JPS6218518A - Optical modulation element - Google Patents
Optical modulation elementInfo
- Publication number
- JPS6218518A JPS6218518A JP15751985A JP15751985A JPS6218518A JP S6218518 A JPS6218518 A JP S6218518A JP 15751985 A JP15751985 A JP 15751985A JP 15751985 A JP15751985 A JP 15751985A JP S6218518 A JPS6218518 A JP S6218518A
- Authority
- JP
- Japan
- Prior art keywords
- optical
- piece
- electrode
- modulation element
- comb
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- Optical Integrated Circuits (AREA)
Abstract
Description
【発明の詳細な説明】
〔概 要〕
電気光学結晶からなる基板(以下電気光学基板と称する
)に形成された光導波路の上に、広狭2種類のギャップ
を有する櫛歯状電極片を設け、偏光依存性の無い光変調
器や光スィッチの構成を可能にする光変調素子を実現さ
せたものである。[Detailed Description of the Invention] [Summary] A comb-shaped electrode piece having two types of wide and narrow gaps is provided on an optical waveguide formed on a substrate made of electro-optic crystal (hereinafter referred to as an electro-optic substrate), The present invention realizes an optical modulation element that enables the construction of optical modulators and optical switches without polarization dependence.
本発明は光通信システムを構成する光デバイスに係り、
特に電気光学基板上に形成された光導波路と、光導波路
の上に形成された電極とで構成する導波路型の光変調素
子に関する。The present invention relates to an optical device constituting an optical communication system,
In particular, the present invention relates to a waveguide-type optical modulation element comprising an optical waveguide formed on an electro-optic substrate and an electrode formed on the optical waveguide.
光通信技術の普及に伴って光通信システムを構成する光
デバイスの、信頼性向上や小形化、低価格化等に対する
要求が増大しており、それを実現するための手段として
量産性に富んだ光デバイスの開発が望まれている。With the spread of optical communication technology, there has been an increasing demand for improved reliability, smaller size, and lower prices for the optical devices that make up optical communication systems. Development of optical devices is desired.
例えばりチュウムナイオベート(LiNb03)等の電
気光学基板に、チタン(Ti)等を拡散して形成された
光導波路と、光導波路の上に設けた電極から構成された
光変調素子は、小形で駆動電圧が低くしかも高速動作が
可能で築積化が可能である。For example, an optical modulation element consisting of an optical waveguide formed by diffusing titanium (Ti) or the like on an electro-optic substrate such as lithium niobate (LiNb03) and an electrode provided on the optical waveguide is a small-sized optical modulator. The drive voltage is low, high-speed operation is possible, and it can be built up.
即ちかかる光変調素子を光回路内に具えた光変調器や光
スィッチは、小形化、低価格化等の実現が可能で量産性
に冨んでおり一層の信頼性の向上が期待されている。That is, optical modulators and optical switches that include such optical modulation elements in optical circuits can be made smaller and lower in price, and are suitable for mass production, and are expected to have even higher reliability.
第3図はマツハツエンダ−干渉計型光変調器の一例を示
す平面図、第4図は従来の光変調素子必を示す平面図で
ある。FIG. 3 is a plan view showing an example of a Matsuhatsu Ender interferometer type optical modulator, and FIG. 4 is a plan view showing a conventional optical modulation element.
第3図においてマツハツエンダ−干渉計型光変調器は、
電気光学基板1と、電気光学基板1に形成された光導波
路2と、光変調素子3とで構成されている。光導波路2
は入力光路21、参照光路22、被変調光路23、およ
び出力光路24からなり、被変調光路23の中間に光変
調素子3が形成されている。In Fig. 3, the Matsuhatsu Ender interferometer type optical modulator is
It is composed of an electro-optic substrate 1, an optical waveguide 2 formed on the electro-optic substrate 1, and an optical modulation element 3. Optical waveguide 2
consists of an input optical path 21, a reference optical path 22, a modulated optical path 23, and an output optical path 24, and a light modulation element 3 is formed in the middle of the modulated optical path 23.
入力光路21に入った光は2分され被変調光路23を導
波された光は光変調素子3によって位相を制御される。The light entering the input optical path 21 is divided into two, and the phase of the light guided through the modulated optical path 23 is controlled by the optical modulation element 3.
一方参照光路22を導波される光は位相を制御されるこ
となく導波される。この二つの光が合成され強度変調を
受けた光となって出力光路24から出力される。On the other hand, the light guided through the reference optical path 22 is guided without having its phase controlled. These two lights are combined into intensity-modulated light, which is output from the output optical path 24.
