JPS62172863U - - Google Patents

Info

Publication number
JPS62172863U
JPS62172863U JP6209786U JP6209786U JPS62172863U JP S62172863 U JPS62172863 U JP S62172863U JP 6209786 U JP6209786 U JP 6209786U JP 6209786 U JP6209786 U JP 6209786U JP S62172863 U JPS62172863 U JP S62172863U
Authority
JP
Japan
Prior art keywords
cylinder
shaft member
piston plate
space chamber
gate valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6209786U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0542282Y2 (no
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986062097U priority Critical patent/JPH0542282Y2/ja
Publication of JPS62172863U publication Critical patent/JPS62172863U/ja
Application granted granted Critical
Publication of JPH0542282Y2 publication Critical patent/JPH0542282Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Sliding Valves (AREA)
JP1986062097U 1986-04-23 1986-04-23 Expired - Lifetime JPH0542282Y2 (no)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986062097U JPH0542282Y2 (no) 1986-04-23 1986-04-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986062097U JPH0542282Y2 (no) 1986-04-23 1986-04-23

Publications (2)

Publication Number Publication Date
JPS62172863U true JPS62172863U (no) 1987-11-02
JPH0542282Y2 JPH0542282Y2 (no) 1993-10-25

Family

ID=30896044

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986062097U Expired - Lifetime JPH0542282Y2 (no) 1986-04-23 1986-04-23

Country Status (1)

Country Link
JP (1) JPH0542282Y2 (no)

Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11315939A (ja) * 1998-05-08 1999-11-16 Ckd Corp ゲート式真空遮断弁
JP2004316916A (ja) * 2003-04-16 2004-11-11 Vat Holding Ag 少なくとも一つの開口を有する真空閉塞体の閉塞装置
KR20060043814A (ko) * 2004-04-21 2006-05-15 오노데라 고이치 개폐 밸브 및 진공 챔버의 개구부의 개폐 방법
JP2007170666A (ja) * 2005-12-20 2007-07-05 Vat Holding Ag 振り子とスライドゲート真空バルブ
WO2012121410A1 (ja) * 2011-03-10 2012-09-13 株式会社アルバック 仕切弁及びスライド弁
JP2012189138A (ja) * 2011-03-10 2012-10-04 Ulvac Japan Ltd 仕切弁
JP2012193812A (ja) * 2011-03-17 2012-10-11 Ulvac Japan Ltd 仕切弁
JP2012193817A (ja) * 2011-03-17 2012-10-11 Ulvac Japan Ltd 仕切弁
JP2012229753A (ja) * 2011-04-26 2012-11-22 Ulvac Japan Ltd スライド弁
JP2012233564A (ja) * 2011-04-19 2012-11-29 Smc Corp ゲートバルブ
JP2013124773A (ja) * 2011-12-13 2013-06-24 Irie Koken Kk ゲートバルブのベローズ保護構造
KR101323811B1 (ko) * 2005-12-20 2013-10-31 배트 홀딩 아게 흐름 경로의 필수적인 기밀 폐쇄를 위한 밸브
JP2013245739A (ja) * 2012-05-24 2013-12-09 Ulvac Japan Ltd 仕切弁
JP2014037889A (ja) * 2012-08-17 2014-02-27 Vat Holding Ag バルブ
WO2017021120A1 (de) * 2015-08-06 2017-02-09 Vat Holding Ag Ventil, vorzugsweise vakuumventil
JP2018515727A (ja) * 2015-05-04 2018-06-14 エム． ブラウン イナートガース−ズュステーメ ゲゼルシャフト ミット ベシュレンクテル ハフツングＭ． Ｂｒａｕｎ Ｉｎｅｒｔｇａｓ−Ｓｙｓｔｅｍｅ ＧｍｂＨ 切換弁
KR20190136699A (ko) * 2018-05-31 2019-12-10 주식회사 에이씨엔 공간 절약형 게이트 밸브 시스템
KR20190136700A (ko) * 2018-05-31 2019-12-10 주식회사 에이씨엔 공간 절약형 멀티 플런저 게이트 밸브 시스템

