JPS62170186A - 熱処理装置 - Google Patents

熱処理装置

Info

Publication number
JPS62170186A
JPS62170186A JP1256686A JP1256686A JPS62170186A JP S62170186 A JPS62170186 A JP S62170186A JP 1256686 A JP1256686 A JP 1256686A JP 1256686 A JP1256686 A JP 1256686A JP S62170186 A JPS62170186 A JP S62170186A
Authority
JP
Japan
Prior art keywords
support piece
support
locking
supported
support device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1256686A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0410199B2 (enrdf_load_stackoverflow
Inventor
陰山　俊一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Sagami Ltd
Original Assignee
Tokyo Electron Sagami Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Sagami Ltd filed Critical Tokyo Electron Sagami Ltd
Priority to JP1256686A priority Critical patent/JPS62170186A/ja
Publication of JPS62170186A publication Critical patent/JPS62170186A/ja
Publication of JPH0410199B2 publication Critical patent/JPH0410199B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Resistance Heating (AREA)
  • Furnace Details (AREA)
JP1256686A 1986-01-23 1986-01-23 熱処理装置 Granted JPS62170186A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1256686A JPS62170186A (ja) 1986-01-23 1986-01-23 熱処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1256686A JPS62170186A (ja) 1986-01-23 1986-01-23 熱処理装置

Publications (2)

Publication Number Publication Date
JPS62170186A true JPS62170186A (ja) 1987-07-27
JPH0410199B2 JPH0410199B2 (enrdf_load_stackoverflow) 1992-02-24

Family

ID=11808902

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1256686A Granted JPS62170186A (ja) 1986-01-23 1986-01-23 熱処理装置

Country Status (1)

Country Link
JP (1) JPS62170186A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5187771A (en) * 1990-11-13 1993-02-16 Tokyo Electron Sagami Limited Heat processing apparatus utilizing a plurality of stacked heater holders
US6008477A (en) * 1997-02-18 1999-12-28 Tokyo Electron Limited Heat treatment apparatus
JP2007502549A (ja) * 2003-05-23 2007-02-08 エムアールエル インダストリーズ 高温拡散炉の加熱コイルの保持メカニズム

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5367941U (enrdf_load_stackoverflow) * 1976-11-10 1978-06-07
JPS561116U (enrdf_load_stackoverflow) * 1979-06-19 1981-01-08
JPS5623675U (enrdf_load_stackoverflow) * 1979-07-30 1981-03-03

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5367941U (enrdf_load_stackoverflow) * 1976-11-10 1978-06-07
JPS561116U (enrdf_load_stackoverflow) * 1979-06-19 1981-01-08
JPS5623675U (enrdf_load_stackoverflow) * 1979-07-30 1981-03-03

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5187771A (en) * 1990-11-13 1993-02-16 Tokyo Electron Sagami Limited Heat processing apparatus utilizing a plurality of stacked heater holders
US6008477A (en) * 1997-02-18 1999-12-28 Tokyo Electron Limited Heat treatment apparatus
JP2007502549A (ja) * 2003-05-23 2007-02-08 エムアールエル インダストリーズ 高温拡散炉の加熱コイルの保持メカニズム

Also Published As

Publication number Publication date
JPH0410199B2 (enrdf_load_stackoverflow) 1992-02-24

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