carrying out development so as to cause the glass substrate in the address portion formation r ~ ~ ~ ~
area to appear and to cause the photoresist film in the guide track portion formation area to remain as a first residual film, (iii) carrying out first etching to sink the glass substrate in the address portion formation area by a predetermined thickness such that a pit is formed and to remove the surface layer of the first residual film such that a second residual film is formed, (iv) carrying out first ashing to remove the second residual film so that the glass substrate in the guide track portion formation area appears, (v) carryin~ out second etching to form a groove in the guide track portion formation area and to further sink the pit in the address portion formation area so that a deeper pit is formed, and (vi) carryin~ QUt second ashin~ to remove a third residual photoresist film which remains between the deeper pit and the groo~e.
BRIEF DESCRIPTION OF THE DRAWINGS
Figure 1 is a view showing a first step according to an embodiment of the present invention;
Figure 2 is a view showing a second step according to the embodiment of the present invention;
Figure 3 is a view showing a third ~tep according to the e~bodiment of the present invention;
Figure 4 is a view showing a fourth step according to the embodiment of the ~resent invention;
Figure 5 is a view showing a fifth step according to the embodiment of the present invention;
Figure 6 is a view showing a sixth step according to the embodiment of the present invention;
Figure 7 is a view showing a seventh step according to the embodiment of the present invention;
Figure 8 is a view showing the structure of a main part of a glass substrate for a disk fabricated;
Figure 9 i5 a view showing a first step according to the prior art;
Figure 10 is a view showing a second step according to the prior art;
Figure 11 is a view showing a third step according to the prior art;
Figure 12 is a view showing a fourth step according to the prior art; and Figure 13 is a view showing a fifth step according to the prior art.
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT
A glass substrate for a disk accordin~ to the present invention is used as a substrate for an optical memory element or as a substrate for a master plate for preparing a stamper to be used for injection molding.
At first, a photoresist film 2 on a glass substrate 1 ~?5~
is exposed (see Fi~. 2). Then, development is carried out so that the surface of the glass substrate 1 appears in an address portion formation area A2 and the photoresist film 2 remains as a first residual film 6 on the surface of the ~lass substrate 1 in a guide track portion formation area B2 as shown in Fig. 3.
It is preferred that exposure is carried out by radiating ultraviolet rays S onto the photoresist film 2 with the use of photomasks 3 and 4, or by a laser cutting method using laser beams. The photomasks 3 and 4 can completely remove the photoresist film 2 in the address portion formation area and can stop the removal of the photoresist film 2 halfway in the guide track portion formation area (see Fig. 2) The photomasks 3 and 4 are preferably comprised of a quartz substrate 3 and a metallic pattern 4 such as tantalum tTa), chromium (Cr) or titanium (Ti) which is formed on the quartz substrate 3.
Referring to the laser cutting method, Ar ion laser bea~s having a large quantity of light for exposing the address portion formation area and Ar ion laser beams having a small quantity of light for exposing the guide track portion formation area are radiated onto a photoresist plane, and scan the photoresist plane while rotatin~ the glass substrate so that each formation area ~ A
is exposed like spirals.
The glass substrate 1 which includes the photoresist film 2 having the first residual film 6 is subjected to first etching. Consequently, the glass substrate 1 in an address portion formation area A3 is sunk by a predetermined thickness. In a guide track portion formation area ~, the first residual film 6 is remnved to cause a second residual film 7 to remain (see Fig. 4).
The first etching is a known method, for example, dry etching carried out at a power of 1500 W and a pressure of 12 mTorr in a plasma at~osphere using gas such as CF4 or CHF3.
Then, the second residual film 7 is removed by first ashing so as to cause the surface of the glass substrate 1 to appear in a ~uide track portion formation area B4 (see Fig. 5)-The first ashing serves to remove an organic materialsuch as a photore~ist film. By the first ashing, the second residual film 7 can be removed without depending on the ununiformity of thickness distr-ibution of the first and second residual films 6 and 7. Consequently, the surface of the glass substrate 1 can completely appear in the guide track portion formation area B4. More specifically, the glass substrate 1 cannot be removed by the first ashing. Accordingly, pits in an address portion ~~?~
formation area A4 can be defined only by the first e~ching without depending on the selection ratio of the glass substrate to the photoresist film (for example, 1 : 1 or 1 : 2), and the thicknesses of the first and second residual films 6 and 7.
