JPS62148927A - Production of active matrix type liquid crystal display device - Google Patents

Abstract

PURPOSE:To scatter spacer materials only on picture element electrodes by giving the same polarity to spacer materials electrically and electrostatically charging picture element electrodes with the opposite polarity. CONSTITUTION:An insulating film 30 used as an oriented film is rubbed with a cloth to not only give orientability to the film 30 but also electrify it negatively. When such positive potential is applied to a column selecting line 28 and a row selecting line 29 that negative electrostatic charge of an insulating film 301 used as an oriented film on a picture element electrode 22 is not cancelled, lines 28 and 29 and an insulating film 302 used as an oriented film on a thin film transistor TR are electrostatically charged positively. When spacer materials 31 like round bars or balls which consist of a glass or plastics and have a uniform diameter are electrostatically charged positively and are scattered by various scattering methods, they are not scattered on lines 28 and 29 and the insulating film 302 but are scattered on only the insulating film 301 to prevent the dielectric breakdown of a circuit.

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to an active display device in which a plurality of display pixel electrodes arranged in a matrix on a first substrate are each provided with a thin film transistor for selectively driving the display pixel electrodes. It relates to a method for manufacturing a matrix type liquid crystal device, especially the first method.
A method for manufacturing an active matrix liquid crystal display device that maintains a uniform interval (hereinafter referred to as the gap) between a pixel electrode formed on a substrate and a counter electrode formed on a second substrate to obtain good display quality. It is related to.

[Technical background of the invention and its problems]

As recent liquid crystal display devices, active matrix type liquid crystal display devices with large capacity and high density are being actively developed and put into practical use for use in television displays, graphics displays, and the like. In such a liquid crystal display device, a semiconductor switch is used as a means for driving and controlling each pixel so that a high contrast 1- display without crosstalk can be performed. These semiconductor switches include MOSFETs formed on single-crystal Si substrates and, recently, thin film transistors (TPTs) formed on transparent insulating substrates because they are capable of transmissive display and are easy to increase in area. etc. are used.

Next, an example of an active matrix liquid crystal display device will be explained with reference to FIG.

That is, the first substrate (1
) is a pixel electrode (2) made of a transparent conductive film such as an ITO film.
), and a drain electrode (3) integrated with this pixel electrode (2)
and a source electrode (4), a semiconductor film (5) provided so as to partially overlap the drain electrode (3) and the source electrode (4), and an insulating film made of 5i02 or the like on the semiconductor layer (5). Gate electrode (7) provided through the membrane (6)
and an insulating film (10) which also serves as an alignment film and is formed on the upper surface of these. On the other hand, the second substrate (1
2) has a counter electrode (made of a transparent conductive film such as an ITO film).
13) is formed.

However, in such an active matrix type liquid crystal display device, the unevenness on the first substrate (1) is approximately 4 μm (4000 people) when an insulating film (10) that also serves as an alignment film is included.
If a spacer material (11) is inserted to uniformly suppress the gap between the pixel electrode (2) and the counter electrode (13) to about 12 μm, the pixel electrode (2) is fine, but
~ If a spacer material (]-1+) is placed on the transistor or on the overpass of a column/row selection line (not shown), the gap will be defined by this spacer material (11, 1). Therefore, the spacer material (11, 1) is deformed, and furthermore,
1~ Pressing the transistors and the three-dimensional intersections of column/row selection lines will cause dielectric breakdown in the circuit, and the gap between the pixel electrode (2) and the common electrode (13) should be made uniform. This is a cause of deterioration in display quality and manufacturing yield.

This also applies to the case where a light-shielding metal film is provided on the transistor to prevent leakage current due to light.

[Purpose of the invention]

The present invention has been made in view of two problems, and an object of the present invention is to provide a method for manufacturing an active matrix type liquid crystal display device in which a spacer material can be sprayed only on pixel electrodes. It is said that

[Summary of the invention]

In the present invention, a liquid crystal layer is sandwiched between a first substrate on which a plurality of pixel electrodes selectively driven by a plurality of thin film transistors are arranged in a matrix, and a second substrate on which a counter electrode is formed, and a spacer is provided. In a method for manufacturing an active matrix liquid crystal display device in which the spacer materials are kept at a predetermined interval by a material, the spacer materials are made to have the same electrical polarity and the pixel electrodes are charged to the opposite polarity. This is a method for manufacturing an active matrix liquid crystal display device, characterized in that the spray is applied only on the electrodes.

