JPS62165302A - 高抵抗材料 - Google Patents
高抵抗材料Info
- Publication number
- JPS62165302A JPS62165302A JP61007559A JP755986A JPS62165302A JP S62165302 A JPS62165302 A JP S62165302A JP 61007559 A JP61007559 A JP 61007559A JP 755986 A JP755986 A JP 755986A JP S62165302 A JPS62165302 A JP S62165302A
- Authority
- JP
- Japan
- Prior art keywords
- resistance
- resistance material
- chromium
- weight
- boron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 title claims description 13
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 8
- 229910052796 boron Inorganic materials 0.000 claims description 8
- 239000011651 chromium Substances 0.000 claims description 7
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 6
- 229910052782 aluminium Inorganic materials 0.000 claims description 6
- 229910052804 chromium Inorganic materials 0.000 claims description 6
- 239000000956 alloy Substances 0.000 claims description 5
- 239000000203 mixture Substances 0.000 claims description 5
- 229910045601 alloy Inorganic materials 0.000 claims description 4
- 239000010409 thin film Substances 0.000 description 6
- 239000010408 film Substances 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 230000010354 integration Effects 0.000 description 3
- 229910002058 ternary alloy Inorganic materials 0.000 description 3
- 229910018487 Ni—Cr Inorganic materials 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 239000000788 chromium alloy Substances 0.000 description 2
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 229910000599 Cr alloy Inorganic materials 0.000 description 1
- QQHSIRTYSFLSRM-UHFFFAOYSA-N alumanylidynechromium Chemical compound [Al].[Cr] QQHSIRTYSFLSRM-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910000623 nickel–chromium alloy Inorganic materials 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Landscapes
- Non-Adjustable Resistors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61007559A JPS62165302A (ja) | 1986-01-16 | 1986-01-16 | 高抵抗材料 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61007559A JPS62165302A (ja) | 1986-01-16 | 1986-01-16 | 高抵抗材料 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62165302A true JPS62165302A (ja) | 1987-07-21 |
| JPH044722B2 JPH044722B2 (enrdf_load_stackoverflow) | 1992-01-29 |
Family
ID=11669162
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61007559A Granted JPS62165302A (ja) | 1986-01-16 | 1986-01-16 | 高抵抗材料 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62165302A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0287501A (ja) * | 1988-09-24 | 1990-03-28 | Susumu Kogyo Kk | 電気抵抗材料 |
| US5227231A (en) * | 1991-06-19 | 1993-07-13 | Susumu Co., Ltd. | Electrical resistive material |
-
1986
- 1986-01-16 JP JP61007559A patent/JPS62165302A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0287501A (ja) * | 1988-09-24 | 1990-03-28 | Susumu Kogyo Kk | 電気抵抗材料 |
| US5227231A (en) * | 1991-06-19 | 1993-07-13 | Susumu Co., Ltd. | Electrical resistive material |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH044722B2 (enrdf_load_stackoverflow) | 1992-01-29 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| NL8006025A (nl) | Weerstand. | |
| JPS62165302A (ja) | 高抵抗材料 | |
| JPS60262303A (ja) | Ｐｔｃセラミツク組成物 | |
| US3356982A (en) | Metal film resistor for low range and linear temperature coefficient | |
| JPH02152201A (ja) | 歪ゲージ用薄膜抵抗体 | |
| JPS61242002A (ja) | 薄膜サ−ミスタ | |
| JPH03173101A (ja) | 薄膜抵抗体 | |
| TWI641001B (zh) | 薄膜電阻合金 | |
| JPS6277436A (ja) | 電気抵抗材料およびそれを用いた薄膜素子 | |
| JP4136755B2 (ja) | ３元合金材料からなるｐｔｃサーミスタ | |
| JP4073658B2 (ja) | ３元合金材料 | |
| GB1221612A (en) | Improvements in or relating to a method of manufacturing thin film resistor elements | |
| JPH0287501A (ja) | 電気抵抗材料 | |
| JPH04370901A (ja) | 電気抵抗材料 | |
| CN217588576U (zh) | 一种负电阻温度系数的复合薄膜芯片电阻器 | |
| JPS5822379A (ja) | スパツタリング用タ−ゲツト | |
| JP4121270B2 (ja) | ４元合金材料からなるｎｔｃサーミスタ、及び同材料を用いた抵抗器 | |
| JPS6395601A (ja) | 抵抗薄膜 | |
| JP3288241B2 (ja) | 抵抗材料および抵抗材料薄膜 | |
| LAYER | Nitride, Silicide and Oxide Evaporated Films for the Electronic Industry | |
| JPS6292404A (ja) | 薄膜抵抗体 | |
| JPS6295802A (ja) | 薄膜抵抗体 | |
| JPH0620803A (ja) | 薄膜抵抗器及び薄膜抵抗器の製造方法 | |
| JPH04192302A (ja) | 薄膜サーミスタ素子 | |
| JPS5845163B2 (ja) | 抵抗器の製造法 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| EXPY | Cancellation because of completion of term |