The first ashing is a known method, for example, plasma etching carried out at a power of 200 W and a pressure of 10 to 50 mTorr in an oxy~en plasma atmosphere.
Then, second etching is carried out to sink by a predetermined thickness the glass substrate 1 which is caused to appear by the first ashing. Consequently, there is formed a shallow groove as a guide track portion lb in the guide track portion formation area B4. At the same time, the glass substrate 1 is sunk by a predetermined thickness in the address portion formation area A3 so as to form a deep pit as an address portion la (see Fig. 6).
The glass substrate 1 is sunk by the second etching. More specifically, the guide track portion lb can be defined only by the second etching without depending on the selection ratio of the glass substrate to the photoresist film, and the thicknesses of the first and second residual films 6 and 7. At this time, the address portion la forms a pit having a desired depth by the first and second etching.
Subsequently, a third residual film 8 (see Fig. 6) ~?~'r~
provided between the address portion formation area A4 and the guide track portion formation area B4 is removed by second ashing. In this case, the depths of the address portion la and guide track portion lb are not affected by the second ashing.
According to the present invention, the depths of the guide track portion and address portion can be defined only by the first and second etching without depending on the selection ratio of the glass substrate to the photoresist film, and the thicknesses of the first and second residual films. Consequently, the guide track portion and address portion can have grooves and pits uniformly formed on the glass substrate with good reproducibility.
A method of fabricating a glass substrate for a disk according to the present invention will be described in detail with reference to the drawings. Figs. 1 to 7 show fabricating steps accarding to the present invention.
As shown in Fig. 1, a positive type photoresist film 2 is provided on a ~lass substrate 1 as a glass substrate for a disk. Then, pre'baking is carried out.
As shown in Fig. 2, a photomask 3 is caused to contact the Photoresist film 2 through a thin film 4 for a mask. Ultraviolet rays 5 are radiated onto the photomask 3 so as to expose the photoresist film 2. In ~?~?~f9 a~
this case, the thin film 4 is not provided in a formation area Al of a sector (or track) address portion la.
Consequently, a quantity of light transmitted to the photoresist film 2 is not reduced. The thin film 4 remains at a thickness of about 10 to 200 A in a formation area Bl of a guide track portion lb. Consequently, the quantity of light transmitted to the photoresist film 2 is reduced.
After the photomasks 3 and 4 are removed, the exposed photoresist film 2 i5 developed as shown in Fig. 3. Then, postbaking is carried out. A formation area A2 of the address portion la on the photoresist film 2 is fully exposed by strong light. Consequen~ly, the photoresist film 2 is completelY developed so that the glass substrate 1 appears. A formation area B2 of the guide track purtion lb on the photoresist film 2 is exposed by weaker light than in the formation area A2 of the address portion la.
Consequently, the development of the photoresist film 2 is stopped halfway. The photoresist film 2 in the formation area B2 of the ~uide track portion lb remains as a first residual film 6. The first residual film 6 is formed at a thickness according to a quantity of transmitted li~ht in the formation area Bl. The above-mentioned steps are the same as those of the prior art.
Subsequently, the glass substrate 1 includin~ the t~
photoresist film 2 is entirely etched as shown in Fig. 4.
Consequently, the glass substrate 1 in a formation area A3 of the address portion la and the first residual film 6 in a formation area R3 of the guide track portion lb are simultaneously etched by a thickness of 200 to 800 A. In this case, the first residual film 6 in the formation area B3 is not completely removed so as to remain as a second residual film 7.
Then, the second residual film 7 in the for~ation area B3 of the guide track portion lb is removed by ashing (first ashing). Consequently, the glass substrate 1 in the formation area B3 of the guide track portion lb appears (see Fig. 5). In this case, the glass su~strate 1 in the formation area A3 which has appeared is not removed. In this state, the glass substrate 1 appears in formation areas A4 and B4. The glass substrate 1 in other areas is covered by the photoresist film 2.
Thereafter, the glass substrate 1 includin~ the photoresist film 2 is entirely etched (second etching).
Consequently, a portion in which the glass substrate 1 appears, i.e., the glass substrate 1 in the formation areas A4 and B4 of the address portion la and guide track portion lb is also etched by a thickness of 300 to 1000 A
(see Fig. 6). In this case, the photoresist film 2 is remo~ed by a thickness of about 300 to 1000 A so as to remain as a third residual film 8.
