JPH0299963U - - Google Patents
Info
- Publication number
- JPH0299963U JPH0299963U JP710389U JP710389U JPH0299963U JP H0299963 U JPH0299963 U JP H0299963U JP 710389 U JP710389 U JP 710389U JP 710389 U JP710389 U JP 710389U JP H0299963 U JPH0299963 U JP H0299963U
- Authority
- JP
- Japan
- Prior art keywords
- reaction chamber
- excitation light
- thin film
- silicon thin
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP710389U JPH0299963U (cs) | 1989-01-25 | 1989-01-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP710389U JPH0299963U (cs) | 1989-01-25 | 1989-01-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0299963U true JPH0299963U (cs) | 1990-08-09 |
Family
ID=31211838
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP710389U Pending JPH0299963U (cs) | 1989-01-25 | 1989-01-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0299963U (cs) |
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1989
- 1989-01-25 JP JP710389U patent/JPH0299963U/ja active Pending