JPS62175048U - - Google Patents

Info

Publication number
JPS62175048U
JPS62175048U JP1986061399U JP6139986U JPS62175048U JP S62175048 U JPS62175048 U JP S62175048U JP 1986061399 U JP1986061399 U JP 1986061399U JP 6139986 U JP6139986 U JP 6139986U JP S62175048 U JPS62175048 U JP S62175048U
Authority
JP
Japan
Prior art keywords
plasma
rectangular waveguide
microwave transmission
mode
microwaves
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1986061399U
Other languages
English (en)
Japanese (ja)
Other versions
JPH079359Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986061399U priority Critical patent/JPH079359Y2/ja
Publication of JPS62175048U publication Critical patent/JPS62175048U/ja
Application granted granted Critical
Publication of JPH079359Y2 publication Critical patent/JPH079359Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Landscapes

  • Treatments Of Macromolecular Shaped Articles (AREA)
  • ing And Chemical Polishing (AREA)
JP1986061399U 1986-04-23 1986-04-23 プラズマ装置 Expired - Lifetime JPH079359Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986061399U JPH079359Y2 (ja) 1986-04-23 1986-04-23 プラズマ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986061399U JPH079359Y2 (ja) 1986-04-23 1986-04-23 プラズマ装置

Publications (2)

Publication Number Publication Date
JPS62175048U true JPS62175048U (enExample) 1987-11-06
JPH079359Y2 JPH079359Y2 (ja) 1995-03-06

Family

ID=30894700

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986061399U Expired - Lifetime JPH079359Y2 (ja) 1986-04-23 1986-04-23 プラズマ装置

Country Status (1)

Country Link
JP (1) JPH079359Y2 (enExample)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61131454A (ja) * 1984-11-30 1986-06-19 Fujitsu Ltd マイクロ波プラズマ処理方法と装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61131454A (ja) * 1984-11-30 1986-06-19 Fujitsu Ltd マイクロ波プラズマ処理方法と装置

Also Published As

Publication number Publication date
JPH079359Y2 (ja) 1995-03-06

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