Finally, only the third residual film 8 is rernoved by ashing (second ashing). ConsequentlyJ there is formed a glass substrate 5 for a disk having address portions la and guide track portions lb of which pits and grooves have different depths. In this case, the ~it of the address portion la has a depth of 1400 A and the groove of the guide track portion lb has a depth of 700 A. These depths are set to ,~ ~ 3n in the guide track portion lb and ~ /
4n in the address portion la (where ~ is a wavelen~th of a laser beam radiated onto the ~lass substrate 5 and n is a refractive index of a substrate).
According to the present inventionJ a new etchin~
process is incorporated. Conse~uentlyJ the depths of the pit and groove of the address portion and guide track portion are defined only by etching. Thus, there can be fabricated a glass substrate for a disk on which address and guide track portions are uniformly formed with good reproducibility. The address and ~uide track portions include pits and ~roaves which have different depths, respectively.
Claims (9)
1. A method of fabricating a glass substrate for a disk including guide track portions and sector (or track) address portions of which grooves and pits have different depths, comprising the steps of;
(i) forming a photoresist film over a glass substrate for an optical memory element, (ii) carrying out exposure to define a plurality of guide track portion formation areas and sector (or track) address portion formation areas interposed between the guide track portion formation areas, and carrying out development so as to cause the glass substrate in the address portion formation area to appear and to cause the photoresist film in the guide track portion formation area to remain as a first residual film, (iii) carrying out first etching to sink the glass substrate in the address portion formation area by a predetermined thickness such that a pit is formed and to remove the surface layer of the first residual film such that a second residual film is formed, (iv) carrying out first ashing to remove the second residual film so that the glass substrate in the guide track portion formation area appears, (v) carrying out second etching to form a groove in the guide track portion formation area and to further sink said pit in the address portion formation area so that a deeper pit is formed, and (vi) carrying out second ashing to remove a third residual photoresist film which remains between the deeper pit and the groove.
(i) forming a photoresist film over a glass substrate for an optical memory element, (ii) carrying out exposure to define a plurality of guide track portion formation areas and sector (or track) address portion formation areas interposed between the guide track portion formation areas, and carrying out development so as to cause the glass substrate in the address portion formation area to appear and to cause the photoresist film in the guide track portion formation area to remain as a first residual film, (iii) carrying out first etching to sink the glass substrate in the address portion formation area by a predetermined thickness such that a pit is formed and to remove the surface layer of the first residual film such that a second residual film is formed, (iv) carrying out first ashing to remove the second residual film so that the glass substrate in the guide track portion formation area appears, (v) carrying out second etching to form a groove in the guide track portion formation area and to further sink said pit in the address portion formation area so that a deeper pit is formed, and (vi) carrying out second ashing to remove a third residual photoresist film which remains between the deeper pit and the groove.
2. The method of fabricating a glass substrate for a disk according to Claim 1, wherein the first and second ashing is carried out by means of a parallel plate type etching apparatus which is used for the first and second etching.
3. The method of fabricating a glass substrate for a disk according to Claim 1, wherein the first and second ashing is carried out in an oxygen plasma atmosphere.
4. The method of fabricating a glass substrate for a disk according to Claim 1, wherein the first and second etching is carried out in a plasma atmosphere using gas such as CF4 or CHF3.
5. The method of fabricating a glass substrate for a disk according to Claim 1, wherein the exposure is carried out after a photomask is formed, the photomask being capable of completely removing the photoresist film in the sector (or track) address portion formation area and stopping the removal of the photoresist film halfway in the guide track portion formation area.
6. The method of fabricating a glass substrate for a disk according to Claim 5, wherein the photomask is comprised of a quartz substrate and a metallic pattern such as tantalum (Ta), chromium (Cr) or titanium (Ti) which is formed on the quartz substrate.
7. The method of fabricating a glass substrate for a disk according to Claim 1, wherein the exposure is carried out by a laser cutting method using two Ar ion laser beams.
8. The method of fabricating a glass substrate for a disk according to Claim 1, wherein the glass substrate for a disk is used as a substrate for an optical memory element.
