KR20160050391A - Lamination apparatus - Google Patents

Lamination apparatus Download PDF

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Publication number
KR20160050391A
KR20160050391A KR1020140148436A KR20140148436A KR20160050391A KR 20160050391 A KR20160050391 A KR 20160050391A KR 1020140148436 A KR1020140148436 A KR 1020140148436A KR 20140148436 A KR20140148436 A KR 20140148436A KR 20160050391 A KR20160050391 A KR 20160050391A
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KR
South Korea
Prior art keywords
chamber
unit
adhesion
lapping
body part
Prior art date
Application number
KR1020140148436A
Other languages
Korean (ko)
Inventor
최문기
강혜종
박종운
김이규
Original Assignee
주식회사 씨엘디
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 씨엘디 filed Critical 주식회사 씨엘디
Priority to KR1020140148436A priority Critical patent/KR20160050391A/en
Publication of KR20160050391A publication Critical patent/KR20160050391A/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00Gripping heads and other end effectors
    • B25J15/06Gripping heads and other end effectors with vacuum or magnetic holding means
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90Devices for picking-up and depositing articles or materials
    • B65G47/91Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment

Abstract

According to the present invention, a bonding system is disclosed. According to the present invention, the bonding system comprises: a first bonding chamber configured to bond a first member and a second member; a second bonding chamber arranged to be separated from the first bonding chamber and configured to bond the first member and the second member; and a transfer unit arranged on a side of the first bonding chamber and the second bonding chamber and configured to transfer and arrange the first member and the second member to and in at least one of the first bonding chamber and the second bonding chamber.

Description

[0001] Lamination apparatus [0002]

The present invention relates to a system, and more particularly to a cementation system.

In general, various methods can be used when attaching each member. For example, they can be attached together through rollers or through a press. At this time, in order to supply the respective members, an operator may carry the members through a tray or the like and supply them manually.

In this case, the position of each member may not be properly aligned, resulting in defects after the cementation, or the manufacturing apparatus may fail due to fragmentation of the product. Therefore, various methods have been attempted to solve the above problems.

Embodiments of the present invention seek to provide a cementation system.

According to an aspect of the present invention, there is provided a method of manufacturing a semiconductor device, including: a first adhesion chamber for bonding a first member and a second member; a second adhesion chamber disposed apart from the first adhesion chamber to bond the first member and the second member; And a transfer unit arranged on the side of the first adhesion chamber and the second adhesion chamber for transferring and arranging the first member and the second member in at least one of the first adhesion chamber and the second adhesion chamber, System can be provided.

In this embodiment, the apparatus may further include a pre-alignment unit arranged to be spaced apart from the first adhesion chamber and the second adhesion chamber to pre-align the first member or the second member.

In this embodiment, the apparatus may further include a photographing unit installed to be spaced apart from at least one of the first adhesion chamber and the second adhesion chamber to photograph the positions of the first member and the second member.

In the present embodiment, the transfer unit may include a guide portion disposed in parallel with the first adhesion chamber and the second adhesion chamber, a moving portion provided on the guide portion and linearly moving in the longitudinal direction of the guide portion, An arm portion rotatably mounted on the moving portion, and a suction portion provided on the arm portion to suction the first member or the second member.

In the present embodiment, the adsorption unit may include a length variable unit that is provided to vary the length of the arm unit, and a vacuum unit that is installed on the length variable unit and adsorbs the first member or the second member .

In this embodiment, the first and second adsorption chambers may include a first member installed to be spaced apart from the second adsorption chamber, and a carry-out unit transferring the second member.

In this embodiment, at least one of the first welding chamber and the second welding chamber is formed to be foldable so that the first member and the second member can be joined together by folding.

Embodiments of the present invention can improve user convenience and work efficiency.

1 is a conceptual diagram showing a cementing system according to an embodiment of the present invention.
FIG. 2 is a conceptual view showing the adsorption unit shown in FIG. 1. FIG.
3 is an operation diagram showing the operation state of the adsorption unit shown in Fig.
4 is a block diagram showing the control flow of the adhesion system shown in Fig.

