JPS6350123U - - Google Patents
Info
- Publication number
- JPS6350123U JPS6350123U JP14366886U JP14366886U JPS6350123U JP S6350123 U JPS6350123 U JP S6350123U JP 14366886 U JP14366886 U JP 14366886U JP 14366886 U JP14366886 U JP 14366886U JP S6350123 U JPS6350123 U JP S6350123U
- Authority
- JP
- Japan
- Prior art keywords
- doping gas
- gas supply
- vapor phase
- supply section
- phase growth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 3
- 238000001947 vapour-phase growth Methods 0.000 claims description 3
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 2
- 238000003756 stirring Methods 0.000 claims description 2
- 239000013078 crystal Substances 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14366886U JPS6350123U (cs) | 1986-09-19 | 1986-09-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14366886U JPS6350123U (cs) | 1986-09-19 | 1986-09-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6350123U true JPS6350123U (cs) | 1988-04-05 |
Family
ID=31053565
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14366886U Pending JPS6350123U (cs) | 1986-09-19 | 1986-09-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6350123U (cs) |
-
1986
- 1986-09-19 JP JP14366886U patent/JPS6350123U/ja active Pending
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