JPS62156660A - Automatic exposing device - Google Patents

Abstract

PURPOSE:To decrease the floor area of a device and to make easy loading and unloading of a substrate by constituting the device in such a manner that a negative and substrate are exposed in a perpendicular state when the substrate is handled in the perpendicular state. CONSTITUTION:The 1st attraction plate 4 exists in a loading station 8 and attracts the substrate 1 to be going to be exposed by a vacuum while positioning the substrate by means of a positioning pin 15. The substrate 1 held on the 2nd attraction plate 5 is subjected simultaneously to an exposing process in an exposing station 9. A negative frame base 34 moves together with a negative frame 6 and negative 2 in a manner as to part from the plate 5 upon ending of the exposing. The plate 4 moves from the loading station 8 to the exposing station 9. The 2nd attraction plate 5 is then replaced with the 1st attraction plate 1. The light from a light source 3 for exposing is irradiated through the negative 2 on the substrate 1, by which one face of the substrate 1 is exposed. The substrate 1 is thus successively and automatically subjected to the exposing process by repeating the above-mentioned operation.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field 1] This invention relates to a method for manufacturing printed circuit boards, for example, in which light exposure technology is used to form a desired conductive pattern. This invention relates to an automatic exposure device used.

[Prior Art] For example, when applying light exposure technology to produce a printed circuit board, it is necessary to accurately align the substrate to become the printed circuit board and the original plate as a photomask. Conventionally, the alignment of these substrates and originals has generally been accomplished by passing pins through a plurality of positioning holes provided in each substrate.

A desired pattern is formed on the original plate used to carry out the light exposure process as described above, and on the other hand, a photosensitive material is coated on the substrate or a photosensitive film is attached to it. There is.

2. Description of the Related Art Conventionally, in an exposure apparatus for exposing a substrate, the substrate and the original plate are placed in a horizontal state, and the exposure process is normally performed with the exposure optical axis directed vertically. This is because it is easier to work by placing the substrate and original on a glass plate that serves as a horizontal reference, and this method was particularly suitable for manual exposure equipment. Automatic exposure apparatuses developed in recent years also basically adopt this horizontal method.

However, this horizontal method has the following problems.

[Problems to be Solved by the Invention] In recent years, the dimensions of substrates have been increasing in order to improve work efficiency. In other words, there is a tendency to try to obtain a larger number of products with one board.
Currently, it is processed up to a size of about 0x600mm.

If you try to process such a large substrate horizontally,
Regardless of whether it is a manual exposure device or an automatic exposure device, the floor space for installing the device is large1.
Automatic exposure equipment has many processing stations, such as loading the substrate, aligning the substrate and original, exposure processing, and unloading the substrate, so the equipment becomes larger and requires more floor space. Possessed.

Generally, exposure equipment is installed in a clean room, and the equipment cost is not cheap. Therefore, it is desirable that the devices and equipment installed inside such a lean room be small and do not take up much floor space.

In addition, the horizontal method has the problem that dust tends to adhere to the original plate and the substrate, which causes problems during exposure processing.

Therefore, the present invention can solve the above-mentioned problems, that is, the floor space for installing the device can be saved,
Moreover, it is an object of the present invention to provide an automatic exposure apparatus that can handle originals and substrates in a manner that prevents dust from adhering to them.

[Means for Solving Problems 1] The present invention provides an original plate having a plurality of corresponding positioning marks on the side to be exposed of a substrate having positioning marks consisting of a small number of positioning holes, and a positioning mark for both positions. The above-mentioned technical problem is solved as follows in an automatic exposure apparatus for self-helping exposing a substrate by irradiating light through an original plate and arranging the substrates in an aligned state.

That is, this automatic exposure apparatus has a loading station and an exposure station, and the substrate is moved between these stations while being vacuum-adsorbed to e % r ifi. This suction plate is for holding the substrate in a vertical position, and has positioning pins that fit into positioning holes in the substrate, and when the substrate is vacuumed, the positioning pins fit into the positioning holes. Further, the suction plate is provided with positioning holes for multiple rotations.

