JPS52146251A - Production and apparatus of optical interference filters - Google Patents

Production and apparatus of optical interference filters

Info

Publication number
JPS52146251A
JPS52146251A JP6230776A JP6230776A JPS52146251A JP S52146251 A JPS52146251 A JP S52146251A JP 6230776 A JP6230776 A JP 6230776A JP 6230776 A JP6230776 A JP 6230776A JP S52146251 A JPS52146251 A JP S52146251A
Authority
JP
Japan
Prior art keywords
production
optical interference
interference filters
films
deposition rate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6230776A
Other languages
Japanese (ja)
Inventor
Taiji Shimomoto
Yoshinori Imamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6230776A priority Critical patent/JPS52146251A/en
Publication of JPS52146251A publication Critical patent/JPS52146251A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/542—Controlling the film thickness or evaporation rate
    • C23C14/543—Controlling the film thickness or evaporation rate using measurement on the vapor source

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Optical Filters (AREA)
  • Physical Vapour Deposition (AREA)
  • Color Television Image Signal Generators (AREA)

Abstract

PURPOSE:To control the deposition rate of films and stabilize spectral characteristics by using a high frequency sputtering method and electrically detecting parameters that affect the deposition rate of films.
JP6230776A 1976-05-31 1976-05-31 Production and apparatus of optical interference filters Pending JPS52146251A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6230776A JPS52146251A (en) 1976-05-31 1976-05-31 Production and apparatus of optical interference filters

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6230776A JPS52146251A (en) 1976-05-31 1976-05-31 Production and apparatus of optical interference filters

Publications (1)

Publication Number Publication Date
JPS52146251A true JPS52146251A (en) 1977-12-05

Family

ID=13196340

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6230776A Pending JPS52146251A (en) 1976-05-31 1976-05-31 Production and apparatus of optical interference filters

Country Status (1)

Country Link
JP (1) JPS52146251A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01108373A (en) * 1987-09-18 1989-04-25 Leybold Ag Apparatus for coating base plate
JPH02115366A (en) * 1988-10-25 1990-04-27 Sumitomo Special Metals Co Ltd Sputtering device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01108373A (en) * 1987-09-18 1989-04-25 Leybold Ag Apparatus for coating base plate
JPH02115366A (en) * 1988-10-25 1990-04-27 Sumitomo Special Metals Co Ltd Sputtering device

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