JPS6217120U - - Google Patents
Info
- Publication number
- JPS6217120U JPS6217120U JP10992985U JP10992985U JPS6217120U JP S6217120 U JPS6217120 U JP S6217120U JP 10992985 U JP10992985 U JP 10992985U JP 10992985 U JP10992985 U JP 10992985U JP S6217120 U JPS6217120 U JP S6217120U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- holding
- utility
- same material
- model registration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 9
- 239000000463 material Substances 0.000 claims 1
- 238000001451 molecular beam epitaxy Methods 0.000 claims 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Description
第１図はこの考案の一実施例による基板ホルダ
ーの断面図、第２図は従来の基板ホルダーの断面
図である。 １…基板、２…基板支持具、７ａ…接触部。な
お図中同一符号は同一又は相当部分を示す。
ーの断面図、第２図は従来の基板ホルダーの断面
図である。 １…基板、２…基板支持具、７ａ…接触部。な
お図中同一符号は同一又は相当部分を示す。
Claims (1)
- 【実用新案登録請求の範囲】 分子線エピタキシ装置の基板を保持する基板ホ
ルダーにおいて、 基板支持具の基板と直接接触する部分を基板と
同じ材料で形成したことを特徴とする基板ホルダ
ー。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10992985U JPS6217120U (ja) | 1985-07-17 | 1985-07-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10992985U JPS6217120U (ja) | 1985-07-17 | 1985-07-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6217120U true JPS6217120U (ja) | 1987-02-02 |
Family
ID=30988485
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10992985U Pending JPS6217120U (ja) | 1985-07-17 | 1985-07-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6217120U (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6245100U (ja) * | 1985-09-06 | 1987-03-18 | ||
| JPH02233585A (ja) * | 1989-03-06 | 1990-09-17 | Nippon Telegr & Teleph Corp <Ntt> | 基板ホルダ |
-
1985
- 1985-07-17 JP JP10992985U patent/JPS6217120U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6245100U (ja) * | 1985-09-06 | 1987-03-18 | ||
| JPH02233585A (ja) * | 1989-03-06 | 1990-09-17 | Nippon Telegr & Teleph Corp <Ntt> | 基板ホルダ |