BRIEF DESCRIPTION OF THE DRAWINGS The present invention will become more apparent from the following detailed description taken in conjunction with the accompanying drawings, in which: FIG. The present invention may, however, be embodied in many different forms and should not be construed as being limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. Is provided to fully convey the scope of the invention to those skilled in the art, and the invention is only defined by the scope of the claims. It is to be understood that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. In the present specification, the singular form includes plural forms unless otherwise specified in the specification. It is noted that the terms "comprises" and / or "comprising" used in the specification are intended to be inclusive in a manner similar to the components, steps, operations, and / Or additions. The terms first, second, etc. may be used to describe various elements, but the elements should not be limited by terms. Terms are used only for the purpose of distinguishing one component from another.

1 is a conceptual diagram showing a cementing system according to an embodiment of the present invention. FIG. 2 is a conceptual view showing the adsorption unit shown in FIG. 1. FIG. 3 is an operation diagram showing the operation state of the adsorption unit shown in Fig. 4 is a block diagram showing the control flow of the adhesion system shown in Fig.

1 through 4, the adhesion system 100 includes a first adhesion chamber 110, a second adhesion chamber 120, a transfer unit 130, a pre-alignment unit 140, a photographing unit 150, A carry-out unit 160, and a control unit 180. [

The first adhesion chamber 110 and the second adhesion chamber 120 may be disposed side by side. That is, the first adhesion chamber 110 and the second adhesion chamber 120 are disposed adjacent to each other and may be spaced apart from each other by a predetermined distance. At this time, the first member L and the second member M may be respectively disposed in the first adhesion chamber 110 and the second adhesion chamber 120, and the first member L and the second member M M) can be cemented together.

The first member L and the second member M may be formed of various materials. Specifically, at least one of the first member L and the second member M may be a rigid material such as glass or a flexible material such as a plastic or a film. For example, at least one of the first member L and the second member M may be a member such as a liquid crystal display module, a touch screen module, a polarizing film, a protective film, a cover window, or the like. Hereinafter, the first member L is a liquid crystal display module and the second member M is a touch screen module for convenience of explanation.

The first adhesion chamber 110 and the second adhesion chamber 120 may be formed of the same or similar materials. Hereinafter, the first laminating chamber 110 will be described in detail for convenience of explanation.

The first lapping chamber 110 may include a first body part 111 and a second body part 112. At this time, the first body part 111 and the second body part 112 may be connected so as to be rotatable with each other. One of the first member L and the second member M is seated on the first body part 111 and the first member L or the second member M is seated on the second body part 112. [ The other one can be seated.

The first lapping chamber 110 connects the first body part 111 and the second body part 112 and rotates at least one of the first body part 111 and the second body part 112, And a first lap joint driving unit 113 for lapping the member L and the second member M together. The first and second body parts 111 and 112 are connected by a hinge so that the first body part 111 and the second body part 112 are connected to each other by driving the cylinder. At least one of the two body portions 112 may be rotated. The first lap joint driving part 113 may be a motor connected to at least one of the first body part 111 and the second body part 112. The first lap joint driving part 113 may include a first body part 111, At least one of the two body portions 112 may be rotated.

The second lapping chamber 120 may include a third body part 121, a fourth body part 122 and a second lapping drive part 123 similar to the first lapping chamber 110. At this time, the third body part 121, the fourth body part 122, and the second ligation drive part 123 are connected to the first body part 111, the second body part 112 and the first attachment / 113, the detailed description thereof will be omitted.

Meanwhile, the transfer unit 130 may be disposed on one side of the first adhesion chamber 110 and the second adhesion chamber 120. At this time, the first adhesion chamber 110 and the second adhesion chamber 120 may be spaced apart from each other along the longitudinal direction of the transfer unit 130.

The transfer unit 130 may include a guide portion 131, a moving portion 132, an arm portion 133, and a suction portion 134. The guide part 131 may be formed in various shapes. For example, the guide part 131 may be formed in a rail shape or a general bar shape. In addition, the guide part 131 may be a linear motion guide.

