JPS62160772A - 半導体圧力センサ及び圧力測定装置 - Google Patents

半導体圧力センサ及び圧力測定装置

Info

Publication number
JPS62160772A
JPS62160772A JP305386A JP305386A JPS62160772A JP S62160772 A JPS62160772 A JP S62160772A JP 305386 A JP305386 A JP 305386A JP 305386 A JP305386 A JP 305386A JP S62160772 A JPS62160772 A JP S62160772A
Authority
JP
Japan
Prior art keywords
resistor
impurity layer
pressure
temperature
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP305386A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0560672B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Mayumi Nomiyama
野見山　真弓
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP305386A priority Critical patent/JPS62160772A/ja
Publication of JPS62160772A publication Critical patent/JPS62160772A/ja
Publication of JPH0560672B2 publication Critical patent/JPH0560672B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP305386A 1986-01-10 1986-01-10 半導体圧力センサ及び圧力測定装置 Granted JPS62160772A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP305386A JPS62160772A (ja) 1986-01-10 1986-01-10 半導体圧力センサ及び圧力測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP305386A JPS62160772A (ja) 1986-01-10 1986-01-10 半導体圧力センサ及び圧力測定装置

Publications (2)

Publication Number Publication Date
JPS62160772A true JPS62160772A (ja) 1987-07-16
JPH0560672B2 JPH0560672B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-09-02

Family

ID=11546578

Family Applications (1)

Application Number Title Priority Date Filing Date
JP305386A Granted JPS62160772A (ja) 1986-01-10 1986-01-10 半導体圧力センサ及び圧力測定装置

Country Status (1)

Country Link
JP (1) JPS62160772A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7064807B2 (en) 2001-01-15 2006-06-20 Asml Netherlands B.V. Lithographic apparatus
US7113258B2 (en) 2001-01-15 2006-09-26 Asml Netherlands B.V. Lithographic apparatus
US20120048028A1 (en) * 2010-08-27 2012-03-01 Hitachi, Ltd. Apparatus for measuring a mechanical quantity

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7064807B2 (en) 2001-01-15 2006-06-20 Asml Netherlands B.V. Lithographic apparatus
US7084955B2 (en) 2001-01-15 2006-08-01 Asml Netherlands B.V. Lithographic apparatus
US7113258B2 (en) 2001-01-15 2006-09-26 Asml Netherlands B.V. Lithographic apparatus
US20120048028A1 (en) * 2010-08-27 2012-03-01 Hitachi, Ltd. Apparatus for measuring a mechanical quantity
US8528414B2 (en) * 2010-08-27 2013-09-10 Hitachi, Ltd. Apparatus for measuring a mechanical quantity

Also Published As

Publication number Publication date
JPH0560672B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-09-02

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