JPS6216461U - - Google Patents
Info
- Publication number
- JPS6216461U JPS6216461U JP10691585U JP10691585U JPS6216461U JP S6216461 U JPS6216461 U JP S6216461U JP 10691585 U JP10691585 U JP 10691585U JP 10691585 U JP10691585 U JP 10691585U JP S6216461 U JPS6216461 U JP S6216461U
- Authority
- JP
- Japan
- Prior art keywords
- laser beam
- inspected
- window
- foreign matter
- guiding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007689 inspection Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10691585U JPH051812Y2 (enExample) | 1985-07-15 | 1985-07-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10691585U JPH051812Y2 (enExample) | 1985-07-15 | 1985-07-15 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6216461U true JPS6216461U (enExample) | 1987-01-31 |
| JPH051812Y2 JPH051812Y2 (enExample) | 1993-01-18 |
Family
ID=30982713
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10691585U Expired - Lifetime JPH051812Y2 (enExample) | 1985-07-15 | 1985-07-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH051812Y2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002500354A (ja) * | 1997-12-24 | 2002-01-08 | ゲルザン エスタブリッシュメント | ダイアモンド及び宝石を検査する装置及び方法 |
-
1985
- 1985-07-15 JP JP10691585U patent/JPH051812Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002500354A (ja) * | 1997-12-24 | 2002-01-08 | ゲルザン エスタブリッシュメント | ダイアモンド及び宝石を検査する装置及び方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH051812Y2 (enExample) | 1993-01-18 |
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