JPS62167252U - - Google Patents

Info

Publication number
JPS62167252U
JPS62167252U JP1986052799U JP5279986U JPS62167252U JP S62167252 U JPS62167252 U JP S62167252U JP 1986052799 U JP1986052799 U JP 1986052799U JP 5279986 U JP5279986 U JP 5279986U JP S62167252 U JPS62167252 U JP S62167252U
Authority
JP
Japan
Prior art keywords
alignment
mark
mask
auxiliary
diagram showing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1986052799U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986052799U priority Critical patent/JPS62167252U/ja
Publication of JPS62167252U publication Critical patent/JPS62167252U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP1986052799U 1986-04-10 1986-04-10 Pending JPS62167252U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986052799U JPS62167252U (enrdf_load_stackoverflow) 1986-04-10 1986-04-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986052799U JPS62167252U (enrdf_load_stackoverflow) 1986-04-10 1986-04-10

Publications (1)

Publication Number Publication Date
JPS62167252U true JPS62167252U (enrdf_load_stackoverflow) 1987-10-23

Family

ID=30878292

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986052799U Pending JPS62167252U (enrdf_load_stackoverflow) 1986-04-10 1986-04-10

Country Status (1)

Country Link
JP (1) JPS62167252U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0276214A (ja) * 1988-09-12 1990-03-15 Oki Electric Ind Co Ltd ホトリソグラフィー工程におけるガラスマスク
JP2007183210A (ja) * 2006-01-10 2007-07-19 Nikon Corp 検査装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0276214A (ja) * 1988-09-12 1990-03-15 Oki Electric Ind Co Ltd ホトリソグラフィー工程におけるガラスマスク
JP2007183210A (ja) * 2006-01-10 2007-07-19 Nikon Corp 検査装置

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