The original is held in a vertical position by an original frame at the exposure station. The original frame is held movably in the vertical, horizontal, and rotational directions by the original frame base. The original frame base also includes an exposure-side alignment rod that can fit into the alignment hole of the suction plate when in the exposure station. In addition, the original frame base is moved by the Z-direction movable gate structure.
The exposure side alignment rod is moved to fit into the alignment hole of the suction plate when it is in the exposure station, so that the original and the substrate are brought into close contact with each other or separated from each other.

This automatic exposure device (1) further includes an exposure light source that irradiates exposure light from the original side with the original and the substrate in close contact with each other.

Further, in order to align the suction plate at a predetermined position when it is at the loading station, a loading side positioning rod is provided so as to be fitable in the positioning hole of the suction plate. This loading side alignment rod is
The reciprocating drive structure causes the reciprocating movement in the @ line direction.

Furthermore, loading means are provided for removing the substrate held by the suction plate when it is at the loading station or for supplying the substrate to the suction plate.

[Operation] First, the substrate is carried by the loading means and brought to the front of the suction plate, and the substrate is vacuum suctioned to the suction plate while the positioning pins of the suction plate are inserted into the positioning holes of the substrate. At this time, the loading-side alignment rod is fitted into the alignment hole of the suction plate, thereby fixing the suction plate at a predetermined position in the loading station.

Next, when the loading side alignment rod is aligned, it is handled through the hole, and the suction plate moves to the exposure station while holding the substrate. Here, the original frame base is moved by the Z direction movement mechanism so as to move the original and the substrate ff1W. At this time, the exposure-side alignment rod fits into the alignment hole of the suction plate to maintain a constant positional relationship between the original frame and the suction plate. Note that the original frame is held movable in the vertical, horizontal, and rotational directions with respect to the original frame base;
The position of the original frame relative to the original frame base is as described above, where the original and the substrate are! (The positioning marks have been adjusted in advance so that they match each other.)

In the above-described state where the original plate and the substrate are in close contact with each other, exposure light is irradiated from the exposure light source, and the substrate is subjected to a desired exposure process.

When exposure is finished, the original frame base is moved by the Z-direction moving gate mechanism so as to separate the original from the substrate. Accordingly, the exposure side alignment rod can be handled through the alignment hole of the suction plate.

Next, the suction plate located at the exposure station is moved to the loading station, where the loading-side positioning rod again fits into the alignment hole of the suction plate to maintain the suction plate at a constant position. In this state, the exposed substrate and the substrate to be exposed are exchanged by the loading means.

Thereafter, the above-described operations are repeated.

[Example 1] Hereinafter, the present invention will be explained based on an example shown in the drawings.

FIG. 1 is a front view of an embodiment of the present invention, and FIG. 2 is a top view of the automatic exposure apparatus of FIG. The automatic exposure apparatus shown here is intended to align the substrate 1 and the original 2 and then expose the substrate 1 using the exposure light source 3. During such processing,
The substrate 1 is held by suction plates 4 and 5, respectively, and the original 2 is fixed to an original frame 6 with, for example, adhesive tape (not shown). Further, the exposure light source 3 is housed in a light source box 7. The light source box 7 is opened in the direction in which the light from the exposure light source 3 is directed.

This automatic exposure apparatus includes a loading station 8 and an exposure station 9 in connection with the movement of the substrate 1 and the suction plate 4.5. The exposure light [3] is located at the exposure station 9.

,! In order to hold one plate 1, two suction plates 4 and 5 are used in this embodiment. The structures of these suction plates 4.5 themselves are the same. The structure of one suction plate 4 is shown in an enlarged sectional view in FIG. The suction plate 4 is made of, for example, two plates made of acrylic resin or the like.
It has a structure in which the spacer frame 10 is sandwiched and bonded together. One side of this suction plate 4 is a suction surface 11 for the substrate 1.
It is said that The suction surface 11 is a flat surface, and a large number of suction holes 12 are provided therein. The space inside the suction plate 4 is
It is connected to a vacuum pump or exhaust blower 13.

