JPS6439714A - Plasma device - Google Patents

Abstract

PURPOSE:To enhance the outer diameter accuracy of a dielectric and the inner diameter accuracy of an outer conductor, to enhance the heat exchanging rate of the conductor and to generate a uniform and high density plasma by disposing the dielectric around the inner conductor of a coaxial line, and constructing to generate a plasma between the dielectric and the coaxial line. CONSTITUTION:A microwave generated by a magnetron 21 is propagated in a waveguide 22, and coupled to a coaxial line made of an outer conductor 24 and an inner conductor 25. Since the microwave coupled to the line is so excited as to have an electric field component perpendicular to the conductor 24, discharge gas introduced between the conductor 24 and a dielectric 26 to generate a uniform plasma 27. Since the conductor 24 made of metal having good thermal conductivity is contacted directly with the plasma 27 even if heat by the microwave discharge is generated, heat can be efficiently and externally discharged. When discharging power density is raised, a high density plasma can be generated.