The moving part 132 is seated on the guide part 131 and can linearly move the guide part 131. The moving unit 132 includes a moving block 132a that is installed on the guide unit 131 and linearly moves the guide unit 131 and a linear block 132a that is installed on the moving block 132a and linearly moves the moving block 132a. And a driving unit 132b. In this case, the linear driving unit 132b may be a linear motor, or may be a general motor as another embodiment. In particular, when the linear driving part 132b is a general motor, the guide part 131 may be formed in a rack gear shape and may be engaged with a gear provided in the linear driving part 132b to move the moving block 132a when the motor is driven.

The arm 133 may be rotatably mounted on the moving part 132. The adsorption unit 134 may be installed on the arm 133 to adsorb the first member L or the second member M. [ A plurality of the adsorption units 134 may be provided. At this time, the plurality of adsorption units 134 can adsorb and transport the first member L or the second member M. [

The absorption section 134 includes a length varying section 134a provided to vary the length of the arm section 133 and a length varying section 134b disposed on the length varying section 134a for adsorbing the first member L or the second member M And a vacuum chamber 134b.

At this time, the length variable portion 134a is formed in a cylinder shape and can be variable in length by pneumatic pressure or hydraulic pressure. In another embodiment, the length-variable portion 134a includes a rack gear, a motor, and a gear so that the length of the variable portion 134a can be varied according to the rotation of the motor.

The vacuum chamber 134b is provided with a suction pad 134b-1 formed of an elastic material such as silicone or rubber, and a suction pump 134b-1 sucking the suction pad 134b- 2). At this time, the absorption pad 134b-1 may be connected to the length variable portion 134a.

On the other hand, the prealigning unit 140 can prevent the first member L or the second member M from moving in the first joining chamber 110 or the second joining chamber 120 before the first member L or the second member M is seated in the first joining chamber 110 or the second joining chamber 120 The position of the second member M can be aligned.

At this time, the pre-alignment unit 140 includes a stage 141 on which the first member L or the second member M is seated, a block 142 provided on one side of the stage 141, L or the second member M to the block 142 side. At this time, the block 142 and the stage 141 may be vertically connected to each other. In particular, the block 142 may be disposed vertically above the stage 141. Further, the block 142 may be formed on two sides of the stage 141. At this time, the blocks 142 formed on two sides of the stage 141 may be connected to each other.

The photographing unit 150 may include a first photographing unit 151 for photographing at least one of the first member L and the second member M in the first adhesion chamber 110. [ The photographing unit 150 may include a second photographing unit 152 for photographing at least one of the first member L and the second member M in the second adhesion chamber 120. At this time, the first photographing unit 151 and the second photographing unit 152 may separately include a camera for photographing the first member L and the second member M, respectively.

The carry-out unit 160 may be disposed adjacent to the transfer unit 130. [ At this time, the carry-out unit 160 can take out the first member L and the second member M which are joined together to the outside. The carry-out unit 160 may be formed in various forms. For example, the carry-out unit 160 may be formed in the form of a conveyor belt. Also, the carry-out unit 160 may be formed in the form of a robot arm. Hereinafter, for the sake of convenience of explanation, the case where the take-out unit 160 is formed as a conveyor belt will be described in detail.

The adhesion system 100 may include a control unit 180 in addition to the above configuration. At this time, the control unit 180 can control each component, and the control unit 180 can be formed in various forms such as a personal computer, a circuit board, a portable terminal, a notebook, and the like.

When the first member L and the second member M are attached to each other, the first member L and the second member M are seated on the tray T Can supply.