The board 1 has a positioning hole 14 as a positioning mark. ! There are a couple of them. The positioning pins 15 are configured to fit into these positioning holes 14 . The positioning pin 15 is held on the suction plate 4 while being biased by a compression spring 16 in a direction protruding from the suction surface 11 . Note that the tip of the positioning pin 15 is connected to the positioning hole 1.
It has a tapered shape so that it can be easily inserted into the tube.

The suction plate 4 is further provided with a plurality of, for example two, alignment holes 17 and 18. These alignment holes 17 and 18 are preferably positioned so as to face each other in the diagonal direction of the suction plate 4.

The structure of the suction plate 5 is also substantially the same as that of the suction plate 41B. 1 and 2, the positioning pin 19 and positioning holes 20 and 21 of the suction plate 5 are illustrated.

Each suction plate 4.5 holds the substrate 1 in a vertical position by vacuum suction while positioning the substrate 1 with positioning pins 15.degree. 19. In this embodiment, each suction plate 4.5 moves vertically between the loading station 8 and the exposure station 9, as shown by arrows in FIG.

The original frame 6 holds the original 2 in a vertical position at the exposure station 9. As shown in the enlarged cross-sectional view of FIG. 4, the original frame 6 includes a frame portion 22, and this frame portion 22 holds a transparent plate 23 made of a flat glass plate or the like. The original plate 2 is fixed in direct contact with one side of the transparent plate 23 using, for example, an adhesive tape (not shown).

A plurality of positioning marks 24 are provided on the original plate 2 so as to correspond to the positioning holes 14 of the substrate 1. The positioning mark 24 is formed, for example, as a hole, as shown in FIG.

The substrate 1 is carried in and carried out by a conveyor 25 as shown in FIG. As shown in the front view in FIG. 5, the conveyor 25 has a plurality of m
Seats 26 are mounted on an endless belt 27 at equal intervals. The base plate 1 is inserted here when the catch seat 26 is in a horizontal position, as shown at the right end of FIG.
It is taken out when it is in the reverse horizontal position, as shown on the left side of the figure. In addition, the substrate 1 is placed in a vertical position on the horizontal portion of the endless belt 27, and the suction fingers 28 (FIGS. 1 and 2) move the unprocessed substrate onto the receiving seat 2.
6, and after processing is returned to the receiving seat 26. The suction fingers 28 move in the directions shown by the two arrows in FIG. 25.

In FIG. 1, the suction plate 4 is located at the loading station 8. In this way, in order to fix the suction plate 4 or 5 located at the loading station 8 at a predetermined position, the loading side alignment rod 30 and 31 are provided. These alignment rods 30.
31 are respectively connected to, for example, air cylinders 32 and 33 as reciprocating drive grooves, and are reciprocated in their respective axial directions. When the positioning rod 30 is in the protruding state, it fits into the positioning hole 17 or 20 of the suction plate 4 or 5. Further, when the other positioning rod 31 is in the protruding state, it fits into the positioning hole 18 or 21 of the suction plate 4 or 5.

These alignment rods 30,31 are preferably tapered at each tip.

The original frame 6 described above has a root, a
The ability to move in the lateral and rotational directions; and the two are held.

The original frame base 34 is also provided with exposure side alignment rods 35 and 3G. The original frame base 34 has a Z
It is configured to be movable by one directional movement (not shown). When the original frame base 3/'I moves toward the suction plate 4 or 5 in the exposure station 9, one of the alignment rods 35 moves through the alignment hole 1 of the suction plate 4 or 5.
7 or 20klfX and the other alignment rod 3
6 is the positioning hole 18 or 21 of the suction plate 4 or 5.
to fit. These alignment rods 35' and 36 also
Preferably, each tip is tapered.