また光変調素子3は第4図(a)に示す如く電気光学基
板lに形成された光導波路23と、光導波路23上に形
成された絶縁性材料(A1203またはS i 02
)からなるバッファ層25と、バッファR25の上に形
成された一対の電極26および27とで構成されている
。Further, as shown in FIG. 4(a), the light modulation element 3 includes an optical waveguide 23 formed on an electro-optic substrate l, and an insulating material (A1203 or S i 02) formed on the optical waveguide 23.
), and a pair of electrodes 26 and 27 formed on the buffer R25.
電極26と電極27との間に電圧を印加することによっ
て光導波路23の屈折率がΔnだけ変わり、光路長がΔ
n−Lだけ変化するために導波される光の位相が変わる
。即ち電極26と電極27の極性によって位相の変化す
る方向が変わり、電圧の大きさによって位相の変化する
大きさを制御することができる。By applying a voltage between the electrodes 26 and 27, the refractive index of the optical waveguide 23 changes by Δn, and the optical path length changes by Δn.
Since the phase changes by n-L, the phase of the guided light changes. That is, the direction in which the phase changes changes depending on the polarity of the electrodes 26 and 27, and the magnitude of the phase change can be controlled by the magnitude of the voltage.
しかし一軸性の結晶であるLiNbO3等を基板に用い
た場合、電気光学効果を有効に利用するためには電界を
結晶の光学軸方向、即ち第4図(alの紙面と垂直な方
向に印加する必要がある。しかるに第4図(alに示す
光変調素子3の場合には屈折率および電気光学効果の異
方性のため、光導波路を導波される光の偏光方向によっ
て位相変調の度合が異なるという問題があった。However, when a uniaxial crystal such as LiNbO3 is used as a substrate, in order to effectively utilize the electro-optic effect, it is necessary to apply an electric field in the direction of the optical axis of the crystal, that is, in the direction perpendicular to the plane of the paper in Figure 4 (al. However, in the case of the optical modulation element 3 shown in FIG. The problem was that they were different.
なおこの問題は第4図(blに示す如く導波路の伝播方
向および電界の向きを、光学的軸方向と一致させるごと
により解決されるが、この場合電極のギャップgと屈折
率変化量Δnの積であるΔn・gしか光路長が変化せず
十分な位相変調が得られない。ここでΔnと1 / g
とは比例関係にあり例えばギャップgを大きくしても位
相変調を強める効果は得られない。This problem can be solved by aligning the propagation direction of the waveguide and the direction of the electric field with the optical axis direction as shown in Fig. 4 (bl), but in this case, the electrode gap g and the refractive index change Δn are The optical path length changes only by the product Δn・g, and sufficient phase modulation cannot be obtained.Here, Δn and 1/g
For example, even if the gap g is increased, the effect of strengthening the phase modulation cannot be obtained.
第1図は本発明になる光変調素子の一実施例を示す平面
図である。FIG. 1 is a plan view showing one embodiment of a light modulation element according to the present invention.
上記問題点は第1図に示す電気光学基板1に形成された
光導波路41、光導波路41の上に形成された第1の電
極51および第2の電極52を具え、第1の電極51に
設けられた櫛歯状電極片53と第2の電極52に設けら
れた櫛歯状電極片′54とを交互に、且つ櫛歯状電極片
53とその両側に位置する櫛歯状電極片54、或いは櫛
歯状電極片54とその両側に位置する櫛歯状電極片53
とを、一方は狭い間隙55を介し他方は広い間隙56を
介して対向せしめるように配置してなる本発明の光変調
素子によって解決される。The above problem is solved by the optical waveguide 41 formed on the electro-optic substrate 1 shown in FIG. The provided comb-like electrode pieces 53 and the comb-like electrode pieces '54 provided on the second electrode 52 are alternately arranged, and the comb-like electrode pieces 53 and the comb-like electrode pieces 54 located on both sides thereof are arranged alternately. , or the comb-shaped electrode piece 54 and the comb-shaped electrode piece 53 located on both sides thereof.
These problems can be solved by the optical modulation element of the present invention, which is arranged such that one side faces each other with a narrow gap 55 in between and the other side faces with a wide gap 56 in between.
