JPS62166945A - 精密位置決め装置 - Google Patents

精密位置決め装置

Info

Publication number
JPS62166945A
JPS62166945A JP632986A JP632986A JPS62166945A JP S62166945 A JPS62166945 A JP S62166945A JP 632986 A JP632986 A JP 632986A JP 632986 A JP632986 A JP 632986A JP S62166945 A JPS62166945 A JP S62166945A
Authority
JP
Japan
Prior art keywords
slider
output
voltage
comparator
displacement detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP632986A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0367824B2 (enrdf_load_stackoverflow
Inventor
Hidekazu Muto
英一 武藤
Tsutomu Tadane
勉 唯根
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koyo Seiko Co Ltd
Original Assignee
Koyo Seiko Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koyo Seiko Co Ltd filed Critical Koyo Seiko Co Ltd
Priority to JP632986A priority Critical patent/JPS62166945A/ja
Publication of JPS62166945A publication Critical patent/JPS62166945A/ja
Publication of JPH0367824B2 publication Critical patent/JPH0367824B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Machine Tool Positioning Apparatuses (AREA)
  • Control Of Position Or Direction (AREA)
JP632986A 1986-01-17 1986-01-17 精密位置決め装置 Granted JPS62166945A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP632986A JPS62166945A (ja) 1986-01-17 1986-01-17 精密位置決め装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP632986A JPS62166945A (ja) 1986-01-17 1986-01-17 精密位置決め装置

Publications (2)

Publication Number Publication Date
JPS62166945A true JPS62166945A (ja) 1987-07-23
JPH0367824B2 JPH0367824B2 (enrdf_load_stackoverflow) 1991-10-24

Family

ID=11635323

Family Applications (1)

Application Number Title Priority Date Filing Date
JP632986A Granted JPS62166945A (ja) 1986-01-17 1986-01-17 精密位置決め装置

Country Status (1)

Country Link
JP (1) JPS62166945A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0367824B2 (enrdf_load_stackoverflow) 1991-10-24

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Legal Events

Date Code Title Description
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