JPS62183090U - - Google Patents
Info
- Publication number
- JPS62183090U JPS62183090U JP7066586U JP7066586U JPS62183090U JP S62183090 U JPS62183090 U JP S62183090U JP 7066586 U JP7066586 U JP 7066586U JP 7066586 U JP7066586 U JP 7066586U JP S62183090 U JPS62183090 U JP S62183090U
- Authority
- JP
- Japan
- Prior art keywords
- casing
- vacuum pump
- water
- ring vacuum
- water ring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 18
- 239000002184 metal Substances 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7066586U JPS62183090U (no) | 1986-05-13 | 1986-05-13 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7066586U JPS62183090U (no) | 1986-05-13 | 1986-05-13 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS62183090U true JPS62183090U (no) | 1987-11-20 |
Family
ID=30912507
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7066586U Pending JPS62183090U (no) | 1986-05-13 | 1986-05-13 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62183090U (no) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5437690A (en) * | 1977-08-30 | 1979-03-20 | Nec Corp | Manufacture for semiconductor device |
-
1986
- 1986-05-13 JP JP7066586U patent/JPS62183090U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5437690A (en) * | 1977-08-30 | 1979-03-20 | Nec Corp | Manufacture for semiconductor device |
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