GB1164352A - Optical Filters. - Google Patents
Optical Filters.Info
- Publication number
- GB1164352A GB1164352A GB2778567A GB2778567A GB1164352A GB 1164352 A GB1164352 A GB 1164352A GB 2778567 A GB2778567 A GB 2778567A GB 2778567 A GB2778567 A GB 2778567A GB 1164352 A GB1164352 A GB 1164352A
- Authority
- GB
- United Kingdom
- Prior art keywords
- deposited
- silicon nitride
- silicon
- layer
- cylinder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003287 optical effect Effects 0.000 title abstract 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 abstract 4
- 229910052581 Si3N4 Inorganic materials 0.000 abstract 3
- 229910052710 silicon Inorganic materials 0.000 abstract 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 abstract 3
- 229910052732 germanium Inorganic materials 0.000 abstract 2
- 239000010703 silicon Substances 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 abstract 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 abstract 1
- 239000011248 coating agent Substances 0.000 abstract 1
- 238000000576 coating method Methods 0.000 abstract 1
- 239000003989 dielectric material Substances 0.000 abstract 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 abstract 1
- 239000011521 glass Substances 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 229910000077 silane Inorganic materials 0.000 abstract 1
- 239000004408 titanium dioxide Substances 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3639—Multilayers containing at least two functional metal layers
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
- C03C17/3429—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
- C03C17/3435—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising a nitride, oxynitride, boronitride or carbonitride
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
- C03C17/3429—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
- C03C17/3482—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising silicon, hydrogenated silicon or a silicide
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3649—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer made of metals other than silver
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
- G02B5/281—Interference filters designed for the infrared light
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/70—Properties of coatings
- C03C2217/73—Anti-reflective coatings with specific characteristics
- C03C2217/734—Anti-reflective coatings with specific characteristics comprising an alternation of high and low refractive indexes
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Surface Treatment Of Glass (AREA)
Abstract
1,164,352. Coating with Si, Ge, Silicon nitride and titania. STANDARD TELEPHONES & CABLES Ltd. June 16, 1967, No.27785/67. Heading C7F. [Also in Division G2] An optical filter has a transparent substrate with at least one layer of germanium or silicon and at least one further layer of silicon nitride or titanium dioxide. In making an infrared filter, a series of such layers may be deposited by passing silane from a cylinder 21, Fig. 2, through a flowmeter 23 to a reaction chamber 22 of dielectric material, a r.f. power source 29 being connected thereacross by plates 30. Magnets 32 provide for the establishment of a plasma controlling field. After the layer of silicon has been deposited on glass substrate 31, anhydrous ammonia is introduced from cylinder 24 so that silicon nitride is deposited. The process is then repeated.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB2778567A GB1164352A (en) | 1967-06-16 | 1967-06-16 | Optical Filters. |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB2778567A GB1164352A (en) | 1967-06-16 | 1967-06-16 | Optical Filters. |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1164352A true GB1164352A (en) | 1969-09-17 |
Family
ID=10265277
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB2778567A Expired GB1164352A (en) | 1967-06-16 | 1967-06-16 | Optical Filters. |
Country Status (1)
Country | Link |
---|---|
GB (1) | GB1164352A (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4262056A (en) * | 1978-09-15 | 1981-04-14 | The United States Of America As Represented By The Secretary Of The Navy | Ion-implanted multilayer optical interference filter |
GB2200138A (en) * | 1984-07-26 | 1988-07-27 | Japan Res Dev Corp | Semiconductor crystal growth apparatus |
EP0282565A1 (en) * | 1986-08-28 | 1988-09-21 | Libbey Owens Ford Co | Glass coating method and resulting article. |
US5398133A (en) * | 1993-10-27 | 1995-03-14 | Industrial Technology Research Institute | High endurance near-infrared optical window |
CN109437591A (en) * | 2018-12-05 | 2019-03-08 | 江阴泰榕光电科技有限公司 | Non-conductive coated glass manufacture craft |
CN110780370A (en) * | 2018-07-30 | 2020-02-11 | 唯亚威通讯技术有限公司 | Multispectral filter |
-
1967
- 1967-06-16 GB GB2778567A patent/GB1164352A/en not_active Expired
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4262056A (en) * | 1978-09-15 | 1981-04-14 | The United States Of America As Represented By The Secretary Of The Navy | Ion-implanted multilayer optical interference filter |
GB2200138A (en) * | 1984-07-26 | 1988-07-27 | Japan Res Dev Corp | Semiconductor crystal growth apparatus |
GB2200138B (en) * | 1984-07-26 | 1989-05-10 | Japan Res Dev Corp | Semiconductor crystal growth apparatus |
EP0282565A1 (en) * | 1986-08-28 | 1988-09-21 | Libbey Owens Ford Co | Glass coating method and resulting article. |
EP0282565A4 (en) * | 1986-08-28 | 1988-12-12 | Libbey Owens Ford Co | Glass coating method and resulting article. |
US5398133A (en) * | 1993-10-27 | 1995-03-14 | Industrial Technology Research Institute | High endurance near-infrared optical window |
CN110780370A (en) * | 2018-07-30 | 2020-02-11 | 唯亚威通讯技术有限公司 | Multispectral filter |
CN109437591A (en) * | 2018-12-05 | 2019-03-08 | 江阴泰榕光电科技有限公司 | Non-conductive coated glass manufacture craft |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
ZA741303B (en) | Plasma etching and deposition | |
AU7005681A (en) | Producing silicon from plasma | |
MY7100088A (en) | Methods of deositing thin films on substrates by means of gas plasmas | |
GB1164352A (en) | Optical Filters. | |
GB1244002A (en) | Improvements in and relating to interference filters | |
CA918986A (en) | Technique for the deposition of a ceramic substrate glaze | |
GB1051451A (en) | ||
JPS5552602A (en) | Waveguide mount | |
GB970071A (en) | Infrared filters | |
CA962755A (en) | Nonlinear optical devices utilizing substantially hexagonal silicon carbide | |
CA1014830A (en) | Method of forming doped dielectric layers utilizing reactive plasma deposition | |
GB1237931A (en) | ||
JPS5645827A (en) | Forming method for transparent ferroelectric thin film | |
JPS6410216A (en) | Production of liquid crystal display panel | |
JPS5282442A (en) | Glass electode substrate for liquid crystal display unit | |
CA960922A (en) | Vapor deposition process | |
JPS5435791A (en) | Semiconductor pressure sensor | |
JPS5278454A (en) | Optical waveguide of single crystal thin film | |
JPS52146251A (en) | Production and apparatus of optical interference filters | |
GB1342693A (en) | Method of making interference filters | |
FR1535093A (en) | Method for the rapid deposition of metallic films, using a plasma of the material to be deposited | |
AU4440768A (en) | Method of coating substrates by vapour deposition | |
GB1183979A (en) | Improvements in or relating to Hard, Well Adhering and Practically Non-Absorbent Thin Layers | |
CA747325A (en) | Process for protecting thin metallic films deposited on glass and vitrified ceramic | |
CA826619A (en) | Process for the monocrystalline deposition of compound semiconductors |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed | ||
PLNP | Patent lapsed through nonpayment of renewal fees |