電気光学基板に形成された光導波路の上に広狭2種類の
ギャップを有する複数個の櫛歯状電極片を設け、それぞ
れの電極間に電圧を印加し光の位相を変化させる区間を
長くすることによって、偏光依存性の無い光変調器や光
スィッチの構成を可能にする光変調素子を実現させるこ
とができる。A plurality of comb-like electrode pieces having two types of wide and narrow gaps are provided on an optical waveguide formed on an electro-optic substrate, and a voltage is applied between each electrode to lengthen the section in which the phase of light is changed. Accordingly, it is possible to realize an optical modulation element that enables the construction of an optical modulator or an optical switch without polarization dependence.
〔実施例〕
以下添付図により本発明の実施例について詳細に説明す
る。第2図は本発明になる光変調素子の側断面図である
。[Examples] Examples of the present invention will be described in detail below with reference to the accompanying drawings. FIG. 2 is a side sectional view of the optical modulation element according to the present invention.
第1図および第2図において第1の電極51に設けられ
た櫛歯状電極片53と、第2の電極52に設けられた櫛
歯状電極片54とを交互に配置することによって、光の
位相を変化させる区間を長くすることができる。In FIGS. 1 and 2, the comb-shaped electrode pieces 53 provided on the first electrode 51 and the comb-shaped electrode pieces 54 provided on the second electrode 52 are arranged alternately, so that the light The period in which the phase of the phase is changed can be made longer.
櫛歯状電極片53とその両側に位置する櫛歯状電極片5
4との間に電圧が同時に印加され、光の位相をそれぞれ
反対方向に変化させる力が作用するが、狭い間隙55を
介して対向する電極片53と電極片54との間に印加さ
れる電圧による電界は、基板垂直方向への浸透が少なく
且つバッファ層42が介在するために光の位相を変化さ
せる力が弱く、広い間隙56を介して対向する電極片5
3と電極片54との間に印加される電圧による電界は、
光導波路41まで十分到達するため光の位相を変化させ
る力が強い。A comb-shaped electrode piece 53 and comb-shaped electrode pieces 5 located on both sides thereof
A voltage is simultaneously applied between the electrode pieces 53 and 4, and a force that changes the phase of the light in opposite directions acts. Since the electric field does not penetrate into the vertical direction of the substrate and the buffer layer 42 is present, the power to change the phase of light is weak.
The electric field due to the voltage applied between 3 and the electrode piece 54 is
Since the light reaches the optical waveguide 41 sufficiently, the power to change the phase of the light is strong.
したがって広い間隙56を介して対向する電極片53と
、電極片54との間に印加される電圧による光の位相の
変化が、狭い間隙55を介して対向する電極片53と電
極片54との間に印加される電圧の作用によって打ち消
されることはない。Therefore, the change in the phase of the light due to the voltage applied between the electrode pieces 53 and 54 that face each other with a wide gap 56 in between, is It is not canceled by the effect of the voltage applied between them.
かかる光変調素子は偏光依存性が無く光導波路を導波さ
れる如何なる方向に偏光された光に対しても同等の位相
変調を行うことができる。したがって例えば第3図に示
すマツハツエンダ−干渉計型光変調器の光変調素子とし
て、本発明になる光変調素子を光回路内に設けることに
よって、偏光依存性の無い光変調器を実現させることが
できる。Such an optical modulation element has no polarization dependence and can perform equivalent phase modulation on light polarized in any direction guided through an optical waveguide. Therefore, for example, by providing the light modulation element of the present invention in the optical circuit as the light modulation element of the Matsuhatsu Ender interferometer type optical modulator shown in FIG. 3, it is possible to realize an optical modulator without polarization dependence. can.
更にかかるマツハツエンダ−干渉計型光変調器の入出力
部に、任意方向の偏光光線を1対1で結合させる2人力
、2出力の3dbカツプラを設けることによって、偏光
依存性の無い光スィッチを構成することも可能である。Furthermore, an optical switch without polarization dependence is constructed by providing a two-manpower, two-output 3db coupler that couples polarized light beams in arbitrary directions one-to-one at the input/output section of the Matsuhatsu Ender interferometer type optical modulator. It is also possible to do so.
即ち本発明になる光変調素子を光回路内に設けるごとに
よって、光変調器や光スィッチの小形化、低価格化等を
実現させると共に信頼性を一層向上させることができる
。That is, by providing the optical modulation element of the present invention in an optical circuit, it is possible to realize miniaturization and cost reduction of an optical modulator or optical switch, and to further improve reliability.
上述の如く本発明によれば光変調器や光スィッチの小形
化、低価格化等を実現させると共に信頼性を一層向上さ
せる光変調素子を提供することができる。As described above, according to the present invention, it is possible to provide an optical modulation element that realizes miniaturization and cost reduction of optical modulators and optical switches, and further improves reliability.
