JPH02132935U - - Google Patents
Info
- Publication number
- JPH02132935U JPH02132935U JP4117989U JP4117989U JPH02132935U JP H02132935 U JPH02132935 U JP H02132935U JP 4117989 U JP4117989 U JP 4117989U JP 4117989 U JP4117989 U JP 4117989U JP H02132935 U JPH02132935 U JP H02132935U
- Authority
- JP
- Japan
- Prior art keywords
- vapor phase
- phase growth
- reactor
- growth apparatus
- showing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001947 vapour-phase growth Methods 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 2
- 239000007789 gas Substances 0.000 claims 2
- 239000012495 reaction gas Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- RBFQJDQYXXHULB-UHFFFAOYSA-N arsane Chemical compound [AsH3] RBFQJDQYXXHULB-UHFFFAOYSA-N 0.000 description 1
- 229910000070 arsenic hydride Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4117989U JPH02132935U (cs) | 1989-04-07 | 1989-04-07 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4117989U JPH02132935U (cs) | 1989-04-07 | 1989-04-07 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH02132935U true JPH02132935U (cs) | 1990-11-05 |
Family
ID=31551625
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4117989U Pending JPH02132935U (cs) | 1989-04-07 | 1989-04-07 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH02132935U (cs) |
-
1989
- 1989-04-07 JP JP4117989U patent/JPH02132935U/ja active Pending
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