JPS6264770U - - Google Patents
Info
- Publication number
- JPS6264770U JPS6264770U JP15382585U JP15382585U JPS6264770U JP S6264770 U JPS6264770 U JP S6264770U JP 15382585 U JP15382585 U JP 15382585U JP 15382585 U JP15382585 U JP 15382585U JP S6264770 U JPS6264770 U JP S6264770U
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- film forming
- transparent body
- substrate
- forming apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims 3
- 239000010408 film Substances 0.000 claims 1
- 239000007789 gas Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15382585U JPS6264770U (cs) | 1985-10-08 | 1985-10-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15382585U JPS6264770U (cs) | 1985-10-08 | 1985-10-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6264770U true JPS6264770U (cs) | 1987-04-22 |
Family
ID=31073056
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15382585U Pending JPS6264770U (cs) | 1985-10-08 | 1985-10-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6264770U (cs) |
-
1985
- 1985-10-08 JP JP15382585U patent/JPS6264770U/ja active Pending
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