JPS62174930A - 半導体装置 - Google Patents

半導体装置

Info

Publication number
JPS62174930A
JPS62174930A JP61017349A JP1734986A JPS62174930A JP S62174930 A JPS62174930 A JP S62174930A JP 61017349 A JP61017349 A JP 61017349A JP 1734986 A JP1734986 A JP 1734986A JP S62174930 A JPS62174930 A JP S62174930A
Authority
JP
Japan
Prior art keywords
electrode
semiconductor chip
quality
wire
ball
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP61017349A
Other languages
English (en)
Inventor
Saneyasu Hirota
弘田　実保
Kazumichi Machida
一道 町田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP61017349A priority Critical patent/JPS62174930A/ja
Priority to DE19863641689 priority patent/DE3641689A1/de
Publication of JPS62174930A publication Critical patent/JPS62174930A/ja
Priority to US07/223,980 priority patent/US5302550A/en
Pending legal-status Critical Current

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    • H01L24/02—Bonding areas ; Manufacturing methods related thereto
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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。

Description

【発明の詳細な説明】 〔産業上の利用分野〕 この発明は、半導体装置に関し、特にＩＣやトランジス
タなど、半導体装ノブ上の電極とリードとを金属ワイヤ
を用いて結線して構成される半導体装置に関するもので
ある。
〔従来の技術〕
第４図は従来のこの種の半導体装置におけるワイヤボン
ディング方法を模式的に示したものである。図において
、１は金ワイヤ、２は半導体チップ、３は半導体チップ
２上に形成されたアルミ電極、４は銀めっき等の表面処
理が施された銅合金リード、５はボンディングツールで
あるキャピラリチップである。
従来のワイヤボンディング方法では、金ワイヤ１の先端
をアーク入熱で溶融させ、これを凝固させてボール部１
ａを形成し、このボール部１ａをアルミ電極３にボール
ボンディングした後（第４図（２１）、　（ｂ＞参照）
、金ワイヤ１の他端側をリード４にステッチボンディン
グするようにしており（第４図（Ｃ１，（ｄｌ参照）、
又ワイヤｌの接合には主として超音波併用熱圧着方式が
用いられている。
〔発明が解決しようとする問題点〕
以上のように従来のこの種の半導体装置においては、ボ
ンディング用金虜ワイヤとして金ワイヤが使用されてい
るが、この場合コストが高くつくことと、半導体チップ
上のアルミ電極との接合部の長期信転性が低いという欠
点があるため、金に代わる材料及びそのボンディング技
術が種に検討されている。
しかるにここで材料原価低減及び素子の長期信頼性向上
という観点から、金属ワイヤを金から銅に代える場合に
ついて考えると、従来の半導体装置において、銅ワイヤ
をそのままアルミ電極に接合しようとすると、ボンディ
ング性が悪いという問題が生じ、この問題を解消するた
め超音波出力を増大させると、第５図に示されるように
、アルミ電極３ａが接合部周囲に排斥されて銅ワイヤ１
０のボールｌｏａが半導体チップ２に当り、電極３及び
半導体チップ２が損傷を受けるおそれがある。
この発明は、以上のような問題点に鑑み、電極及び半導
体チップがｔ員傷を受けることなく、金属ワイヤと電極
とを良好に接合できる半導体装置を堤供することを目的
としている。
そして本件発明者は、上述の問題点を解消すべく鋭意研
究した結果、次のようなことを見い出した。
■　まず条件を変えて電極の膜質をｔｌ！質し、これに
銅ワイヤをボールボンディングしたところ、調質条件に
よっては低い超音波出力でもって良好な接合状態が得ら
れた。従って調質条件をうまく設定してやれば、電極及
び半導体チップに損傷を与えることなく、銅ワイヤと電
極とを良好に接合できるものと考えられるが、この場合
この種の半導体装置における大量生産性を考慮すると、
調質条件を評価してボンディング性に対する電極の膜質
を保証してやる必要がある。
■　またボンディング用キャビラリチンプを用いて超音
波を印加しなから純銅ボールを電極に押圧し、その際の
電極の変形量、即ちくぼみ深さと接合状態との関係につ
いて調べたところ、両者の間には強い相関関係が見られ
、直径７０〜７５μｍの純銅ボールを、温度３５０℃、
荷重１５０８ｆ、超音波振動の周波数６０Ｋ）ｌｚ、片
振幅０．０７〜０．１４μｍの条件で加圧した際に、く
ぼみ深さが０．１〜０．６μｍの範囲となるような膜質
の電極を用いた時に低い超音波出力でもって良好な接合
状態が得られた（第６図参照）。従って直径７０〜７５
μｍの純銅ボールを、上述の条件で加圧し、くぼみ深さ
が０．１〜０．６μｒｎの範囲内にあるか否かを判断す
ることによって上述の調質条件の評価を行なえるものと
考えられる。
〔問題点を解決するための手段〕
そこでこの発明に係る半導体装置は、半導体チップ上の
電極として、直径７０〜７５μｍの純銅ボールを、温度
３５０°Ｃ１荷重１５０ｇｆ、超音波振動の周波数６０
ＫＨｚ、片振幅０．０７〜０．１４．１７　ｍの条件で
加圧した時にくぼみ深さが０．１〜０．６　μｍの範囲
になるように調質した薄膜を用いるようにしたものであ
る。
〔作用〕
この発明においては、直径７０〜７５μｍの純銅ボール
を、温度３５０℃、荷重１５０ｇｆ、＠音波振動の周波
数６０Ｋ）ｌｚ、片振幅０．０７〜０．１４　ｕ　ｍの
条件で加圧した時のくぼみ深さが０．１〜０．６μｍの
範囲になるように調質した電極を用いるようにしたこと
から、電極は良好な接合状態の得られる膜質に調質され
ており、低い超音波出力でもって良好な接合状態が安定
に得られる。
〔実施例〕
以下、本発明の実施例を図について説明する。
第１図ないし第３図は本発明の一実施例による半導体装
置を示す。図において、第４図及び第５図と同一符号は
同図と同一のものを示し、１０は銅ワイヤ、１０ａはボ
ール、１３は半導体チップ２上の電極で、該電極１３は
直径７０〜７５μｍの純銅ボール１４を、温度３５０°
Ｃ３荷重１５０８ｆ、超音波振動の周波数６０１１ｚ、
片振幅０．０７〜０．１４μｍの条件で加圧した時に変
形量、即ちくぼみ深さＤが０．１〜０．６μｍの範囲内
になるように調質した薄膜を用いて形成されている。
次に作用効果について説明する。
本装置を製造する場合、まず条件を種々変えて半導体チ
ップ２上の電極１３を調質し、これに直径７０〜７５μ
ｍの隼屯銅ポール１４をキャピラリチップ５を用いて、
温度３５０°Ｃ１荷重１５０ｇｆ　、超音波振動の周波
数６０ＫＨｚ、片振幅０．０Ｔ〜０１１４．ｔｚｎの条
件で押圧しく第３図（ａｌ参照）、そのときの電極１３
の変形量、即ちくぼみ深さＤを測定しく第３図（ｂｌ参
照）、このくぼみ深さＤが０．１〜０．６μｍの範囲内
にあるか否かの判断から、ボンディング性に対する改質
の評価を行ない、調質条件を設定する。
こうして調質条件が設定されると、半導体チップ２上の
電極１３を上記設定調質条件でもって調質し、後は従来
と同様のワイヤボンディング方法によって、即ちキャピ
ラリチップ５を用いかつ超音波振動によって半導体チッ
プ２上の電極１３に銅ワイヤ１０のボール１０ａをボー
ルボンディングするとともに、リード４に銅ワイヤ１０
の他端側をステッチボンディングする。
以上のような本実施例の装置では、半導体チップ上の電
極を所定の条件でもって調質するようにしたので、低い
超音波出力によって銅ワイヤを電極に良好かつ安定に接
合でき、その結果電極が接合部周囲に排斥されず、電極
及び半導体チップの損傷を防止でき、これにより現在ワ
イヤボンディングに用いられている金ワイヤに代えて、
低廉な銅ワイヤの使用が可能となり、大幅な材料原価低
減及び接合部の長期信頼性の向上を実現できる。
なお上記実施例では金属ワイヤとして銅ワイヤを用いた
場合について説明したが、この金属ワイヤは銅合金ワイ
ヤであってもよい。
〔発明の効果〕
以上のように本発明によれば、半導体チップ上の電極と
リードとを金属ワイヤを用いて結線してなる半導体装置
において、半導体チップ上の電極として直径７０〜７５
μｍの純銅ボールを、温度３５０℃、荷重１５０ｇｆ、
超音波振動の周波数６０にＨｚ、片振幅０．０７〜０．
１４μｍの条件で加圧した時にくぼみ深さが０．１〜０
．６μｍの範囲になるように調質した薄膜を用いるよう
にしたので、電極及び半導体チップが損傷を受けること
なく、金属ワイヤと電極とを良好に接合でき、金ワイヤ
に代えて低廉な金属ワイヤの使用が可能になるという効
果がある。
【図面の簡単な説明】
第１図は本発明の一実施例による半導体装置の構成図、
第２図は上記装置の要部構成図、第３図ｔａ）、　ｔｂ
）はともに膜質の評価方法を説明するための図、第４図
（＆）〜（ｄ）は各々ワイヤボンディング方法を示す模
式図、第５図及び第６図は各々発明が解決しようとする
問題点を説明するための図である。 ２・・・半導体チップ、４・・・リード、１０・・・銅
ワ１”ヤ、ＬＯａ・・・ボール、１３・・・電極、１４
・・・純銅ボール。 なお図中同一符号は同−又は相当部分を示す。

