JPS62151730U - - Google Patents
Info
- Publication number
- JPS62151730U JPS62151730U JP3921186U JP3921186U JPS62151730U JP S62151730 U JPS62151730 U JP S62151730U JP 3921186 U JP3921186 U JP 3921186U JP 3921186 U JP3921186 U JP 3921186U JP S62151730 U JPS62151730 U JP S62151730U
- Authority
- JP
- Japan
- Prior art keywords
- source
- vapor phase
- reaction tube
- phase growth
- gaas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 2
- 239000007789 gas Substances 0.000 claims 3
- 238000001947 vapour-phase growth Methods 0.000 claims 3
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims 2
- 239000012159 carrier gas Substances 0.000 claims 2
- 239000012535 impurity Substances 0.000 claims 2
- 239000013078 crystal Substances 0.000 claims 1
- 238000009434 installation Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3921186U JPS62151730U (cs) | 1986-03-18 | 1986-03-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3921186U JPS62151730U (cs) | 1986-03-18 | 1986-03-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62151730U true JPS62151730U (cs) | 1987-09-26 |
Family
ID=30852174
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3921186U Pending JPS62151730U (cs) | 1986-03-18 | 1986-03-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62151730U (cs) |
-
1986
- 1986-03-18 JP JP3921186U patent/JPS62151730U/ja active Pending
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