As shown in FIG. 1, on the exposure light [3 side] of the original plate 2,
A monitor camera 37 is arranged. In this embodiment, a monitor camera 37 is placed inside the light source box 7. The monitor camera 37 is mounted on the XY table 38,
It is possible to move in the plane direction of the original 2. This monitor camera 37 is used to observe the alignment between the positioning mark 24 of the original plate 2 and the positioning hole 14 of the substrate 1 brought to the exposure station 9. Such observation is performed when a setup change is performed. This is done at an early stage.

That is, while observing the alignment state between the positioning mark 24 of the original plate 2 and the positioning hole 14 of the substrate 1 using the monitor camera 37, check the proper alignment state (as shown in FIG. Note that once the position of the original frame 6 is adjusted and the original 2 is brought to a predetermined position, the suction plate 4 or 5
While the substrate 1 is maintained at a constant position by the loading side alignment rods 30 and 31, the substrate 1 is loaded, positioned by the positioning pins 15, and sucked to the suction plate 4 or 5, and the substrate 1 is held in that state. Since the substrate 1 is brought to the exposure station 9, the exposure process can be performed with good reproducibility while the substrate 1 is properly aligned with the original 2.

Next, referring mainly to FIGS. 6 to 9, the operations achieved in this automatic exposure apparatus will be described. Note that FIGS. 6 to 9 show only essential parts of the automatic exposure apparatus shown in FIG. 1.

First, at the stage shown in FIG. 6, the first suction plate 4 is in the loading stage 8 and is vacuum suctioning the substrate to be exposed while positioning it with the positioning pin 14. At this time, the loading side alignment rods 30.31 are in a protruding state so as to fit into the alignment holes 17.18 of the suction plate 4, and thereby the suction plate 4 is kept at a constant position. There is.

Further, in the exposure station 9, a second suction plate 5
Exposure processing is performed on the plate 1 held at the same opening 1. That is, the original frame base 34 is moved in a direction closer to the suction plate 5 by the Z-direction movement groove, and the substrate 1 and the original 2 are in close contact with each other. Further, the exposure side alignment rods 35 and 36 are fitted into the alignment holes 20 and 21 of the n absorption plate 5, respectively, and the substrate 1
and original plate 2 are maintained in a properly aligned state. Then, light from the exposure light source 3 is irradiated from the original 2 side, and one side of the substrate 1 is exposed. Although not shown in FIG. 6, the monitor camera 37 has now been moved to a position where it does not interfere with the light from the exposure light source 3.

The exposure light source 3 emits, for example, ultraviolet rays, and the light from this is preferably parallel light in order to improve exposure accuracy.

Next, at the stage shown in FIG. Exposure of the substrate 1 held on the suction plate 5 of the JX2 has been completed, and the original frame base 34 is moved together with the original frame 6 and the original 2 by the Z direction movement mechanism 8 so as to be scraped from the suction plate 5. . As a result, the exposure side alignment rod 3 is moved from the alignment hole 20.21 of the second suction plate 5
5,36 are treated.

Further, in the loading station 8, the loading side alignment rod 30.31 is in a state where it is exposed from the alignment hole 17.18 of the first suction plate 4.

Next, a state as shown in FIG. 8 occurs. V, first
The suction plate 4 moves from the loading station 8 to the exposure station 9. And in place of this,
The second suction plate 5 is moved from the exposure station 9 to the loading station 8.

Next, a state as shown in FIG. 9 is realized.

First, paying attention to the exposure station 9, the original frame base 34 is moved in a direction approaching the first suction plate 4 by the Z direction movement mechanism 8, and the substrate 1 and original plate held on the first suction plate 4 are moved. The original plate 2 fixed to the frame 6 is brought into close contact. At this stage, as shown enlarged in Figure 3,
The positioning pins 15, which roughly protrude from the substrate 1, are received in the positioning marks 24 formed as holes in the original plate 2 shown enlarged in FIG. 4, but may even reach the transparent plate 23. . Even in such a case, the positioning pins 15 are retracted against the elasticity of the compression springs 16, so that the close contact between the substrate 1 and the original 2 is not disturbed. In addition, exposure-side alignment rods 35 and 36 held by the original frame base 34 are fitted into alignment holes 17 and 18 of the first suction plate 4, respectively, and the substrate 1, the original 2, etc. It has one properly aligned state. In this state, light from the exposure light source 3 is irradiated onto the substrate 1 through the original plate 2, and one side of the substrate 1 is exposed.

