JPS62160772A - 半導体圧力センサ及び圧力測定装置 - Google Patents
半導体圧力センサ及び圧力測定装置Info
- Publication number
- JPS62160772A JPS62160772A JP305386A JP305386A JPS62160772A JP S62160772 A JPS62160772 A JP S62160772A JP 305386 A JP305386 A JP 305386A JP 305386 A JP305386 A JP 305386A JP S62160772 A JPS62160772 A JP S62160772A
- Authority
- JP
- Japan
- Prior art keywords
- resistor
- impurity layer
- pressure
- temperature
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 35
- 239000012535 impurity Substances 0.000 claims abstract description 30
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 28
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 28
- 239000010703 silicon Substances 0.000 claims abstract description 28
- 230000035945 sensitivity Effects 0.000 claims abstract description 9
- 239000013078 crystal Substances 0.000 claims description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 230000001419 dependent effect Effects 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 31
- 238000009792 diffusion process Methods 0.000 description 9
- 230000000694 effects Effects 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 241001663154 Electron Species 0.000 description 1
- 241000134884 Ericales Species 0.000 description 1
- 238000009530 blood pressure measurement Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- KSCFJBIXMNOVSH-UHFFFAOYSA-N dyphylline Chemical compound O=C1N(C)C(=O)N(C)C2=C1N(CC(O)CO)C=N2 KSCFJBIXMNOVSH-UHFFFAOYSA-N 0.000 description 1
- 238000004836 empirical method Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000002277 temperature effect Effects 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP305386A JPS62160772A (ja) | 1986-01-10 | 1986-01-10 | 半導体圧力センサ及び圧力測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP305386A JPS62160772A (ja) | 1986-01-10 | 1986-01-10 | 半導体圧力センサ及び圧力測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62160772A true JPS62160772A (ja) | 1987-07-16 |
| JPH0560672B2 JPH0560672B2 (enrdf_load_stackoverflow) | 1993-09-02 |
Family
ID=11546578
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP305386A Granted JPS62160772A (ja) | 1986-01-10 | 1986-01-10 | 半導体圧力センサ及び圧力測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62160772A (enrdf_load_stackoverflow) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7064807B2 (en) | 2001-01-15 | 2006-06-20 | Asml Netherlands B.V. | Lithographic apparatus |
| US7113258B2 (en) | 2001-01-15 | 2006-09-26 | Asml Netherlands B.V. | Lithographic apparatus |
| US20120048028A1 (en) * | 2010-08-27 | 2012-03-01 | Hitachi, Ltd. | Apparatus for measuring a mechanical quantity |
-
1986
- 1986-01-10 JP JP305386A patent/JPS62160772A/ja active Granted
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7064807B2 (en) | 2001-01-15 | 2006-06-20 | Asml Netherlands B.V. | Lithographic apparatus |
| US7084955B2 (en) | 2001-01-15 | 2006-08-01 | Asml Netherlands B.V. | Lithographic apparatus |
| US7113258B2 (en) | 2001-01-15 | 2006-09-26 | Asml Netherlands B.V. | Lithographic apparatus |
| US20120048028A1 (en) * | 2010-08-27 | 2012-03-01 | Hitachi, Ltd. | Apparatus for measuring a mechanical quantity |
| US8528414B2 (en) * | 2010-08-27 | 2013-09-10 | Hitachi, Ltd. | Apparatus for measuring a mechanical quantity |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0560672B2 (enrdf_load_stackoverflow) | 1993-09-02 |
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