JPS62170760U - - Google Patents

Info

Publication number
JPS62170760U
JPS62170760U JP5765586U JP5765586U JPS62170760U JP S62170760 U JPS62170760 U JP S62170760U JP 5765586 U JP5765586 U JP 5765586U JP 5765586 U JP5765586 U JP 5765586U JP S62170760 U JPS62170760 U JP S62170760U
Authority
JP
Japan
Prior art keywords
reaction chamber
transmission window
forming apparatus
thin film
film forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5765586U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5765586U priority Critical patent/JPS62170760U/ja
Publication of JPS62170760U publication Critical patent/JPS62170760U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
JP5765586U 1986-04-18 1986-04-18 Pending JPS62170760U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5765586U JPS62170760U (enrdf_load_stackoverflow) 1986-04-18 1986-04-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5765586U JPS62170760U (enrdf_load_stackoverflow) 1986-04-18 1986-04-18

Publications (1)

Publication Number Publication Date
JPS62170760U true JPS62170760U (enrdf_load_stackoverflow) 1987-10-29

Family

ID=30887563

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5765586U Pending JPS62170760U (enrdf_load_stackoverflow) 1986-04-18 1986-04-18

Country Status (1)

Country Link
JP (1) JPS62170760U (enrdf_load_stackoverflow)

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