On the other hand, if we pay attention to the loading station 8, first, the loading side alignment rods 30 and 31 protrude, and when aligned, they fit into the holes 20 and 21 of the second suction plate 5. is maintained in place. Then, the exposed substrate 1 held on the second suction plate 5
is taken out by the suction fingers 28 and returned to the conveyor 25 shown in FIG. Note that when the suction fingers 28 take out the substrate 1 from the suction plate 5, the vacuum pump or exhaust blower 13 (third
(Fig.) is stopped. Then, the substrate 1 to be exposed next is taken out from the conveyor 25 by the suction fingers 28 and conveyed to the front of the second suction plate 5 at the loading station 8. At this time, it is preferable to keep the distance between the suction plate 5 and the substrate 1 as small as possible.

Then, the vacuum pump or exhaust blower 13 (FIG. 3) connected to the suction plate 5 is operated to apply negative pressure within the suction plate 5, thereby adsorbing the substrate 1 onto its suction surface.

At this point, one positioning pin is connected to the positioning hole 1 of the board 1.
4 is fitted. As a result, the suction fingers 28 return to the top of the conveyor 25.

Except that when the above operation is completed, the first suction plate 4 and the second suction plate 5 are exchanged.

The state is substantially the same as the stage shown in FIG. 6 described above. Therefore, by repeating the above-described operations, the substrate 1 is sequentially subjected to automatic exposure processing.

Note that, as described above, when the substrate 1 is taken out from the conveyor 25 by the suction finger 28, the substrate 1 is removed from the conveyor 25.
At the extraction position of 5, press 1 to move the left and right and top and bottom positions.
It is desirable that the position be determined in advance by one mechanism or the like. By doing this, the relative position of the substrate 1 taken out by the suction finger 28 to the suction finger 28 is always kept constant, and accordingly, the substrate 1 is kept at a constant position with respect to the suction plate 4 or 5. can be supplied more accurately.

FIGS. 70 and 71 show other examples of the original frame. The original plate frame 6a shown here is t between the original plate 2 and the substrate 1.
19 bfl has been added to improve ffi viewing performance.

The original frame 6a has a transparent film 39 stretched so as to cover the transparent plate 23, and the peripheral edges of the three transparent films are fixed to the frame portion 22 by a clamp member 40. This transparent film 39 has more flexibility than the rigid transparent plate 23. The frame portion 22 is arranged so as to communicate with the gap between the transparent plate 23 and the three transparent films.
A small hole 41 is provided in the. This small hole 41 is configured to selectively apply Ω pressure or positive pressure. The original plate 2 is pasted onto the outer surfaces of the three transparent films using adhesive tape or the like (not shown).

According to such a configuration, in order to improve the adhesion between the original 2 and the substrate 1 during exposure, for example, the adsorption plate 4 that adsorbs the substrate 1 and the original frame 6a holding the original 2 are made to look at each other. After pressing, if positive pressure is applied to the small hole 41, the air pressure in the gap between the transparent plate 23 and the three transparent films increases, and the three transparent films swell as shown in FIG.

Therefore, by further pressing the original 2 onto the substrate 1, the adhesion between the two is further increased.

Further, when the position of the original plate 2 is observed by the monitor camera 37, negative pressure is applied to the small hole 41, and the transparent plate 2 is
3 and the transparent film 39, the transparent film 39 will come into close contact with the transparent plate 23, and the original plate 2 will be in a flat state.

