JPH0455131U - - Google Patents
Info
- Publication number
- JPH0455131U JPH0455131U JP9682190U JP9682190U JPH0455131U JP H0455131 U JPH0455131 U JP H0455131U JP 9682190 U JP9682190 U JP 9682190U JP 9682190 U JP9682190 U JP 9682190U JP H0455131 U JPH0455131 U JP H0455131U
- Authority
- JP
- Japan
- Prior art keywords
- manifold
- taken out
- epitaxial growth
- growth apparatus
- melt
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 claims description 2
- 150000004678 hydrides Chemical class 0.000 claims description 2
- 150000001875 compounds Chemical class 0.000 claims 1
- 239000000155 melt Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000012808 vapor phase Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9682190U JPH0455131U (cs) | 1990-09-13 | 1990-09-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9682190U JPH0455131U (cs) | 1990-09-13 | 1990-09-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0455131U true JPH0455131U (cs) | 1992-05-12 |
Family
ID=31836659
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9682190U Pending JPH0455131U (cs) | 1990-09-13 | 1990-09-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0455131U (cs) |
-
1990
- 1990-09-13 JP JP9682190U patent/JPH0455131U/ja active Pending
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