JPH01125369U - - Google Patents
Info
- Publication number
- JPH01125369U JPH01125369U JP1987288U JP1987288U JPH01125369U JP H01125369 U JPH01125369 U JP H01125369U JP 1987288 U JP1987288 U JP 1987288U JP 1987288 U JP1987288 U JP 1987288U JP H01125369 U JPH01125369 U JP H01125369U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- reaction tube
- exhaust device
- gate valve
- raw material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006243 chemical reaction Methods 0.000 claims description 8
- 239000013078 crystal Substances 0.000 claims description 2
- 238000000197 pyrolysis Methods 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- 239000012808 vapor phase Substances 0.000 claims description 2
- 239000002994 raw material Substances 0.000 claims 2
- 125000002524 organometallic group Chemical group 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987288U JPH01125369U (cs) | 1988-02-17 | 1988-02-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987288U JPH01125369U (cs) | 1988-02-17 | 1988-02-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01125369U true JPH01125369U (cs) | 1989-08-25 |
Family
ID=31235767
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987288U Pending JPH01125369U (cs) | 1988-02-17 | 1988-02-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01125369U (cs) |
-
1988
- 1988-02-17 JP JP1987288U patent/JPH01125369U/ja active Pending
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