JPS62158825U - - Google Patents

Info

Publication number
JPS62158825U
JPS62158825U JP4613986U JP4613986U JPS62158825U JP S62158825 U JPS62158825 U JP S62158825U JP 4613986 U JP4613986 U JP 4613986U JP 4613986 U JP4613986 U JP 4613986U JP S62158825 U JPS62158825 U JP S62158825U
Authority
JP
Japan
Prior art keywords
workpieces
arm
loading
unloading device
transport mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4613986U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4613986U priority Critical patent/JPS62158825U/ja
Publication of JPS62158825U publication Critical patent/JPS62158825U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Intermediate Stations On Conveyors (AREA)
  • Specific Conveyance Elements (AREA)
JP4613986U 1986-03-31 1986-03-31 Pending JPS62158825U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4613986U JPS62158825U (enrdf_load_stackoverflow) 1986-03-31 1986-03-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4613986U JPS62158825U (enrdf_load_stackoverflow) 1986-03-31 1986-03-31

Publications (1)

Publication Number Publication Date
JPS62158825U true JPS62158825U (enrdf_load_stackoverflow) 1987-10-08

Family

ID=30865529

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4613986U Pending JPS62158825U (enrdf_load_stackoverflow) 1986-03-31 1986-03-31

Country Status (1)

Country Link
JP (1) JPS62158825U (enrdf_load_stackoverflow)

Similar Documents

Publication Publication Date Title
JPS63211645A (ja) ウエハーを装着及び離脱する方法及び装置
JPS61284357A (ja) 被工作物のカセツト間移送方法と装置
JPH01251734A (ja) マルチチャンバ型ｃｖｄ装置
JPS62158825U (enrdf_load_stackoverflow)
JPH03244121A (ja) 縦型半導体製造装置
JP3795134B2 (ja) ウエハカセット搬送システム
JPS61220352A (ja) ウエハ−ロ−デイング装置
JPS62128523A (ja) ウエ−ハ収納ボ−トの熱処理炉への搬入出装置
JPH0238444Y2 (enrdf_load_stackoverflow)
JPH0237742A (ja) 半導体装置の製造装置
JP2506379B2 (ja) 搬送方法及び搬送装置
JP3434014B2 (ja) スタッカロボット
JPH02144333A (ja) 基板処理装置および基板搬送装置
JPS62291939A (ja) 半導体用浸漬処理装置
JPS61263503A (ja) 清浄化装置
JPS5966199A (ja) パツケ−ジ搬送機構
JPS62133546U (enrdf_load_stackoverflow)
JPS63250130A (ja) 半導体ウエハ処理装置
JPH0728962U (ja) 基板処理装置用のエンドステーション
JP3766450B2 (ja) 半導体基板加工設備における半導体基板の供給装置
JPS63314843A (ja) 縦形半導体製造装置におけるウェ−ハ搬送方法
JPH0249722Y2 (enrdf_load_stackoverflow)
JPH0439952A (ja) カセットストッカー
JPH02116736U (enrdf_load_stackoverflow)
JPS59101436U (ja) 半導体製造装置