JPS6217725B2 - - Google Patents
Info
- Publication number
- JPS6217725B2 JPS6217725B2 JP54114935A JP11493579A JPS6217725B2 JP S6217725 B2 JPS6217725 B2 JP S6217725B2 JP 54114935 A JP54114935 A JP 54114935A JP 11493579 A JP11493579 A JP 11493579A JP S6217725 B2 JPS6217725 B2 JP S6217725B2
- Authority
- JP
- Japan
- Prior art keywords
- rotating mirror
- interference fringes
- inspected
- reflected
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 claims description 27
- 238000007689 inspection Methods 0.000 claims description 19
- 230000003287 optical effect Effects 0.000 claims description 13
- 238000001514 detection method Methods 0.000 claims description 8
- 230000007547 defect Effects 0.000 description 17
- 239000011521 glass Substances 0.000 description 13
- 239000011248 coating agent Substances 0.000 description 6
- 238000000576 coating method Methods 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000005329 float glass Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 230000011218 segmentation Effects 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 239000002759 woven fabric Substances 0.000 description 1
Landscapes
- A Measuring Device Byusing Mechanical Method (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Mechanical Optical Scanning Systems (AREA)
- Facsimile Scanning Arrangements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11493579A JPS5639517A (en) | 1979-09-07 | 1979-09-07 | Position detecting method in optical scanning |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11493579A JPS5639517A (en) | 1979-09-07 | 1979-09-07 | Position detecting method in optical scanning |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5639517A JPS5639517A (en) | 1981-04-15 |
| JPS6217725B2 true JPS6217725B2 (it) | 1987-04-20 |
Family
ID=14650295
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11493579A Granted JPS5639517A (en) | 1979-09-07 | 1979-09-07 | Position detecting method in optical scanning |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5639517A (it) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1986000719A1 (en) * | 1984-07-05 | 1986-01-30 | Ricoh Company, Ltd. | Method of controlling temperature of a semiconductor laser in an optical scanning apparatus |
| JPS6333834A (ja) * | 1986-07-28 | 1988-02-13 | Canon Inc | 表面状態検査装置 |
| JPS63124941A (ja) * | 1986-11-14 | 1988-05-28 | Hitachi Electronics Eng Co Ltd | 走査位置検出方式 |
-
1979
- 1979-09-07 JP JP11493579A patent/JPS5639517A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5639517A (en) | 1981-04-15 |
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