JPS62163968U - - Google Patents
Info
- Publication number
- JPS62163968U JPS62163968U JP5305886U JP5305886U JPS62163968U JP S62163968 U JPS62163968 U JP S62163968U JP 5305886 U JP5305886 U JP 5305886U JP 5305886 U JP5305886 U JP 5305886U JP S62163968 U JPS62163968 U JP S62163968U
- Authority
- JP
- Japan
- Prior art keywords
- silicon diaphragm
- pressure sensor
- input
- semiconductor pressure
- output
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 7
- 229910052710 silicon Inorganic materials 0.000 claims description 7
- 239000010703 silicon Substances 0.000 claims description 7
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims 3
- 239000000758 substrate Substances 0.000 claims 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
Landscapes
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5305886U JPS62163968U (en, 2012) | 1986-04-09 | 1986-04-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5305886U JPS62163968U (en, 2012) | 1986-04-09 | 1986-04-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62163968U true JPS62163968U (en, 2012) | 1987-10-17 |
Family
ID=30878778
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5305886U Pending JPS62163968U (en, 2012) | 1986-04-09 | 1986-04-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62163968U (en, 2012) |
-
1986
- 1986-04-09 JP JP5305886U patent/JPS62163968U/ja active Pending
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