9. The method of fabricating a glass substrate for a disk according to Claim 1, wherein the glass substrate for a disk is used as a substrate for a master plate for preparing a stamper to be used for injection molding.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3051324A JPH04286736A (en) | 1991-03-15 | 1991-03-15 | Production of substrate for master disk of optical memory element |
| JP3(1991)-51324/1991 | 1991-03-15 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CA2062840A1 CA2062840A1 (en) | 1992-09-16 |
| CA2062840C true CA2062840C (en) | 1997-09-16 |
Family
ID=12883742
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA002062840A Expired - Fee Related CA2062840C (en) | 1991-03-15 | 1992-03-12 | Method of fabricating glass substrate for disk |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US5246531A (en) |
| EP (1) | EP0503961B1 (en) |
| JP (1) | JPH04286736A (en) |
| KR (1) | KR950001879B1 (en) |
| CA (1) | CA2062840C (en) |
| DE (1) | DE69219652T2 (en) |
Families Citing this family (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2701152B1 (en) * | 1993-02-03 | 1995-03-10 | Digipress Sa | Method for manufacturing a master disc for producing a pressing die, in particular optical discs, pressing die obtained by this process and optical disc obtained from this pressing die. |
| FR2702077B1 (en) * | 1993-02-22 | 1995-04-21 | Digipress Sa | Method for manufacturing a master disc and a pressing die for improved optical discs, optical disc obtained from this master disc or this pressing die. |
| FR2716563B1 (en) * | 1994-02-21 | 1996-06-07 | Digipress Sa | Preformatted substrate, preformatted substrate comprising information to be duplicated, methods for manufacturing it and method for manufacturing a master disc and / or an optical disc. |
| US5503963A (en) * | 1994-07-29 | 1996-04-02 | The Trustees Of Boston University | Process for manufacturing optical data storage disk stamper |
| US5783371A (en) * | 1994-07-29 | 1998-07-21 | Trustees Of Boston University | Process for manufacturing optical data storage disk stamper |
| JP3784068B2 (en) * | 1995-03-13 | 2006-06-07 | デーエスエム アイピー アセット ビー ヴイ | Radiation curable optical fiber coating composition |
| US6287663B1 (en) * | 1995-10-31 | 2001-09-11 | Kabushiki Kaisha Ohara | Glass-ceramic substrate for a magnetic information storage medium |
| US5910262A (en) * | 1997-02-06 | 1999-06-08 | International Business Machines Corporation | Method and tool for laser texturing of glass substrates |
| JP3938253B2 (en) | 1997-12-26 | 2007-06-27 | 日本板硝子株式会社 | Resin erecting equal-magnification lens array and manufacturing method thereof |
| JP2000348388A (en) | 1999-06-04 | 2000-12-15 | Sharp Corp | Optical recording medium |
| US6733957B2 (en) | 2000-12-27 | 2004-05-11 | Victor Company Of Japan | Disk substrate and manufacturing method therefor, and disk manufactured by the disk substrate |
| US7767131B2 (en) | 2001-08-30 | 2010-08-03 | Bayer Technology Services Gmbh | Method for production of moulded bodies, in particular optical structures and use thereof |
| GB0204496D0 (en) * | 2002-02-26 | 2002-04-10 | Plasmon Ltd | Optical disc mastering |
| US20050040032A1 (en) * | 2003-08-18 | 2005-02-24 | Yuan-Chang Lai | Stamper forming method |
| KR100641006B1 (en) * | 2004-11-04 | 2006-11-02 | 엘지.필립스 엘시디 주식회사 | Printing Plate |
| JP4289342B2 (en) * | 2004-11-22 | 2009-07-01 | 日本ビクター株式会社 | Optical disc and manufacturing method thereof |
| KR101711646B1 (en) * | 2009-12-11 | 2017-03-03 | 엘지디스플레이 주식회사 | Mathod for forming mold for imprinting and method for forming pattern using mold for imprinting |
| JP5252507B2 (en) * | 2009-12-17 | 2013-07-31 | 独立行政法人産業技術総合研究所 | Mold manufacturing method for imprint lithography |
| KR101726641B1 (en) * | 2011-08-03 | 2017-04-26 | 엘지디스플레이 주식회사 | Method of fabricating cliche |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5965951A (en) * | 1982-10-08 | 1984-04-14 | Toshiba Corp | Original disk for information storage medium |