Claims (2)

    【特許請求の範囲】
  1. （１）半導体チップ上の電極とリードとを金属ワイヤを
    用いて結線して構成される半導体装置において、 上記電極として、直径７０〜７５μｍの純銅ボールを温
    度３５０℃、荷重１５０ｇｆ、超音波振動の周波数６０
    ＫＨｚ、片振幅０．０７〜０．１４μｍの条件で加圧し
    た時にくぼみ深さが０．１〜０．６μｍの範囲になるよ
    うに調質した薄膜を用いることを特徴とする半導体装置
    。
  2. （２）上記金属ワイヤが、銅ワイヤ又は銅合金ワイヤで
    あることを特徴とする特許請求の範囲第１項記載の半導
    体装置。
JP61017349A 1985-12-24 1986-01-28 半導体装置 Pending JPS62174930A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP61017349A JPS62174930A (ja) 1986-01-28 1986-01-28 半導体装置
DE19863641689 DE3641689A1 (de) 1985-12-24 1986-12-06 Verfahren zur herstellung eines halbleiterbauelements und eines darin verwendeten halbleiterchips
US07/223,980 US5302550A (en) 1985-12-24 1988-04-13 Method of bonding a microelectronic device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61017349A JPS62174930A (ja) 1986-01-28 1986-01-28 半導体装置

Publications (1)

Publication Number Publication Date
JPS62174930A true JPS62174930A (ja) 1987-07-31

Family

ID=11941567

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61017349A Pending JPS62174930A (ja) 1985-12-24 1986-01-28 半導体装置

Country Status (1)

Country Link
JP (1) JPS62174930A (ja)

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