JPS62163968U - - Google Patents

Info

Publication number

JPS62163968U

JPS62163968U JP5305886U JP5305886U JPS62163968U JP S62163968 U JPS62163968 U JP S62163968U JP 5305886 U JP5305886 U JP 5305886U JP 5305886 U JP5305886 U JP 5305886U JP S62163968 U JPS62163968 U JP S62163968U

Authority

JP

Japan

Prior art keywords

silicon diaphragm

pressure sensor

input

semiconductor pressure

output

Prior art date

1986-04-09

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 7
• 229910052710 silicon Inorganic materials 0.000 claims description 7
• 239000010703 silicon Substances 0.000 claims description 7
• NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 2
• 239000004065 semiconductor Substances 0.000 claims 3
• 239000000758 substrate Substances 0.000 claims 2
• 239000000853 adhesive Substances 0.000 description 1
• 230000001070 adhesive effect Effects 0.000 description 1
• 239000012790 adhesive layer Substances 0.000 description 1
• 239000004020 conductor Substances 0.000 description 1
• 230000001681 protective effect Effects 0.000 description 1
• 229910000679 solder Inorganic materials 0.000 description 1