JPS62177421A - 斜入射干渉計装置 - Google Patents

斜入射干渉計装置

Info

Publication number
JPS62177421A
JPS62177421A JP61019247A JP1924786A JPS62177421A JP S62177421 A JPS62177421 A JP S62177421A JP 61019247 A JP61019247 A JP 61019247A JP 1924786 A JP1924786 A JP 1924786A JP S62177421 A JPS62177421 A JP S62177421A
Authority
JP
Japan
Prior art keywords
diffraction grating
light
diffracted
light beam
interferometer device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61019247A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0575246B2 (enrdf_load_stackoverflow
Inventor
Masane Suzuki
鈴木　正根
Motonori Kanetani
金谷　元徳
Takayuki Saito
隆行 斉藤
Kenji Yasuda
賢司 安田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujinon Corp
Original Assignee
Fuji Photo Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Photo Optical Co Ltd filed Critical Fuji Photo Optical Co Ltd
Priority to JP61019247A priority Critical patent/JPS62177421A/ja
Publication of JPS62177421A publication Critical patent/JPS62177421A/ja
Publication of JPH0575246B2 publication Critical patent/JPH0575246B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02022—Interferometers characterised by the beam path configuration contacting one object by grazing incidence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/30—Grating as beam-splitter

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
JP61019247A 1986-01-31 1986-01-31 斜入射干渉計装置 Granted JPS62177421A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61019247A JPS62177421A (ja) 1986-01-31 1986-01-31 斜入射干渉計装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61019247A JPS62177421A (ja) 1986-01-31 1986-01-31 斜入射干渉計装置

Publications (2)

Publication Number Publication Date
JPS62177421A true JPS62177421A (ja) 1987-08-04
JPH0575246B2 JPH0575246B2 (enrdf_load_stackoverflow) 1993-10-20

Family

ID=11994080

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61019247A Granted JPS62177421A (ja) 1986-01-31 1986-01-31 斜入射干渉計装置

Country Status (1)

Country Link
JP (1) JPS62177421A (enrdf_load_stackoverflow)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05507355A (ja) * 1990-10-03 1993-10-21 アボツト・ラボラトリーズ 多機能ホログラフィ光学素子の製造およびフォトメータにおける応用
WO1996022505A1 (en) * 1995-01-19 1996-07-25 Tropel Corporation Interferometric measurement of surfaces with diffractive optics at grazing incidence
WO1997005448A1 (en) * 1995-07-31 1997-02-13 Tropel Corporation Interferometer with compound optics
WO1997039309A1 (en) * 1996-04-18 1997-10-23 Tropel Corporation Object fixturing in interferometer
US5719676A (en) * 1996-04-12 1998-02-17 Tropel Corporation Diffraction management for grazing incidence interferometer
US5889591A (en) * 1996-10-17 1999-03-30 Tropel Corporation Interferometric measurement of toric surfaces at grazing incidence
DE19882191B4 (de) * 1997-03-17 2005-12-29 Tropel Corp. Interferenzmessung absoluter Abmessungen von zylindrischen Oberflächen bei streifendem Einfall

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05507355A (ja) * 1990-10-03 1993-10-21 アボツト・ラボラトリーズ 多機能ホログラフィ光学素子の製造およびフォトメータにおける応用
WO1996022505A1 (en) * 1995-01-19 1996-07-25 Tropel Corporation Interferometric measurement of surfaces with diffractive optics at grazing incidence
US5909281A (en) * 1995-01-19 1999-06-01 Tropel Corporation Interferometric measurement of surfaces with diffractive optics and planar wavefront imaging
US5654798A (en) * 1995-01-19 1997-08-05 Tropel Corporation Interferometric measurement of surfaces with diffractive optics at grazing incidence
GB2318425A (en) * 1995-07-31 1998-04-22 Tropel Corp Interferometer with compound optics
WO1997005448A1 (en) * 1995-07-31 1997-02-13 Tropel Corporation Interferometer with compound optics
GB2318425B (en) * 1995-07-31 1999-07-14 Tropel Corp Interferometer with compound optics
US5719676A (en) * 1996-04-12 1998-02-17 Tropel Corporation Diffraction management for grazing incidence interferometer
WO1997039309A1 (en) * 1996-04-18 1997-10-23 Tropel Corporation Object fixturing in interferometer
US5889591A (en) * 1996-10-17 1999-03-30 Tropel Corporation Interferometric measurement of toric surfaces at grazing incidence
US5991035A (en) * 1996-10-17 1999-11-23 Tropel Corporation Interferometric method of measuring toric surfaces at grazing incidence
US6043886A (en) * 1996-10-17 2000-03-28 Tropel Corporation Interferometric method of measuring toric surfaces at grazing incidence with phase shifting
DE19882191B4 (de) * 1997-03-17 2005-12-29 Tropel Corp. Interferenzmessung absoluter Abmessungen von zylindrischen Oberflächen bei streifendem Einfall

Also Published As

Publication number Publication date
JPH0575246B2 (enrdf_load_stackoverflow) 1993-10-20

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