When the tray T is supplied as described above, the control unit 180 controls the transfer unit 130 to suck the first member L or the second member M and transfer the same to the pre-alignment unit 140 . Specifically, the control unit 180 operates the linear driving unit 132b to move the moving block 132a, and controls the adsorption unit 134 to adsorb the first member L or the second member M have. At this time, the control unit 180 can lower the adsorption pad 134b-1 by contacting the first member L or the second member M by varying the length of the length variable portion 134a. Then, the control unit 180 can actuate the suction pump 134b-2 to suck the first member L or the second member M. [

The control unit 180 may then control the transfer unit 130 to place the first member L or the second member M in the prealignment unit 140. [ At this time, the first member L or the second member M adsorbed as described above may be seated on the stage 141 of the prealignment unit 140. The control unit 180 controls the force applying unit 143 to apply the force to the first member L or the second member M to the block 142 to apply the force to the first member L or the second member M Pre-align can be performed.

Thereafter, the lapping system 100 includes a separate cleaning unit 170, such as dry cleaning such as plasma cleaning, wet cleaning, air jetting, etc., to clean at least one of the first member L and the second member M . At this time, the cleaning unit 170 is the same as or similar to that used in plasma cleaning, wet cleaning, dry cleaning, etc. used in a general display field, and so a detailed description thereof will be omitted.

After the cleaning is completed as described above, the control unit 180 again sucks the first member L or the second member M through the adsorption unit 134, and then, from the stage 141 to the first adhesion chamber 110 The transfer unit 130 can be controlled to transfer the wafer W to the transfer unit 130.

The above method may be performed until the first member L and the second member M are seated in the first and second adhesion chambers 110 and 120, respectively. Specifically, after the transfer unit 130 completes transfer of the first member L to the first and second adhesion chambers 110 and 120, the second member M is transferred to the first and second adhesion chambers 110 and 120, And can be transferred to the adhesion chamber 110 and the second adhesion chamber 120. At this time, one of the first member L and the second member M may be disposed on the first body part 111 and the third body part 121, respectively, and the first member L or the second member M, (M) may be disposed in the second body part 112 and the fourth body part 122, respectively.

When the first member L and the second member M are seated as described above, the first body part 111 through the fourth body part 122 are connected to each other through the vacuum, the electrostatic chuck, L and the second member M can be fixed.

When the first member L and the second member M are seated in the first and second adhesion chambers 110 and 120 as described above, the image capturing unit 150 is disposed between the first member L and the second member The position of the second member M can be photographed and transmitted to the control unit 180. [ The control unit 180 can determine whether the position of at least one of the first member L and the second member M is correct by comparing the photographed image at the photographing unit 150 with a predetermined image. At this time, if it is determined that the position of at least one of the first member L and the second member M is not correct, the control unit 180 moves the arm 133 to move the first member L and the second member M The position of at least one of the members M can be precisely aligned.

When the first member L and the second member M are mounted as described above, the first lap joint driving part 113 and the second lap joint driving part 123 are operated to move the first body part 111, The first member L and the second member M can be attached to each other by bringing the third body part 121 and the fourth body part 122 into contact with each other so that the first body part 121 and the second body part 112 are in contact with each other, . At this time, an adhesive material may exist between the first member L and the second member M. [

The above operations may be sequentially performed in the first adhesion chamber 110 and the second adhesion chamber 120 or may be performed simultaneously. Hereinafter, for convenience of explanation, the first and second adhesion chambers 110 and 120 simultaneously bond the first member L and the second member M will be described in detail.

When the first member L and the second member M are attached to each other as described above, the control unit 180 moves the first body part 111 and the second body part 112 away from each other, 121 and the fourth body part 122 may be spaced apart from each other. At this time, the adhesive force between the first body part 111 and one of the first member L or the second member M, or the adhesive force between the second body part 112 and the first member L or the second member M, The adhesion between the first member L and the second member M is formed to be smaller than the adhesion force of the adhesive material between the first member L and the second member M so that the first member L and the second member M, (111) or the second body part (112). In addition, the first member L and the second member M, which are the same or similar to each other, may be disposed in the third body part 121 and the fourth body part 122 as well.

The control unit 180 may control the transfer unit 130 to transfer the first member L and the second member M which have been joined together to the transfer unit 160. [ At this time, the method of transferring the first member L and the second member M to which the transfer unit 130 is attached is the same as or similar to that described above, and thus a detailed description thereof will be omitted.