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5523255U (no) * 1978-07-28 1980-02-14

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5523255U (no) * 1978-07-28 1980-02-14

Cited By (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11315939A (ja) * 1998-05-08 1999-11-16 Ckd Corp ゲート式真空遮断弁
JP2004316916A (ja) * 2003-04-16 2004-11-11 Vat Holding Ag 少なくとも一つの開口を有する真空閉塞体の閉塞装置
KR20060043814A (ko) * 2004-04-21 2006-05-15 오노데라 고이치 개폐 밸브 및 진공 챔버의 개구부의 개폐 방법
KR101323811B1 (ko) * 2005-12-20 2013-10-31 배트 홀딩 아게 흐름 경로의 필수적인 기밀 폐쇄를 위한 밸브
JP2007170666A (ja) * 2005-12-20 2007-07-05 Vat Holding Ag 振り子とスライドゲート真空バルブ
KR101323311B1 (ko) * 2005-12-20 2013-10-30 배트 홀딩 아게 유로를 가스 기밀하게 폐쇄하는 밸브
WO2012121410A1 (ja) * 2011-03-10 2012-09-13 株式会社アルバック 仕切弁及びスライド弁
JP2012189138A (ja) * 2011-03-10 2012-10-04 Ulvac Japan Ltd 仕切弁
JP2012193812A (ja) * 2011-03-17 2012-10-11 Ulvac Japan Ltd 仕切弁
JP2012193817A (ja) * 2011-03-17 2012-10-11 Ulvac Japan Ltd 仕切弁
JP2012233564A (ja) * 2011-04-19 2012-11-29 Smc Corp ゲートバルブ
JP2012229753A (ja) * 2011-04-26 2012-11-22 Ulvac Japan Ltd スライド弁
JP2013124773A (ja) * 2011-12-13 2013-06-24 Irie Koken Kk ゲートバルブのベローズ保護構造
JP2013245739A (ja) * 2012-05-24 2013-12-09 Ulvac Japan Ltd 仕切弁
JP2014037889A (ja) * 2012-08-17 2014-02-27 Vat Holding Ag バルブ
JP2018515727A (ja) * 2015-05-04 2018-06-14 エム． ブラウン イナートガース−ズュステーメ ゲゼルシャフト ミット ベシュレンクテル ハフツングＭ． Ｂｒａｕｎ Ｉｎｅｒｔｇａｓ−Ｓｙｓｔｅｍｅ ＧｍｂＨ 切換弁
WO2017021120A1 (de) * 2015-08-06 2017-02-09 Vat Holding Ag Ventil, vorzugsweise vakuumventil
KR20180035822A (ko) * 2015-08-06 2018-04-06 배트 홀딩 아게 바람직하게는 진공밸브인 밸브
KR20190136699A (ko) * 2018-05-31 2019-12-10 주식회사 에이씨엔 공간 절약형 게이트 밸브 시스템
KR20190136700A (ko) * 2018-05-31 2019-12-10 주식회사 에이씨엔 공간 절약형 멀티 플런저 게이트 밸브 시스템

Also Published As

Publication number Publication date
JPH0542282Y2 (no) 1993-10-25

Similar Documents

Publication Publication Date Title
JPS62172863U (no)
JPS60132969U (ja) 正圧式ブレ−キ倍力装置の供給通路
JPS6241970U (no)
JPS58102879U (ja) 真空用ゲ−トバルブ
JPH0389360U (no)
JPS647963U (no)
JPH01173577U (no)
JPS61150266U (no)
JPS6254373U (no)
JPS6198557U (no)
JPH01164514U (no)
JPH0478369U (no)
JPS61186805U (no)
JPS63193168U (no)
JPH0476981U (no)
JPS6394862U (no)
JPS6332955U (no)
JPS62178265U (no)
JPS5814966U (ja) エアゾ−ルスプレ−
JPS61194861U (no)
JPH0332232U (no)
JPH0433112U (no)
JPH0326881U (no)
JPH02114273U (no)
JPS6170212U (no)