Since the three transparent films are bulged under pressure while the original frame 6a is pressed against the suction plate 4 or 5, the bulge is within Q, 2 mm and has little effect on other accuracy.

Further modifications of the embodiments described above are possible within the scope of the invention.

For example, a monitor camera 37 is provided in the light source box 7 in order to monitor the alignment between the positioning mark 24 of the original plate 2 and the positioning hole 14 of the substrate 1 at the initial setting stage. That is, it is necessary to see the alignment between the positioning mark 24 and the positioning hole 14 from between the original plate 2 and the exposure light source 3, and placing the observer's eye directly here will prevent the existence of the light source box 7. Since this is not possible, a monitor camera 37 is provided. However, if, for example, a suitable wall of the light source box 7 can be opened and it is possible to place the observer's eyes directly inside the light source box 7, it is not necessary to provide the monitor camera 37.

Further, although the positioning mark 24 of the original plate 2 is formed as a hole, it is not limited to a hole, and may be a mark of a positioning mark.

In the case of the original plate 2, a predetermined exposure pattern is formed here, but it is also easy to attach positioning marks in the same manner as this pattern.

Further, in the embodiment described above, in order to hold the substrate 1,
Two suction plates 4 and 5 were used and were configured to alternately move back and forth between loading station 8 and exposure station 9. With this configuration, while the substrate 1 is being removed by four suction plates 4 or 5 on one side, the substrate 1 can be exposed on the other suction plate 5 or 4. Therefore, since multiple operations can be performed simultaneously, there is an advantage that higher processing capacity can be expected. However, if such advantages are not desired, each operation may be performed in series using only one suction plate.

Additionally, in the illustrated embodiment, loading station 8
and the exposure station 9 are arranged vertically, but the vertical relationship may be reversed, or they may be arranged side by side, and the suction plate moves laterally to move between the loading station and the exposure station. It may be moved.

Further, the present invention can be applied to the case where it is necessary to expose both sides of J3ffi. In this case, for the series of conveyors 25 shown in FIG. 2, an additional one may be provided in which the components from the exposure light source 3 to the suction plate 4.5 are arranged in the reverse order. In other words, as shown in three such examples in FIGS. 12, 13, and 14, while the substrate 1 whose one side has been exposed is transported by the conveyor 25, the other side is exposed. Just take it out and expose the other side.

In FIG. 12, 66 components are arranged in two phases on one side of a series of conveyors 25, extending from the exposure light source 3 to the suction plates 4.5, so that the suction plates 4.5 are placed back to back. Arranged.

In FIG. 13, on one side of the series of conveyors 25,
For exposure light! The components from 3 to suction plate 4.5 are 2.
Although they are arranged in pairs, the exposure light sources 3 are arranged back to back.

In FIG. 14, on both sides of the conveyor 25, the components from the exposure light 'lQ3 to the suction plate 4.5 are arranged in opposite directions.

[Effects of the Invention] As described above, according to the present invention, the substrate has g! Since it is handled vertically and the original plate and substrate are exposed vertically, the floor space of the equipment can be reduced, and loading and ase-loading of early plates can be facilitated. .

Further, since the original plate and the substrate are in a vertical position, there is an effect that dust, which becomes a problem during exposure, is less likely to adhere to the original plate and the substrate.

Due to these <> effects, it is possible to further reduce the cost of the apparatus, and moreover, it is possible to provide a highly reliable self-exposure apparatus.

