JPS6215541Y2 - - Google Patents

Info

Publication number
JPS6215541Y2
JPS6215541Y2 JP1982169545U JP16954582U JPS6215541Y2 JP S6215541 Y2 JPS6215541 Y2 JP S6215541Y2 JP 1982169545 U JP1982169545 U JP 1982169545U JP 16954582 U JP16954582 U JP 16954582U JP S6215541 Y2 JPS6215541 Y2 JP S6215541Y2
Authority
JP
Japan
Prior art keywords
bearing
sliding
air
sliding shaft
fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982169545U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5972316U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16954582U priority Critical patent/JPS5972316U/ja
Publication of JPS5972316U publication Critical patent/JPS5972316U/ja
Application granted granted Critical
Publication of JPS6215541Y2 publication Critical patent/JPS6215541Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
JP16954582U 1982-11-09 1982-11-09 静圧軸受 Granted JPS5972316U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16954582U JPS5972316U (ja) 1982-11-09 1982-11-09 静圧軸受

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16954582U JPS5972316U (ja) 1982-11-09 1982-11-09 静圧軸受

Publications (2)

Publication Number Publication Date
JPS5972316U JPS5972316U (ja) 1984-05-16
JPS6215541Y2 true JPS6215541Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-04-20

Family

ID=30370373

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16954582U Granted JPS5972316U (ja) 1982-11-09 1982-11-09 静圧軸受

Country Status (1)

Country Link
JP (1) JPS5972316U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005331048A (ja) * 2004-05-20 2005-12-02 Imv Corp 防振ｘ−ｙテーブル

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6210486Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1978-01-13 1987-03-12
JPS55126117A (en) * 1979-03-22 1980-09-29 Hitachi Ltd Main rotary shaft unit

Also Published As

Publication number Publication date
JPS5972316U (ja) 1984-05-16

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