JPH0321844U - - Google Patents
Info
- Publication number
- JPH0321844U JPH0321844U JP8284289U JP8284289U JPH0321844U JP H0321844 U JPH0321844 U JP H0321844U JP 8284289 U JP8284289 U JP 8284289U JP 8284289 U JP8284289 U JP 8284289U JP H0321844 U JPH0321844 U JP H0321844U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- susceptor
- heater cover
- heater
- ring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000126 substance Substances 0.000 claims 2
- 239000012808 vapor phase Substances 0.000 claims 2
- 239000012495 reaction gas Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8284289U JPH0321844U (cs) | 1989-07-14 | 1989-07-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8284289U JPH0321844U (cs) | 1989-07-14 | 1989-07-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0321844U true JPH0321844U (cs) | 1991-03-05 |
Family
ID=31630008
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8284289U Pending JPH0321844U (cs) | 1989-07-14 | 1989-07-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0321844U (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006222372A (ja) * | 2005-02-14 | 2006-08-24 | Nippon Telegr & Teleph Corp <Ntt> | 酸化炉装置 |
-
1989
- 1989-07-14 JP JP8284289U patent/JPH0321844U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006222372A (ja) * | 2005-02-14 | 2006-08-24 | Nippon Telegr & Teleph Corp <Ntt> | 酸化炉装置 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0321844U (cs) | ||
| JPH0350325U (cs) | ||
| JP2783935B2 (ja) | 基板温度制御装置 | |
| JPS6170935U (cs) | ||
| JP3184550B2 (ja) | 気相成長方法及びその装置 | |
| JPS60119743U (ja) | 化学的気相付着装置 | |
| JPS63112331U (cs) | ||
| JPS61177440U (cs) | ||
| JPH0284321U (cs) | ||
| JPH0323923U (cs) | ||
| JPH0426528U (cs) | ||
| JPH0256434U (cs) | ||
| JPS6075460U (ja) | プラズマ気相成長装置 | |
| JPH0350331U (cs) | ||
| JPH0339835U (cs) | ||
| JPH0282772U (cs) | ||
| JPH01153635U (cs) | ||
| JPS5967929U (ja) | 気相成長装置 | |
| JPH0455132U (cs) | ||
| JPH01149472U (cs) | ||
| JPS6346836U (cs) | ||
| JPH02138421U (cs) | ||
| JPS6384931U (cs) | ||
| JPH0367062U (cs) | ||
| JPS61137671U (cs) |