[Brief explanation of drawings]

FIG. 1 is a front view of an embodiment of the present invention. FIG. 2 is a diagram showing the automatic exposure apparatus of FIG. 1 from the -F plane. FIG. 3 is an enlarged cross-sectional view of the suction plate 4 shown in FIGS. 1 and 2, viewed from the front. Fourth
The figure is an enlarged cross-sectional view of the original frame 6 shown in FIGS. 1 and 2, viewed from the front. FIG. 5 is a front view of the conveyor 25 of FIG. 2. Figures 6 to 9
The figures are schematic diagrams illustrating the operations of the automatic exposure apparatus of FIGS. 1 and 2 sequentially from the front, and showing only the main parts. FIGS. 10 and 11 [Z are sectional views showing another series of the original frame. FIGS. 12, 13 and 14 are top views of further embodiments of the pond of the present invention. In the figure, 1 is a substrate, 2 is an original plate, 3 is an exposure light source, 4
．． 5 is a suction plate, 6.6a is an original frame, 8 is a [1-ding station, 9 is an exposure station controller, 11 is a sucker,
12 is a suction hole, 13 is a vacuum pump or exhaust blower, 1
4 is a positioning hole, 15゜19 is a positioning pin, 16 is a spring, 17, 18゜20.21 is a positioning hole, 24 is a positioning mark, 25 is a conveyor, 28 is a suction finger,
30° 31 is the loading side alignment rod, 32° 33 is the air cylinder, 34 is the original frame base, 35° 36
is the rod if the exposure side is aligned, 37 is the monitor camera, 3
9 is a transparent film, and 41 is a small hole. Figure 2 Figure 6 Figure 7 Figure 8 Figure 9

Claims (6)

[Claims] (1) An original plate having a plurality of corresponding positioning marks is placed on the side to be exposed of a substrate having a positioning mark consisting of a plurality of positioning holes, with both positioning marks aligned, and the original plate is An automatic exposure device for automatically exposing a substrate by irradiating light through the substrate, the device includes a loading station and an exposure station, and is used to hold the substrate in a vertical position, and includes a positioning hole in the substrate. The substrate is vacuum-adsorbed while the positioning pin is fitted into the positioning hole, and the substrate is moved between the loading station and the exposure station, and the substrate is moved through a plurality of positioning holes. a suction plate, an original frame that holds the original in a vertical state at the exposure station, and an original frame that holds the original frame movably in vertical, horizontal, and rotational directions, and the suction plate when in the exposure station. an original frame base having an exposure-side alignment rod that can be fitted into the alignment hole of the exposure station; while fitting the exposure-side alignment rod into the alignment hole of the suction plate when in the exposure station; a Z-direction moving mechanism for moving the original frame base so that the original and the substrate are in close contact with each other or separated; and irradiating exposure light from the original with the original and the substrate in close contact with each other. a loading side positioning rod that can be fitted into the positioning hole of the suction plate when it is in the loading station; and a reciprocating rod for reciprocating the loading side positioning rod in its axial direction. An automatic exposure apparatus comprising: a drive mechanism; and a loading means for taking out a substrate held on the suction plate or supplying a substrate to the suction plate when it is in the loading station. (2) the suction plate includes first and second suction plates;
When the first suction plate is in the exposure station, the second suction plate
A suction plate is located at the loading station and performs loading and unloading of the substrate, and in the next step, the first suction plate and the second suction plate are
2. The automatic exposure apparatus according to claim 1, wherein the automatic exposure apparatus is controlled so that the suction plates are exchanged and these states are repeated. (3) The original frame has a double structure of a relatively rigid transparent plate and a relatively flexible transparent film, and the air pressure in the gap between the transparent plate and the transparent film is 3. The automatic exposure apparatus according to claim 1, wherein the transparent film is configured to swell by increasing the amount of the transparent film, and the original plate is fixed on the outer surface of the transparent film. (4) The automatic according to any one of claims 1 to 3, wherein the positioning pin provided on the suction plate is held on the suction plate in a state where it is urged in a protruding direction by a spring. Exposure equipment. (5) further comprising a monitor camera on the exposure light source side of the original for observing the alignment between the positioning marks on the original and the positioning holes on the substrate brought to the exposure station; An automatic exposure apparatus according to any one of claims 1 to 4. (6) Two sets of automatic exposure devices arranged in opposite directions were arranged along a series of conveyors that conveyed a plurality of substrates in a vertical position, and were configured to expose both sides of the substrates. , an automatic exposure apparatus according to any one of claims 1 to 5.