JPS621756Y2 - - Google Patents

Info

Publication number
JPS621756Y2
JPS621756Y2 JP1980173332U JP17333280U JPS621756Y2 JP S621756 Y2 JPS621756 Y2 JP S621756Y2 JP 1980173332 U JP1980173332 U JP 1980173332U JP 17333280 U JP17333280 U JP 17333280U JP S621756 Y2 JPS621756 Y2 JP S621756Y2
Authority
JP
Japan
Prior art keywords
coil
vapor deposition
house
quartz cylinder
crucible
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1980173332U
Other languages
English (en)
Japanese (ja)
Other versions
JPS57104491U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1980173332U priority Critical patent/JPS621756Y2/ja
Publication of JPS57104491U publication Critical patent/JPS57104491U/ja
Application granted granted Critical
Publication of JPS621756Y2 publication Critical patent/JPS621756Y2/ja
Expired legal-status Critical Current

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Landscapes

  • General Induction Heating (AREA)
JP1980173332U 1980-12-03 1980-12-03 Expired JPS621756Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1980173332U JPS621756Y2 (enrdf_load_stackoverflow) 1980-12-03 1980-12-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1980173332U JPS621756Y2 (enrdf_load_stackoverflow) 1980-12-03 1980-12-03

Publications (2)

Publication Number Publication Date
JPS57104491U JPS57104491U (enrdf_load_stackoverflow) 1982-06-28
JPS621756Y2 true JPS621756Y2 (enrdf_load_stackoverflow) 1987-01-16

Family

ID=29965196

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1980173332U Expired JPS621756Y2 (enrdf_load_stackoverflow) 1980-12-03 1980-12-03

Country Status (1)

Country Link
JP (1) JPS621756Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS57104491U (enrdf_load_stackoverflow) 1982-06-28

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