| JPS6050733A (en) * | 1983-08-31 | 1985-03-20 | Sony Corp | Optical recording medium and producer of master disk of said medium |
| JPS60170045A (en) * | 1984-02-13 | 1985-09-03 | Pioneer Electronic Corp | Production of optical disk with address and guide groove |
| DE3682985D1 (en) * | 1985-08-30 | 1992-01-30 | Sharp Kk | METHOD FOR PRODUCING AN OPTICAL DIRECTORY. |
| JPS62128944A (en) * | 1985-11-27 | 1987-06-11 | Sharp Corp | Optical memory element |
| JPS62241149A (en) * | 1986-04-11 | 1987-10-21 | Sharp Corp | Photomask for optical memory element and its production |
| JPS63155445A (en) * | 1986-12-19 | 1988-06-28 | Canon Inc | Production of information recording master disk |
| JPS6486344A (en) * | 1987-09-29 | 1989-03-31 | Victor Company Of Japan | Information recording carrier and production thereof |
| JPH01150254A (en) * | 1987-12-07 | 1989-06-13 | Sharp Corp | Photomask for optical memory element and production thereof |
-
1991
- 1991-03-15 JP JP3051324A patent/JPH04286736A/en active Pending
-
1992
- 1992-03-11 KR KR1019920003964A patent/KR950001879B1/en not_active IP Right Cessation
- 1992-03-11 US US07/849,503 patent/US5246531A/en not_active Expired - Lifetime
- 1992-03-12 CA CA002062840A patent/CA2062840C/en not_active Expired - Fee Related
- 1992-03-13 EP EP92302183A patent/EP0503961B1/en not_active Expired - Lifetime
- 1992-03-13 DE DE69219652T patent/DE69219652T2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| KR920018692A (en) | 1992-10-22 |
| EP0503961B1 (en) | 1997-05-14 |
| CA2062840A1 (en) | 1992-09-16 |
| US5246531A (en) | 1993-09-21 |
| KR950001879B1 (en) | 1995-03-04 |
| DE69219652D1 (en) | 1997-06-19 |
| EP0503961A2 (en) | 1992-09-16 |
| DE69219652T2 (en) | 1997-11-20 |
| JPH04286736A (en) | 1992-10-12 |
| EP0503961A3 (en) | 1992-11-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CA2062840C (en) | Method of fabricating glass substrate for disk | |
| US7223505B2 (en) | Method for forming micropatterns | |
| US6510129B1 (en) | Optical recording medium, manufacturing method of optical recording medium master disk, and cutting device used therefor | |
| JP2582996B2 (en) | Photomask manufacturing method | |
| EP0241028B1 (en) | A photo-mask for use in manufacturing an optical memory disc, a method for making the photo-mask and a method for manufacturing the optical memory disc | |
| JPS619848A (en) | Guide groove forming method of optical recording medium | |
| JPH04241237A (en) | Stamper for high-density recording disk and production thereof | |
| EP0552943B1 (en) | Master plate for optical memory device and manfacturing method thereof | |
| EP0708439A1 (en) | Master disc for an optical disc and method for manufacturing the master disc | |
| CA2056308C (en) | Method for manufacturing a photomask for an optical memory | |
| JP3230313B2 (en) | Method for producing patterned workpiece by reactive ion etching | |
| JP2002015474A (en) | Method for manufacturing master disk of optical disk and optical disk substrate | |
| JPH06212458A (en) | Production of patterned product by reactive ion etching | |
| JPH0517542B2 (en) | ||
| JPH09297940A (en) | Production of stamper | |
| JP2000348393A (en) | Stamper for optical disk and its production | |
| JP2653670B2 (en) | Manufacturing method of optical recording master | |
| JPH04285739A (en) | Optical disk substrate | |
| JPS63230889A (en) | Production of substrate | |
| JPH01150254A (en) | Photomask for optical memory element and production thereof | |
| JP2000348387A (en) | Optical recording medium, its recording reproducing method, and manufacturing method of master stamper | |
| JPH0348580B2 (en) | ||
| JPH06150396A (en) | Production of optical master disk | |
| JPH01143035A (en) | Information recording master disk and its production | |
| KR960008712A (en) | Method for manufacturing glass substrate and photomask for optical disc manufacturing |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EEER | Examination request | ||
| MKLA | Lapsed |