JPS6365215U - - Google Patents
Info
- Publication number
- JPS6365215U JPS6365215U JP15918386U JP15918386U JPS6365215U JP S6365215 U JPS6365215 U JP S6365215U JP 15918386 U JP15918386 U JP 15918386U JP 15918386 U JP15918386 U JP 15918386U JP S6365215 U JPS6365215 U JP S6365215U
- Authority
- JP
- Japan
- Prior art keywords
- vapor phase
- phase growth
- growth apparatus
- ascl
- rotating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 2
- 238000001947 vapour-phase growth Methods 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15918386U JPS6365215U (cs) | 1986-10-17 | 1986-10-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15918386U JPS6365215U (cs) | 1986-10-17 | 1986-10-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6365215U true JPS6365215U (cs) | 1988-04-30 |
Family
ID=31083375
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15918386U Pending JPS6365215U (cs) | 1986-10-17 | 1986-10-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6365215U (cs) |
-
1986
- 1986-10-17 JP JP15918386U patent/JPS6365215U/ja active Pending
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