第1図は本発明になる光変調素子の一実施例を示す平面
図、
第2図は本発明になる光変調素子の一実施例を示す側断
面図、
第3図はマツハツエンダ−干渉計型光変調器の一例を示
す平面図、
第4図は従来の光変調素子を示す平面図、である。図に
おいて
lは電気光学基板、
41は光導波路、
42はバッファ層、
51は第1の電極、
52は第2の電極、
53.54は櫛歯状電極片、
55.56は電極の間隙、
をそれぞれ表す。
/1−発叩司一宇方芭多り示す乎面図
第 1 図
ント、9e珂・ワ −゛)e古寺と脅・l > ’f
r、 T (ロリ断6b図下2 図
マツ/\ツLンターf′$言す型尤妾言刷器−−楚1第
3 困Fig. 1 is a plan view showing an embodiment of the optical modulation element according to the present invention, Fig. 2 is a side sectional view showing an embodiment of the optical modulation element according to the invention, and Fig. 3 is a Matsuhatsu Ender interferometer type. FIG. 4 is a plan view showing an example of an optical modulator. FIG. 4 is a plan view showing a conventional optical modulation element. In the figure, l is an electro-optical substrate, 41 is an optical waveguide, 42 is a buffer layer, 51 is a first electrode, 52 is a second electrode, 53.54 is a comb-shaped electrode piece, 55.56 is a gap between electrodes, respectively. /1-The first drawing of the picture shown by Hatsukushi Kazuoka Bata, Figure 1, 9e 珂・W-゛)e The old temple and threat・l >'f
r, T (Loli cut 6b figure bottom 2 Figure Matsu/\L printer f'$saying type 尤尤对文机--Chu 1 No. 3 trouble
Claims (1)
光導波路(41)の上に形成された第1の電極(51)
および第2の電極(52)を具え、 第1の電極(51)に設けられた櫛歯状電極片(53)
と第2の電極(52)に設けられた櫛歯状電極片(54
)とを交互に、 且つ該櫛歯状電極片(53)とその両側に位置する該櫛
歯状電極片(54)、或いは該櫛歯状電極片(54)と
その両側に位置する該櫛歯状電極片(53)とを、一方
は狭い間隙(55)を介し他方は広い間隙(56)を介
して対向せしめるように配置してなることを特徴とする
光変調素子。[Claims] An optical waveguide (41) formed on an electro-optic substrate (1), and a first electrode (51) formed on the optical waveguide (41).
and a second electrode (52), and a comb-shaped electrode piece (53) provided on the first electrode (51).
and a comb-shaped electrode piece (54) provided on the second electrode (52).
), and the comb-shaped electrode piece (53) and the comb-shaped electrode piece (54) located on both sides thereof, or the comb-shaped electrode piece (54) and the comb-shaped electrode piece (54) located on both sides thereof. A light modulation element characterized in that tooth-shaped electrode pieces (53) are arranged so that one side faces each other with a narrow gap (55) interposed therebetween and the other side faces each other with a wide gap (56) interposed therebetween.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15751985A JPS6218518A (en) | 1985-07-17 | 1985-07-17 | Optical modulation element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15751985A JPS6218518A (en) | 1985-07-17 | 1985-07-17 | Optical modulation element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6218518A true JPS6218518A (en) | 1987-01-27 |
Family
ID=15651443
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15751985A Pending JPS6218518A (en) | 1985-07-17 | 1985-07-17 | Optical modulation element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6218518A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006085080A (en) * | 2004-09-17 | 2006-03-30 | Nippon Telegr & Teleph Corp <Ntt> | Optical phase modulator |
JP2006162984A (en) * | 2004-12-07 | 2006-06-22 | Nippon Telegr & Teleph Corp <Ntt> | Light-intensity modulator |
-
1985
- 1985-07-17 JP JP15751985A patent/JPS6218518A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006085080A (en) * | 2004-09-17 | 2006-03-30 | Nippon Telegr & Teleph Corp <Ntt> | Optical phase modulator |
JP4514123B2 (en) * | 2004-09-17 | 2010-07-28 | 日本電信電話株式会社 | Optical phase modulator |
JP2006162984A (en) * | 2004-12-07 | 2006-06-22 | Nippon Telegr & Teleph Corp <Ntt> | Light-intensity modulator |
JP4494182B2 (en) * | 2004-12-07 | 2010-06-30 | 日本電信電話株式会社 | Light intensity modulator |
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