When the above process is completed, the operator can take out the first member L and the second member M which have been joined together by discriminating or wrapping the defect.

Therefore, the adhesion system 100 can shorten the manufacturing time and manufacturing cost by supplying and laminating the first member L and the second member M in an in-line form.

In addition, the adhesion system 100 can minimize manufacturing defects by automating the entire process when the first member L and the second member M are attached together.

In addition, the laminating system 100 can be installed in a narrow space by transferring the first member L and the second member M through a simple structure.

Although the present invention has been described in connection with the above-mentioned preferred embodiments, it is possible to make various modifications and variations without departing from the spirit and scope of the invention. Accordingly, it is intended that the appended claims cover all such modifications and variations as fall within the true spirit of the invention.

100: Adhesion system
110: first lapping chamber
120: second lapping chamber
130:
131: guide portion
132:
133:
134:
140: Prealign unit
150: shooting unit
160: carry-out unit
170: Cleaning unit
180: control unit

Claims (9)

A first lapping chamber for lapping the first member and the second member;
A second lapping chamber spaced from the first lapping chamber for lapping the first and second members;
And a transfer unit which is disposed on the side surfaces of the first adhesion chamber and the second adhesion chamber and transfers the first member and the second member to at least one of the first adhesion chamber and the second adhesion chamber Lt; / RTI >
The method according to claim 1,
And a pre-alignment unit arranged to be spaced apart from the first adhesion chamber and the second adhesion chamber to pre-align the first member or the second member.
The method according to claim 1,
And a photographing unit installed apart from at least one of the first adhesion chamber and the second adhesion chamber to photograph the positions of the first member and the second member.
The method according to claim 1,
The transfer unit
A guiding part disposed parallel to the first welding chamber and the second welding chamber, respectively;
A moving part installed on the guide part and linearly moving in the longitudinal direction of the guide part;
An arm portion rotatably installed on the moving portion; And
And a suction part installed on the arm part to suction the first member or the second member.
5. The method of claim 4,
The adsorption unit
A length varying part installed on the arm part so as to be variable in length; And
And a vacuuming unit installed at the length varying unit to absorb the first member or the second member.
6. The method of claim 5,
The vacuum unit may include:
An adsorption pad provided on the length variable portion; And
And a suction pump connected to the adsorption pad to form a vacuum inside the adsorption pad.
The method according to claim 6,
Wherein the adsorption pad is formed of an elastic material.
The method according to claim 1,
And a carry-out unit for transferring the first member and the second member which are installed so as to be spaced apart from the second adsorption chamber.
The method according to claim 1,
Wherein at least one of the first adhesion chamber and the second adhesion chamber is foldable so that the first member and the second member are bonded together by folding.
KR1020140148436A 2014-10-29 2014-10-29 Lamination apparatus KR20160050391A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020140148436A KR20160050391A (en) 2014-10-29 2014-10-29 Lamination apparatus

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Application Number Priority Date Filing Date Title
KR1020140148436A KR20160050391A (en) 2014-10-29 2014-10-29 Lamination apparatus

Publications (1)

Publication Number Publication Date
KR20160050391A true KR20160050391A (en) 2016-05-11

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110775615A (en) * 2019-11-08 2020-02-11 徐州曼特电子有限公司 Grabbing method for parts
CN110803516A (en) * 2019-11-08 2020-02-18 徐州康博智能控制仪表有限公司 Grabbing system for parts
KR20210154045A (en) * 2020-06-11 2021-12-20 코스맥스 주식회사 Insertion auxiliary device for all-in-one packing

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110775615A (en) * 2019-11-08 2020-02-11 徐州曼特电子有限公司 Grabbing method for parts
CN110803516A (en) * 2019-11-08 2020-02-18 徐州康博智能控制仪表有限公司 Grabbing system for parts
KR20210154045A (en) * 2020-06-11 2021-12-20 코스맥스 주식회사 Insertion auxiliary device for all-in-one packing

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