FR1535093A - Method for the rapid deposition of metallic films, using a plasma of the material to be deposited - Google Patents

Method for the rapid deposition of metallic films, using a plasma of the material to be deposited

Info

Publication number
FR1535093A
FR1535093A FR118072A FR118072A FR1535093A FR 1535093 A FR1535093 A FR 1535093A FR 118072 A FR118072 A FR 118072A FR 118072 A FR118072 A FR 118072A FR 1535093 A FR1535093 A FR 1535093A
Authority
FR
France
Prior art keywords
plasma
deposited
metallic films
rapid deposition
deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR118072A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Raytheon Co
Original Assignee
Hughes Aircraft Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hughes Aircraft Co filed Critical Hughes Aircraft Co
Priority to FR118072A priority Critical patent/FR1535093A/en
Application granted granted Critical
Publication of FR1535093A publication Critical patent/FR1535093A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
FR118072A 1966-09-08 1967-08-17 Method for the rapid deposition of metallic films, using a plasma of the material to be deposited Expired FR1535093A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR118072A FR1535093A (en) 1966-09-08 1967-08-17 Method for the rapid deposition of metallic films, using a plasma of the material to be deposited

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US57807966A 1966-09-08 1966-09-08
FR118072A FR1535093A (en) 1966-09-08 1967-08-17 Method for the rapid deposition of metallic films, using a plasma of the material to be deposited

Publications (1)

Publication Number Publication Date
FR1535093A true FR1535093A (en) 1968-08-02

Family

ID=26178868

Family Applications (1)

Application Number Title Priority Date Filing Date
FR118072A Expired FR1535093A (en) 1966-09-08 1967-08-17 Method for the rapid deposition of metallic films, using a plasma of the material to be deposited

Country Status (1)

Country Link
FR (1) FR1535093A (en)

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