JPS62170760U - - Google Patents
Info
- Publication number
- JPS62170760U JPS62170760U JP5765586U JP5765586U JPS62170760U JP S62170760 U JPS62170760 U JP S62170760U JP 5765586 U JP5765586 U JP 5765586U JP 5765586 U JP5765586 U JP 5765586U JP S62170760 U JPS62170760 U JP S62170760U
- Authority
- JP
- Japan
- Prior art keywords
- reaction chamber
- transmission window
- forming apparatus
- thin film
- film forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 claims description 5
- 238000005530 etching Methods 0.000 claims description 3
- 230000005284 excitation Effects 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 3
- 230000005540 biological transmission Effects 0.000 claims 3
- 239000010408 film Substances 0.000 claims 1
- 230000003287 optical effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5765586U JPS62170760U (enrdf_load_stackoverflow) | 1986-04-18 | 1986-04-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5765586U JPS62170760U (enrdf_load_stackoverflow) | 1986-04-18 | 1986-04-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62170760U true JPS62170760U (enrdf_load_stackoverflow) | 1987-10-29 |
Family
ID=30887563
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5765586U Pending JPS62170760U (enrdf_load_stackoverflow) | 1986-04-18 | 1986-04-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62170760U (enrdf_load_stackoverflow) |
-
1986
- 1986-04-18 JP JP5765586U patent/JPS62170760U/ja active Pending
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