JPS62142844U - - Google Patents
Info
- Publication number
- JPS62142844U JPS62142844U JP3176786U JP3176786U JPS62142844U JP S62142844 U JPS62142844 U JP S62142844U JP 3176786 U JP3176786 U JP 3176786U JP 3176786 U JP3176786 U JP 3176786U JP S62142844 U JPS62142844 U JP S62142844U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- processing tank
- support plate
- tank
- grid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 9
- 239000012535 impurity Substances 0.000 description 1
Description
第１図は本考案の半導体ウエハ用処理槽の正面
図、第２図は第１図の側面図、第３図は第１図の
斜視図、第４図、第５図は従来の半導体ウエハ用
処理槽の正面図、第６図は第５図の側面図である
。
尚、図において、１…半導体ウエハ用処理槽の
側壁、２…半導体ウエハ用処理槽の底面、３…半
導体ウエハ用収納治具、４…不純物、５…半導体
ウエハ、６…支持板である。
Fig. 1 is a front view of the semiconductor wafer processing tank of the present invention, Fig. 2 is a side view of Fig. 1, Fig. 3 is a perspective view of Fig. 1, and Figs. 4 and 5 are conventional semiconductor wafer processing tanks. FIG. 6 is a front view of the processing tank, and FIG. 6 is a side view of FIG. In the figure, 1...side wall of the semiconductor wafer processing tank, 2...bottom of the semiconductor wafer processing tank, 3...semiconductor wafer storage jig, 4...impurities, 5...semiconductor wafer, 6...support plate.
Claims (1)
治具の底面を支持するための格子状もしくは網目
状の支持板を少なくとも該処理槽底面より１cm以
上の高さに設置することを特徴とする半導体ウエ
ハ用処理槽。 A semiconductor wafer, characterized in that a grid-like or mesh-like support plate for supporting the bottom surface of a semiconductor wafer storage jig is installed in a semiconductor wafer processing tank at a height of at least 1 cm or more above the bottom surface of the processing tank. treatment tank.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3176786U JPS62142844U (en) | 1986-03-04 | 1986-03-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3176786U JPS62142844U (en) | 1986-03-04 | 1986-03-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62142844U true JPS62142844U (en) | 1987-09-09 |
Family
ID=30837805
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3176786U Pending JPS62142844U (en) | 1986-03-04 | 1986-03-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62142844U (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4817894U (en) * | 1971-07-12 | 1973-02-28 | ||
| JPS59175126A (en) * | 1983-03-23 | 1984-10-03 | Nec Corp | Processing vessel for semiconductor wafer |
-
1986
- 1986-03-04 JP JP3176786U patent/JPS62142844U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4817894U (en) * | 1971-07-12 | 1973-02-28 | ||
| JPS59175126A (en) * | 1983-03-23 | 1984-10-03 | Nec Corp | Processing vessel for semiconductor wafer |