JPS62169329A - アライメント方法 - Google Patents

アライメント方法

Info

Publication number
JPS62169329A
JPS62169329A JP61293158A JP29315886A JPS62169329A JP S62169329 A JPS62169329 A JP S62169329A JP 61293158 A JP61293158 A JP 61293158A JP 29315886 A JP29315886 A JP 29315886A JP S62169329 A JPS62169329 A JP S62169329A
Authority
JP
Japan
Prior art keywords
pattern
wafer
data
alignment
respect
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61293158A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0462452B2 (enExample
Inventor
Masao Kosugi
小杉　雅夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP61293158A priority Critical patent/JPS62169329A/ja
Publication of JPS62169329A publication Critical patent/JPS62169329A/ja
Publication of JPH0462452B2 publication Critical patent/JPH0462452B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP61293158A 1986-12-09 1986-12-09 アライメント方法 Granted JPS62169329A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61293158A JPS62169329A (ja) 1986-12-09 1986-12-09 アライメント方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61293158A JPS62169329A (ja) 1986-12-09 1986-12-09 アライメント方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP57135498A Division JPS5927525A (ja) 1982-08-03 1982-08-03 アライメント方法

Publications (2)

Publication Number Publication Date
JPS62169329A true JPS62169329A (ja) 1987-07-25
JPH0462452B2 JPH0462452B2 (enExample) 1992-10-06

Family

ID=17791169

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61293158A Granted JPS62169329A (ja) 1986-12-09 1986-12-09 アライメント方法

Country Status (1)

Country Link
JP (1) JPS62169329A (enExample)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51111076A (en) * 1975-03-26 1976-10-01 Hitachi Ltd Exposure device
JPS5541739A (en) * 1978-09-20 1980-03-24 Hitachi Ltd Micro-projection type mask alignment device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51111076A (en) * 1975-03-26 1976-10-01 Hitachi Ltd Exposure device
JPS5541739A (en) * 1978-09-20 1980-03-24 Hitachi Ltd Micro-projection type mask alignment device

Also Published As

Publication number Publication date
JPH0462452B2 (enExample) 1992-10-06

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