[Embodiments of the invention]

Next, an embodiment of the method for manufacturing an active matrix liquid crystal display device of the present invention will be described with reference to FIG. However, the second substrate having a counter electrode and the liquid crystal layer are omitted.

That is, a substrate (21) made of glass or plastic
On top is a pixel electrode (22) made of a transparent conductive film such as ITO.
), and a drain electrode (2) integrated with this pixel electrode (22).
3) and the source electrode (24), and this drain electrode (2
3) and a semiconductor film (25) provided so as to partially overlap with the source electrode (24);
A gate electrode (27) provided through an insulating film (26) made of i02 or the like, a column selection line (28) formed integrally with the source electrode (24), and a column selection line (28) formed integrally with the gate electrode (27). A row selection line (29) and an insulating film (30) which also serves as an alignment film are formed on top of these lines. A pixel electrode (22) on a substrate (21) on which a plurality of pixel electrodes selectively driven by a plurality of thin film transistors configured as described above are arranged in a matrix.
In order to spread the spacer material (31) only on the top, first, the insulating film (30), which also serves as an alignment film, is rubbed with a cloth to give it orientation and to be negatively charged.

Next, a negative −
Apply an indenter potential to the extent that the electrification of the indenter is not canceled. This can be applied by connecting the column selection line (28) and row selection line (29). In this way, the column selection line (28), the row selection line (29), and the insulating film (30□) which also serves as an alignment film on the thin film 1-transistor are charged to the indenter.

Next, when a spacer material (:H) such as a round rod or ball made of glass or plastic with a uniform diameter is sprinkled on the hair charged with a stopper electric value using various scattering methods, the column selection line (28) is applied.
, is not scattered on the row selection line (29) and the insulating film (302) that also serves as the alignment film of the thin film transistor L, but is sprayed only on the insulating film (30+) that also serves as the alignment film on the pixel electrode (22). It turns out.

This manufacturing method includes a column selection line (28) and a row selection line (28).
9), which is a necessary condition for preventing electrostatic damage to the transistor.Also, by rubbing, the insulating film (30
+) is inevitably charged, so selective dispersion as described above is possible by simply charging the spacer material (31) with an opposite charge to that when rubbing the insulating film (:XO>) that also serves as an alignment film. .

〔Effect of the invention〕

11] As described above, the method for manufacturing an active matrix liquid crystal display device of the present invention has the following effects.

That is, since there is no spacer in the thin film transistor or the row/column selection line -1, it is possible to prevent dielectric breakdown in the circuit, and the gap between the pixel electrode and the common electrode is uniform, improving display quality. The direction of manufacturing yield can be measured.

[Brief explanation of drawings]

FIG. 1 is a diagram showing an embodiment of the method for manufacturing a wax-type liquid crystal display device using an active material 1 according to the present invention.
a) is a plan view, and Figure 1 (1)) is A-A in Figure 1 (a).
A cross-sectional view, FIG. 1(c) is an explanatory view showing the spacer material, and FIG.
The figure is an explanatory cross-sectional view of an active matrix type liquid crystal display device manufactured by a conventional manufacturing method. 1.21...First substrate 12...Second substrate 3
．． 23. Train electrode 4, 24... Source electrode 5. 25... Semiconductor film 6, 26. Insulating film 7
．． 27...Goo 1~electrode 1.0.30...Insulating film 11, which also serves as alignment film, 31...Spacer material
13...Counter electrode 28...Column selection line
29・Line selection line agent Patent attorney I” --- Kazuo\Q

Claims (1)

[Claims] A liquid crystal layer is sandwiched between a first substrate on which a plurality of pixel electrodes selectively driven by a plurality of thin film transistors are arranged in a matrix, and a second substrate on which a counter electrode is formed, and the liquid crystal layer is held in a predetermined position by a spacer material. In the method for manufacturing an active matrix liquid crystal display device, the spacer material is electrically polarized to the same polarity, and the pixel electrode is electrically charged to the opposite polarity. A method for manufacturing an active matrix liquid crystal display device, characterized in that the liquid crystal display device is sprayed only on electrodes.